Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator

Gespeichert in:

Autor*in:	Prest, M J [verfasserIn] Wang, Y Huang, F Lancaster, M J

Format:	Artikel

Erschienen:	2010

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Journal of micromechanics and microengineering - Bristol : IOP Publ., 1991, 20(2010), 9 vom: 1. Sept., Seite 95032-95033
Übergeordnetes Werk:	volume:20 ; year:2010 ; number:9 ; day:1 ; month:09 ; pages:95032-95033 ; extent:1

Katalog-ID:	OLC1849315825

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title_sort	tuning of a superconducting microwave resonator at 77 k using an integrated micromachined silicon vertical actuator
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