AFM applications to study the morphology of HfO2 multilayer thin films
Autor*in: |
Ramzan, M [verfasserIn] |
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Format: |
Artikel |
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Sprache: |
Englisch |
Erschienen: |
2015 |
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Übergeordnetes Werk: |
Enthalten in: Superlattices and microstructures - Oxford [u.a.] : Elsevier Science, Academic Press, 1985, 82(2015), Seite 399-405 |
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Übergeordnetes Werk: |
volume:82 ; year:2015 ; pages:399-405 |
Links: |
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DOI / URN: |
10.1016/j.spmi.2015.02.030 |
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Katalog-ID: |
OLC1957165626 |
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