Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source

Gespeichert in:

Autor*in:	Barkusky, Frank [verfasserIn] Bayer, Armin Peth, Christian Mann, Klaus

Format:	Artikel

Erschienen:	2009

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 105(2009), 1, Seite 14906
Übergeordnetes Werk:	volume:105 ; year:2009 ; number:1 ; pages:14906 ; extent:1

Katalog-ID:	OLC1807987426

Internformat


LEADER	01000caa a22002652 4500
001	OLC1807987426
003	DE-627
005	20230710205406.0
007	tu
008	090119s2009 xx \|\|\|\|\| 00\| \|\|und c
028	5	2	\|a sw090119
035			\|a (DE-627)OLC1807987426
035			\|a (DE-599)GBVOLC1807987426
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 530
100	1		\|a Barkusky, Frank \|e verfasserin \|4 aut
245	1	0	\|a Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
264		1	\|c 2009
300			\|a 1
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Bayer, Armin \|4 oth
700	1		\|a Peth, Christian \|4 oth
700	1		\|a Mann, Klaus \|4 oth
773	0	8	\|i Enthalten in \|t Journal of applied physics \|d Melville, NY : AIP, 1937 \|g 105(2009), 1, Seite 14906 \|w (DE-627)129079030 \|w (DE-600)3112-4 \|w (DE-576)014411652 \|x 0021-8979 \|7 nnns
773	1	8	\|g volume:105 \|g year:2009 \|g number:1 \|g pages:14906 \|g extent:1
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-PHY
912			\|a GBV_ILN_22
912			\|a GBV_ILN_30
912			\|a GBV_ILN_31
912			\|a GBV_ILN_40
912			\|a GBV_ILN_59
912			\|a GBV_ILN_70
912			\|a GBV_ILN_130
912			\|a GBV_ILN_170
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2185
912			\|a GBV_ILN_2279
912			\|a GBV_ILN_2409
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 105 \|j 2009 \|e 1 \|h 14906 \|g 1

