Identification and tackling of a parasitic surface compound in SiC and Si-rich carbide films

Gespeichert in:

Autor*in:	Canino, M. [verfasserIn] Summonte, C. Allegrezza, M. Shukla, Rimpy Jain, I.P. Bellettato, M. Desalvo, A. Mancarella, F. Sanmartin, M. Terrasi, A. Löper, P. Schnabel, M. Janz, S.

Format:	Artikel

Erschienen:	2013

Systematik:	VA 5950.

Umfang:	7

Übergeordnetes Werk:	Enthalten in: Materials science and engineering / B - Amsterdam [u.a.] : Elsevier, 1988, 178(2013), 9 vom: 15. Mai, Seite 623-629
Übergeordnetes Werk:	volume:178 ; year:2013 ; number:9 ; day:15 ; month:05 ; pages:623-629 ; extent:7

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Identification and tackling of a parasitic surface compound in SiC and Si-rich carbide films

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