Printability of defects in Talbot lithography

Gespeichert in:

Autor*in:	Sato, Takashi [verfasserIn] Yamada, Akiko Suto, Takeshi Inanami, Ryoichi Matsuki, Kazuto Ito, Shinichi

Format:	Artikel
Sprache:	Englisch

Erschienen:	2015

Übergeordnetes Werk:	Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 143(2015), Seite 21-24
Übergeordnetes Werk:	volume:143 ; year:2015 ; pages:21-24

Links:	Volltext

DOI / URN:	10.1016/j.mee.2015.02.046

Katalog-ID:	OLC1956504834

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allfieldsSound	10.1016/j.mee.2015.02.046 doi PQ20160617 (DE-627)OLC1956504834 (DE-599)GBVOLC1956504834 (PRQ)c1316-c0953059537a88e00d9456d75d0b5a94998d30c24e12907851348f359811484e0 (KEY)0120575720150000143000000021printabilityofdefectsintalbotlithography DE-627 ger DE-627 rakwb eng 620 DNB 53.51 bkl 53.56 bkl 53.52 bkl 50.94 bkl Sato, Takashi verfasserin aut Printability of defects in Talbot lithography 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Yamada, Akiko oth Suto, Takeshi oth Inanami, Ryoichi oth Matsuki, Kazuto oth Ito, Shinichi oth Enthalten in Microelectronic engineering Amsterdam [u.a.] : Elsevier, 1983 143(2015), Seite 21-24 (DE-627)130400688 (DE-600)605230-7 (DE-576)015903680 0167-9317 nnns volume:143 year:2015 pages:21-24 http://dx.doi.org/10.1016/j.mee.2015.02.046 Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_2004 53.51 AVZ 53.56 AVZ 53.52 AVZ 50.94 AVZ AR 143 2015 21-24
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Printability of defects in Talbot lithography

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