Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

Gespeichert in:

Autor*in:	Lee, C.L. [verfasserIn] Gu, E. Dawson, M.D. Friel, I. Scarsbrook, G.A.

Format:	Artikel

Erschienen:	2008

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Diamond and related materials - New York, NY [u.a.] : Elsevier, 1991, 17(2008), 7, Seite 1292-1296
Übergeordnetes Werk:	volume:17 ; year:2008 ; number:7 ; pages:1292-1296 ; extent:5

Katalog-ID:	OLC1799003515

Internformat


LEADER	01000caa a22002652 4500
001	OLC1799003515
003	DE-627
005	20230710151105.0
007	tu
008	080819s2008 xx \|\|\|\|\| 00\| \|\|und c
028	5	2	\|a sw080819
035			\|a (DE-627)OLC1799003515
035			\|a (DE-599)GBVOLC1799003515
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 550 \|a 670
100	1		\|a Lee, C.L. \|e verfasserin \|4 aut
245	1	0	\|a Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
264		1	\|c 2008
300			\|a 5
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Gu, E. \|4 oth
700	1		\|a Dawson, M.D. \|4 oth
700	1		\|a Friel, I. \|4 oth
700	1		\|a Scarsbrook, G.A. \|4 oth
773	0	8	\|i Enthalten in \|t Diamond and related materials \|d New York, NY [u.a.] : Elsevier, 1991 \|g 17(2008), 7, Seite 1292-1296 \|w (DE-627)131029959 \|w (DE-600)1095775-3 \|w (DE-576)02915507X \|x 0925-9635 \|7 nnns
773	1	8	\|g volume:17 \|g year:2008 \|g number:7 \|g pages:1292-1296 \|g extent:5
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-TEC
912			\|a GBV_ILN_40
912			\|a GBV_ILN_70
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_4318
951			\|a AR
952			\|d 17 \|j 2008 \|e 7 \|h 1292-1296 \|g 5

