The effects of nanoscaled amorphous Si and SiN x protective layers on the atomic oxygen resistant and tribological properties of Ag film
Gespeichert in:
| Autor*in: |
Hu, Ming [verfasserIn] |
|---|
| Format: |
Artikel |
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| Erschienen: |
2012 |
|---|
| Umfang: |
6 |
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| Übergeordnetes Werk: |
Enthalten in: Applied surface science - Amsterdam [u.a.] : Elsevier, 1985, 258(2012), 15 vom: 15. Mai, Seite 5683-5689 |
|---|---|
| Übergeordnetes Werk: |
volume:258 ; year:2012 ; number:15 ; day:15 ; month:05 ; pages:5683-5689 ; extent:6 |
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