Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

Gespeichert in:

Autor*in:	Sainiemi, Lauri [verfasserIn] Grigoras, Kestas Kassamakov, Ivan Hanhijärvi, Kalle Aaltonen, Juha Fan, Ji Saarela, Ville Hæggström, Edward Franssila, Sami

Format:	Artikel

Erschienen:	2009

Umfang:	10

Übergeordnetes Werk:	Enthalten in: Sensors and actuators / A - Amsterdam [u.a.] : Elsevier, 1990, 149(2009), 2, Seite 305-314
Übergeordnetes Werk:	volume:149 ; year:2009 ; number:2 ; pages:305-314 ; extent:10

Katalog-ID:	OLC1809338999

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