Porous silicon for the development of capacitive microstructures
Autor*in: |
Sancho, A. [verfasserIn] |
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Format: |
Artikel |
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Erschienen: |
2009 |
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Umfang: |
5 |
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Übergeordnetes Werk: |
Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 86(2009), 11 vom: Nov., Seite 2144-2149 |
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Übergeordnetes Werk: |
volume:86 ; year:2009 ; number:11 ; month:11 ; pages:2144-2149 ; extent:5 |
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