Correlation between sputtering parameters and composition of SmCo-based films for microelectromechanical system applications
Autor*in: |
Peng, Long [verfasserIn] |
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Artikel |
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Erschienen: |
2009 |
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Umfang: |
1 |
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Übergeordnetes Werk: |
Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 105(2009), 6, Seite 63915 |
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Übergeordnetes Werk: |
volume:105 ; year:2009 ; number:6 ; pages:63915 ; extent:1 |
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