A comparative study of a new microscale technique and conventional bending techniques for evaluating the interface adhesion strength in IC metallization systems
Gespeichert in:
| Autor*in: |
Kamiya, Shoji [verfasserIn] |
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| Format: |
Artikel |
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| Erschienen: |
2010 |
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| Systematik: |
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| Umfang: |
12 |
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| Übergeordnetes Werk: |
Enthalten in: Journal of materials research - Warrendale, Pa. : Materials Research Society, 1986, 25(2010), 10, Seite 1917-1929 |
|---|---|
| Übergeordnetes Werk: |
volume:25 ; year:2010 ; number:10 ; pages:1917-1929 ; extent:12 |
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