Optimizing focused ion beam created solid immersion lenses in bulk silicon using design of experiments

Gespeichert in:

Autor*in:	Scholz, P. [verfasserIn] Gallrapp, C. Kerst, U. Lundquist, T. Boit, C.

Format:	Artikel

Erschienen:	2010

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Microelectronics reliability - Amsterdam [u.a.] : Elsevier, 1964, 50(2010), 9 vom: Sept., Seite 1441-1446
Übergeordnetes Werk:	volume:50 ; year:2010 ; number:9 ; month:09 ; pages:1441-1446 ; extent:5

Katalog-ID:	OLC1849005230

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