Metal-induced dopant (boron and phosphorus) activation process in amorphous germanium for monolithic three-dimensional integration

Gespeichert in:

Autor*in:	Park, Jin-Hong [verfasserIn] Tada, Munehiro Jung, Woo-Shik Wong, H.-S.Philip Saraswat, Krishna C.

Format:	Artikel

Erschienen:	2009

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 106(2009), 7, Seite 74510
Übergeordnetes Werk:	volume:106 ; year:2009 ; number:7 ; pages:74510 ; extent:1

Katalog-ID:	OLC1828156671

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Metal-induced dopant (boron and phosphorus) activation process in amorphous germanium for monolithic three-dimensional integration

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