Mechanical characterization of LiPON films using nanoindentation

Gespeichert in:

Autor*in:	Herbert, E.G. [verfasserIn] Tenhaeff, W.E. Dudney, N.J. Pharr, G.M.

Format:	Artikel

Erschienen:	2011

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Thin solid films - Amsterdam [u.a.] Elsevier, 1967, 520(2011), 1 vom: 31. Okt., Seite 413-419
Übergeordnetes Werk:	volume:520 ; year:2011 ; number:1 ; day:31 ; month:10 ; pages:413-419 ; extent:6

Katalog-ID:	OLC1883983479

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allfields	sw111206_2 (DE-627)OLC1883983479 (DE-599)GBVOLC1883983479 DE-627 ger DE-627 rakwb 050 530 530 AVZ Herbert, E.G. verfasserin aut Mechanical characterization of LiPON films using nanoindentation 2011 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tenhaeff, W.E. oth Dudney, N.J. oth Pharr, G.M. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 520(2011), 1 vom: 31. Okt., Seite 413-419 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:520 year:2011 number:1 day:31 month:10 pages:413-419 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_21 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2279 GBV_ILN_4700 AR 520 2011 1 31 10 413-419 6
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allfieldsSound	sw111206_2 (DE-627)OLC1883983479 (DE-599)GBVOLC1883983479 DE-627 ger DE-627 rakwb 050 530 530 AVZ Herbert, E.G. verfasserin aut Mechanical characterization of LiPON films using nanoindentation 2011 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tenhaeff, W.E. oth Dudney, N.J. oth Pharr, G.M. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 520(2011), 1 vom: 31. Okt., Seite 413-419 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:520 year:2011 number:1 day:31 month:10 pages:413-419 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_21 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2279 GBV_ILN_4700 AR 520 2011 1 31 10 413-419 6
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