Indexfelder

author_variant	f b fb
matchkey_str	article:00218979:2009----::iethtecigfoyessnrdainfihnryestfoaaltpxr
hierarchy_sort_str	2009
publishDate	2009
allfields	sw090119 (DE-627)OLC1807987426 (DE-599)GBVOLC1807987426 DE-627 ger DE-627 rakwb 530 Barkusky, Frank verfasserin aut Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source 2009 1 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Bayer, Armin oth Peth, Christian oth Mann, Klaus oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 105(2009), 1, Seite 14906 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:105 year:2009 number:1 pages:14906 extent:1 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_59 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4307 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 105 2009 1 14906 1
spelling	sw090119 (DE-627)OLC1807987426 (DE-599)GBVOLC1807987426 DE-627 ger DE-627 rakwb 530 Barkusky, Frank verfasserin aut Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source 2009 1 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Bayer, Armin oth Peth, Christian oth Mann, Klaus oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 105(2009), 1, Seite 14906 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:105 year:2009 number:1 pages:14906 extent:1 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_59 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4307 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 105 2009 1 14906 1
allfields_unstemmed	sw090119 (DE-627)OLC1807987426 (DE-599)GBVOLC1807987426 DE-627 ger DE-627 rakwb 530 Barkusky, Frank verfasserin aut Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source 2009 1 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Bayer, Armin oth Peth, Christian oth Mann, Klaus oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 105(2009), 1, Seite 14906 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:105 year:2009 number:1 pages:14906 extent:1 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_59 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4307 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 105 2009 1 14906 1
allfieldsGer	sw090119 (DE-627)OLC1807987426 (DE-599)GBVOLC1807987426 DE-627 ger DE-627 rakwb 530 Barkusky, Frank verfasserin aut Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source 2009 1 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Bayer, Armin oth Peth, Christian oth Mann, Klaus oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 105(2009), 1, Seite 14906 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:105 year:2009 number:1 pages:14906 extent:1 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_59 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4307 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 105 2009 1 14906 1
allfieldsSound	sw090119 (DE-627)OLC1807987426 (DE-599)GBVOLC1807987426 DE-627 ger DE-627 rakwb 530 Barkusky, Frank verfasserin aut Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source 2009 1 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Bayer, Armin oth Peth, Christian oth Mann, Klaus oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 105(2009), 1, Seite 14906 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:105 year:2009 number:1 pages:14906 extent:1 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_59 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4307 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 105 2009 1 14906 1
source	Enthalten in Journal of applied physics 105(2009), 1, Seite 14906 volume:105 year:2009 number:1 pages:14906 extent:1
sourceStr	Enthalten in Journal of applied physics 105(2009), 1, Seite 14906 volume:105 year:2009 number:1 pages:14906 extent:1
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	530
isfreeaccess_bool	false
container_title	Journal of applied physics
authorswithroles_txt_mv	Barkusky, Frank @@aut@@ Bayer, Armin @@oth@@ Peth, Christian @@oth@@ Mann, Klaus @@oth@@
publishDateDaySort_date	2009-01-01T00:00:00Z
hierarchy_top_id	129079030
dewey-sort	3530
id	OLC1807987426
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1807987426</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230710205406.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">090119s2009 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">sw090119</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1807987426</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1807987426</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Barkusky, Frank</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2009</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bayer, Armin</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Peth, Christian</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mann, Klaus</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of applied physics</subfield><subfield code="d">Melville, NY : AIP, 1937</subfield><subfield code="g">105(2009), 1, Seite 14906</subfield><subfield code="w">(DE-627)129079030</subfield><subfield code="w">(DE-600)3112-4</subfield><subfield code="w">(DE-576)014411652</subfield><subfield code="x">0021-8979</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:105</subfield><subfield code="g">year:2009</subfield><subfield code="g">number:1</subfield><subfield code="g">pages:14906</subfield><subfield code="g">extent:1</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_59</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2279</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2409</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">105</subfield><subfield code="j">2009</subfield><subfield code="e">1</subfield><subfield code="h">14906</subfield><subfield code="g">1</subfield></datafield></record></collection>
author	Barkusky, Frank
spellingShingle	Barkusky, Frank ddc 530 Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
authorStr	Barkusky, Frank
ppnlink_with_tag_str_mv	@@773@@(DE-627)129079030
format	Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0021-8979
topic_title	530 Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
topic	ddc 530
topic_unstemmed	ddc 530
topic_browse	ddc 530
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	a b ab c p cp k m km
hierarchy_parent_title	Journal of applied physics
hierarchy_parent_id	129079030
dewey-tens	530 - Physics
hierarchy_top_title	Journal of applied physics
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)129079030 (DE-600)3112-4 (DE-576)014411652
title	Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
ctrlnum	(DE-627)OLC1807987426 (DE-599)GBVOLC1807987426
title_full	Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
author_sort	Barkusky, Frank
journal	Journal of applied physics
journalStr	Journal of applied physics
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	2009
contenttype_str_mv	txt
container_start_page	14906
author_browse	Barkusky, Frank
container_volume	105
physical	1
class	530
format_se	Aufsätze
author-letter	Barkusky, Frank
dewey-full	530
title_sort	direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
title_auth	Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_59 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4307 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700
container_issue	1
title_short	Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source
remote_bool	false
author2	Bayer, Armin Peth, Christian Mann, Klaus
author2Str	Bayer, Armin Peth, Christian Mann, Klaus
ppnlink	129079030
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth
up_date	2024-07-03T19:41:52.604Z
_version_	1803588167393083392
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1807987426</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230710205406.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">090119s2009 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">sw090119</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1807987426</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1807987426</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Barkusky, Frank</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2009</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bayer, Armin</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Peth, Christian</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mann, Klaus</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of applied physics</subfield><subfield code="d">Melville, NY : AIP, 1937</subfield><subfield code="g">105(2009), 1, Seite 14906</subfield><subfield code="w">(DE-627)129079030</subfield><subfield code="w">(DE-600)3112-4</subfield><subfield code="w">(DE-576)014411652</subfield><subfield code="x">0021-8979</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:105</subfield><subfield code="g">year:2009</subfield><subfield code="g">number:1</subfield><subfield code="g">pages:14906</subfield><subfield code="g">extent:1</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_59</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2279</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2409</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">105</subfield><subfield code="j">2009</subfield><subfield code="e">1</subfield><subfield code="h">14906</subfield><subfield code="g">1</subfield></datafield></record></collection>
score	7.4009466

Nicht das Richtige dabei?

Schreiben Sie uns!

Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?