In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures

Gespeichert in:

Autor*in:	Humlícek, J. [verfasserIn]

Format:	Artikel

Erschienen:	2008

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Physica status solidi. A, Applications and materials science - Berlin : Wiley-VCH, 1970, 205(2008), 4, Seite 793-796
Übergeordnetes Werk:	volume:205 ; year:2008 ; number:4 ; pages:793-796 ; extent:4

Katalog-ID:	OLC1791542867

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In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures

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