A newly developed long range positioning table system with a sub-nanometer resolution

Gespeichert in:

Autor*in:	Shinno, H. [verfasserIn] Yoshioka, H. Sawano, H.

Format:	Artikel

Erschienen:	2011

Umfang:	4

Übergeordnetes Werk:	Enthalten in: CIRP annals ... - Oxford : Elsevier, 1975, 60(2011), 1, Seite 403-407
Übergeordnetes Werk:	volume:60 ; year:2011 ; number:1 ; pages:403-407 ; extent:4

Katalog-ID:	OLC187049542X

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