Real-time spectroellipsometric characterization of nucleation, islanding, and coalescence behavior of boron films grown by soft x-ray excited chemical vapor deposition

Gespeichert in:

Autor*in:	Akazawa, Housei [verfasserIn]

Format:	Artikel

Erschienen:	2010

Systematik:	UA 4921

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Journal of vacuum science and technology / A - New York, NY : Inst., 1983, 28(2010), 3, Seite 411-419
Übergeordnetes Werk:	volume:28 ; year:2010 ; number:3 ; pages:411-419 ; extent:8

Katalog-ID:	OLC1843576643

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Real-time spectroellipsometric characterization of nucleation, islanding, and coalescence behavior of boron films grown by soft x-ray excited chemical vapor deposition

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