Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Gespeichert in:

Autor*in:	Vasin, A.V. [verfasserIn] Rusavsky, A.V. Nazarov, A.N. Lysenko, V.S. Lytvyn, P.M. Strelchuk, V.V. Kholostov, K.I. Bondarenko, V.P. Starik, S.P.

Format:	Artikel

Erschienen:	2012

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Applied surface science - Amsterdam [u.a.] : Elsevier, 1985, 260(2012) vom: 1. Nov., Seite 73-77
Übergeordnetes Werk:	volume:260 ; year:2012 ; day:1 ; month:11 ; pages:73-77 ; extent:4

Katalog-ID:	OLC1903859271

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allfieldsSound	sw120923_1 (DE-627)OLC1903859271 (DE-599)GBVOLC1903859271 DE-627 ger DE-627 rakwb 670 530 660 Vasin, A.V. verfasserin aut Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films 2012 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Rusavsky, A.V. oth Nazarov, A.N. oth Lysenko, V.S. oth Lytvyn, P.M. oth Strelchuk, V.V. oth Kholostov, K.I. oth Bondarenko, V.P. oth Starik, S.P. oth Enthalten in Applied surface science Amsterdam [u.a.] : Elsevier, 1985 260(2012) vom: 1. Nov., Seite 73-77 (DE-627)129187496 (DE-600)52886-9 (DE-576)014456311 0169-4332 nnns volume:260 year:2012 day:1 month:11 pages:73-77 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2006 AR 260 2012 1 11 73-77 4
source	Enthalten in Applied surface science 260(2012) vom: 1. Nov., Seite 73-77 volume:260 year:2012 day:1 month:11 pages:73-77 extent:4
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Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

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