Impedance spectroscopy studies of moisture uptake in low-k dielectrics and its relation to reliability

Gespeichert in:

Autor*in:	Raja, Archana [verfasserIn] Laibowitz, Robert Liniger, Eric G Shaw, Thomas M Heinz, Tony F

Format:	Artikel
Sprache:	Englisch

Erschienen:	2015

Übergeordnetes Werk:	Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 147(2015), Seite 100-103
Übergeordnetes Werk:	volume:147 ; year:2015 ; pages:100-103

Links:	Volltext

DOI / URN:	10.1016/j.mee.2015.04.020

Katalog-ID:	OLC195650382X

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