Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
Autor*in: |
Lee, C.L. [verfasserIn] |
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Format: |
Artikel |
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Erschienen: |
2008 |
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Umfang: |
5 |
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Übergeordnetes Werk: |
Enthalten in: Diamond and related materials - New York, NY [u.a.] : Elsevier, 1991, 17(2008), 7, Seite 1292-1296 |
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Übergeordnetes Werk: |
volume:17 ; year:2008 ; number:7 ; pages:1292-1296 ; extent:5 |
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sw080819 (DE-627)OLC1799003515 (DE-599)GBVOLC1799003515 DE-627 ger DE-627 rakwb 550 670 Lee, C.L. verfasserin aut Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma 2008 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Gu, E. oth Dawson, M.D. oth Friel, I. oth Scarsbrook, G.A. oth Enthalten in Diamond and related materials New York, NY [u.a.] : Elsevier, 1991 17(2008), 7, Seite 1292-1296 (DE-627)131029959 (DE-600)1095775-3 (DE-576)02915507X 0925-9635 nnns volume:17 year:2008 number:7 pages:1292-1296 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_40 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4318 AR 17 2008 7 1292-1296 5 |
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