Transmission Grating Fabrication for Replicating Resist Patterns of 20 nm and Below

Gespeichert in:

Autor*in:	Yamaguchi, Yuya [verfasserIn] Fukushima, Yasuyuki Harada, Tetsuo Watanabe, Takeo Kinoshita, Hiroo

Format:	Artikel

Erschienen:	2011

Systematik:	UA 4210.

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers - Tokyo : Ōyō Butsuri Gakkai, 1982, 50(2011), 6, S vom: 1. Juni, Seite 6GB10
Übergeordnetes Werk:	volume:50 ; year:2011 ; number:6 ; day:1 ; month:06 ; supplement:S ; pages:6GB10 ; extent:1

Katalog-ID:	OLC1935436236

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