Correlation between sputtering parameters and composition of SmCo-based films for microelectromechanical system applications

Gespeichert in:

Autor*in:	Peng, Long [verfasserIn] Zhang, Huaiwu Yang, Qinghui Li, Yuanxun Song, Yuanqiang Shen, Jian

Format:	Artikel

Erschienen:	2009

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 105(2009), 6, Seite 63915
Übergeordnetes Werk:	volume:105 ; year:2009 ; number:6 ; pages:63915 ; extent:1

Katalog-ID:	OLC1817189093

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Correlation between sputtering parameters and composition of SmCo-based films for microelectromechanical system applications

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