Structural and morphological evolution of aluminum nitride thin films: Influence of additional energy to the sputtering process
Gespeichert in:
| Autor*in: |
Signore, M.A. [verfasserIn] |
|---|
| Format: |
Artikel |
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| Erschienen: |
2013 |
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| Umfang: |
8 |
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| Übergeordnetes Werk: |
Enthalten in: The journal of physics and chemistry of solids - New York, NY [u.a.] : Pergamon Press, 1962, 74(2013), 10 vom: Okt., Seite 1444-1451 |
|---|---|
| Übergeordnetes Werk: |
volume:74 ; year:2013 ; number:10 ; month:10 ; pages:1444-1451 ; extent:8 |
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