Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

Gespeichert in:

Autor*in:	Prest, M.J. [verfasserIn] Wang, Y. Huang, F. Lancaster, M.J.

Format:	Artikel

Erschienen:	2008

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Journal of micromechanics and microengineering - Bristol : IOP Publ., 1991, 18(2008), 12, Seite 125003
Übergeordnetes Werk:	volume:18 ; year:2008 ; number:12 ; pages:125003 ; extent:1

Katalog-ID:	OLC1808355075

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