Indexfelder

author_variant	c l cl
matchkey_str	article:09259635:2008----::thnadirotcfbiainnimnuighoieaei
hierarchy_sort_str	2008
publishDate	2008
allfields	sw080819 (DE-627)OLC1799003515 (DE-599)GBVOLC1799003515 DE-627 ger DE-627 rakwb 550 670 Lee, C.L. verfasserin aut Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma 2008 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Gu, E. oth Dawson, M.D. oth Friel, I. oth Scarsbrook, G.A. oth Enthalten in Diamond and related materials New York, NY [u.a.] : Elsevier, 1991 17(2008), 7, Seite 1292-1296 (DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X 0925-9635 nnns volume:17 year:2008 number:7 pages:1292-1296 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318 AR 17 2008 7 1292-1296 5
spelling	sw080819 (DE-627)OLC1799003515 (DE-599)GBVOLC1799003515 DE-627 ger DE-627 rakwb 550 670 Lee, C.L. verfasserin aut Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma 2008 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Gu, E. oth Dawson, M.D. oth Friel, I. oth Scarsbrook, G.A. oth Enthalten in Diamond and related materials New York, NY [u.a.] : Elsevier, 1991 17(2008), 7, Seite 1292-1296 (DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X 0925-9635 nnns volume:17 year:2008 number:7 pages:1292-1296 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318 AR 17 2008 7 1292-1296 5
allfields_unstemmed	sw080819 (DE-627)OLC1799003515 (DE-599)GBVOLC1799003515 DE-627 ger DE-627 rakwb 550 670 Lee, C.L. verfasserin aut Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma 2008 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Gu, E. oth Dawson, M.D. oth Friel, I. oth Scarsbrook, G.A. oth Enthalten in Diamond and related materials New York, NY [u.a.] : Elsevier, 1991 17(2008), 7, Seite 1292-1296 (DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X 0925-9635 nnns volume:17 year:2008 number:7 pages:1292-1296 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318 AR 17 2008 7 1292-1296 5
allfieldsGer	sw080819 (DE-627)OLC1799003515 (DE-599)GBVOLC1799003515 DE-627 ger DE-627 rakwb 550 670 Lee, C.L. verfasserin aut Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma 2008 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Gu, E. oth Dawson, M.D. oth Friel, I. oth Scarsbrook, G.A. oth Enthalten in Diamond and related materials New York, NY [u.a.] : Elsevier, 1991 17(2008), 7, Seite 1292-1296 (DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X 0925-9635 nnns volume:17 year:2008 number:7 pages:1292-1296 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318 AR 17 2008 7 1292-1296 5
allfieldsSound	sw080819 (DE-627)OLC1799003515 (DE-599)GBVOLC1799003515 DE-627 ger DE-627 rakwb 550 670 Lee, C.L. verfasserin aut Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma 2008 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Gu, E. oth Dawson, M.D. oth Friel, I. oth Scarsbrook, G.A. oth Enthalten in Diamond and related materials New York, NY [u.a.] : Elsevier, 1991 17(2008), 7, Seite 1292-1296 (DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X 0925-9635 nnns volume:17 year:2008 number:7 pages:1292-1296 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318 AR 17 2008 7 1292-1296 5
source	Enthalten in Diamond and related materials 17(2008), 7, Seite 1292-1296 volume:17 year:2008 number:7 pages:1292-1296 extent:5
sourceStr	Enthalten in Diamond and related materials 17(2008), 7, Seite 1292-1296 volume:17 year:2008 number:7 pages:1292-1296 extent:5
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	550
isfreeaccess_bool	false
container_title	Diamond and related materials
authorswithroles_txt_mv	Lee, C.L. @@aut@@ Gu, E. @@oth@@ Dawson, M.D. @@oth@@ Friel, I. @@oth@@ Scarsbrook, G.A. @@oth@@
publishDateDaySort_date	2008-01-01T00:00:00Z
hierarchy_top_id	131029959
dewey-sort	3550
id	OLC1799003515
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1799003515</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230710151105.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">080819s2008 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">sw080819</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1799003515</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1799003515</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">550</subfield><subfield code="a">670</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Lee, C.L.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2008</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gu, E.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dawson, M.D.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Friel, I.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Scarsbrook, G.A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Diamond and related materials</subfield><subfield code="d">New York, NY [u.a.] : Elsevier, 1991</subfield><subfield code="g">17(2008), 7, Seite 1292-1296</subfield><subfield code="w">(DE-627)131029959</subfield><subfield code="w">(DE-600)1095775-3</subfield><subfield code="w">(DE-576)02915507X</subfield><subfield code="x">0925-9635</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:17</subfield><subfield code="g">year:2008</subfield><subfield code="g">number:7</subfield><subfield code="g">pages:1292-1296</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4318</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">17</subfield><subfield code="j">2008</subfield><subfield code="e">7</subfield><subfield code="h">1292-1296</subfield><subfield code="g">5</subfield></datafield></record></collection>
author	Lee, C.L.
spellingShingle	Lee, C.L. ddc 550 Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
authorStr	Lee, C.L.
ppnlink_with_tag_str_mv	@@773@@(DE-627)131029959
format	Article
dewey-ones	550 - Earth sciences 670 - Manufacturing
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0925-9635
topic_title	550 670 Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
topic	ddc 550
topic_unstemmed	ddc 550
topic_browse	ddc 550
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	e g eg m d md i f if g s gs
hierarchy_parent_title	Diamond and related materials
hierarchy_parent_id	131029959
dewey-tens	550 - Earth sciences & geology 670 - Manufacturing
hierarchy_top_title	Diamond and related materials
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X
title	Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
ctrlnum	(DE-627)OLC1799003515 (DE-599)GBVOLC1799003515
title_full	Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
author_sort	Lee, C.L.
journal	Diamond and related materials
journalStr	Diamond and related materials
isOA_bool	false
dewey-hundreds	500 - Science 600 - Technology
recordtype	marc
publishDateSort	2008
contenttype_str_mv	txt
container_start_page	1292
author_browse	Lee, C.L.
container_volume	17
physical	5
class	550 670
format_se	Aufsätze
author-letter	Lee, C.L.
dewey-full	550 670
title_sort	etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
title_auth	Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318
container_issue	7
title_short	Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
remote_bool	false
author2	Gu, E. Dawson, M.D. Friel, I. Scarsbrook, G.A.
author2Str	Gu, E. Dawson, M.D. Friel, I. Scarsbrook, G.A.
ppnlink	131029959
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth oth
up_date	2024-07-03T23:17:22.411Z
_version_	1803601725265805312
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1799003515</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230710151105.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">080819s2008 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">sw080819</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1799003515</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1799003515</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">550</subfield><subfield code="a">670</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Lee, C.L.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2008</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gu, E.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dawson, M.D.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Friel, I.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Scarsbrook, G.A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Diamond and related materials</subfield><subfield code="d">New York, NY [u.a.] : Elsevier, 1991</subfield><subfield code="g">17(2008), 7, Seite 1292-1296</subfield><subfield code="w">(DE-627)131029959</subfield><subfield code="w">(DE-600)1095775-3</subfield><subfield code="w">(DE-576)02915507X</subfield><subfield code="x">0925-9635</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:17</subfield><subfield code="g">year:2008</subfield><subfield code="g">number:7</subfield><subfield code="g">pages:1292-1296</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4318</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">17</subfield><subfield code="j">2008</subfield><subfield code="e">7</subfield><subfield code="h">1292-1296</subfield><subfield code="g">5</subfield></datafield></record></collection>
score	7.399208

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