Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator
We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Accoto, Celso [verfasserIn] |
|---|
| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2015 |
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| Schlagwörter: |
two-photon direct laser writing biomechanical sensing applications finite-element methods simulations complex suspended microchannel resonator |
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| Übergeordnetes Werk: |
Enthalten in: Journal of microelectromechanical systems - New York, NY : IEEE, 1992, 24(2015), 4, Seite 1038-1042 |
|---|---|
| Übergeordnetes Werk: |
volume:24 ; year:2015 ; number:4 ; pages:1038-1042 |
| Links: |
|---|
| DOI / URN: |
10.1109/JMEMS.2014.2376986 |
|---|
| Katalog-ID: |
OLC1959244809 |
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| 520 | |a We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. | ||
| 650 | 4 | |a biosensors | |
| 650 | 4 | |a two-photon direct laser writing | |
| 650 | 4 | |a Sensors | |
| 650 | 4 | |a biomechanical sensing applications | |
| 650 | 4 | |a Resonant frequency | |
| 650 | 4 | |a Microchannels | |
| 650 | 4 | |a optical realization | |
| 650 | 4 | |a lab-on-chip | |
| 650 | 4 | |a Lithography | |
| 650 | 4 | |a big inlet-outlet sections | |
| 650 | 4 | |a realized resonant structure | |
| 650 | 4 | |a finite element analysis | |
| 650 | 4 | |a Microfluidics | |
| 650 | 4 | |a photolithography | |
| 650 | 4 | |a two-photon processes | |
| 650 | 4 | |a epoxy resins | |
| 650 | 4 | |a polymerisation | |
| 650 | 4 | |a fabrication time | |
| 650 | 4 | |a complex SMR sensors | |
| 650 | 4 | |a shell-writing procedure | |
| 650 | 4 | |a fabrication step | |
| 650 | 4 | |a intrinsically 3-D nature | |
| 650 | 4 | |a Doppler measurement | |
| 650 | 4 | |a finite-element methods simulations | |
| 650 | 4 | |a microfluidic systems | |
| 650 | 4 | |a microchannel flow | |
| 650 | 4 | |a lab-on-a-chip | |
| 650 | 4 | |a experimental quality factor | |
| 650 | 4 | |a laser doppler vibrometry | |
| 650 | 4 | |a Laser beams | |
| 650 | 4 | |a complex suspended microchannel resonator | |
| 650 | 4 | |a Polymers | |
| 650 | 4 | |a Fabrication | |
| 650 | 4 | |a two-photon polymerization lithography | |
| 650 | 4 | |a Finite element method | |
| 650 | 4 | |a Research | |
| 650 | 4 | |a Simulation methods | |
| 650 | 4 | |a Usage | |
| 650 | 4 | |a Resonators | |
| 700 | 1 | |a Qualtieri, Antonio |4 oth | |
| 700 | 1 | |a Pisanello, Ferruccio |4 oth | |
| 700 | 1 | |a Ricciardi, Carlo |4 oth | |
| 700 | 1 | |a Pirri, Candido Fabrizio |4 oth | |
| 700 | 1 | |a De Vittorio, Massimo |4 oth | |
| 700 | 1 | |a Rizzi, Francesco |4 oth | |
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10.1109/JMEMS.2014.2376986 doi PQ20160617 (DE-627)OLC1959244809 (DE-599)GBVOLC1959244809 (PRQ)c1792-4751756fe3ef193a348a2b0f3274c5c1930c1c4ecac0761ecab1023a45b636b0 (KEY)0213815820150000024000401038twophotonpolymerizationlithographyandlaserdopplerv DE-627 ger DE-627 rakwb eng 620 DNB Accoto, Celso verfasserin aut Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. biosensors two-photon direct laser writing Sensors biomechanical sensing applications Resonant frequency Microchannels optical realization lab-on-chip Lithography big inlet-outlet sections realized resonant structure finite element analysis Microfluidics photolithography two-photon processes epoxy resins polymerisation fabrication time complex SMR sensors shell-writing procedure fabrication step intrinsically 3-D nature Doppler measurement finite-element methods simulations microfluidic systems microchannel flow lab-on-a-chip experimental quality factor laser doppler vibrometry Laser beams complex suspended microchannel resonator Polymers Fabrication two-photon polymerization lithography Finite element method Research Simulation methods Usage Resonators Qualtieri, Antonio oth Pisanello, Ferruccio oth Ricciardi, Carlo oth Pirri, Candido Fabrizio oth De Vittorio, Massimo oth Rizzi, Francesco oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 1038-1042 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:1038-1042 http://dx.doi.org/10.1109/JMEMS.2014.2376986 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6995979 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 1038-1042 |
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10.1109/JMEMS.2014.2376986 doi PQ20160617 (DE-627)OLC1959244809 (DE-599)GBVOLC1959244809 (PRQ)c1792-4751756fe3ef193a348a2b0f3274c5c1930c1c4ecac0761ecab1023a45b636b0 (KEY)0213815820150000024000401038twophotonpolymerizationlithographyandlaserdopplerv DE-627 ger DE-627 rakwb eng 620 DNB Accoto, Celso verfasserin aut Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. biosensors two-photon direct laser writing Sensors biomechanical sensing applications Resonant frequency Microchannels optical realization lab-on-chip Lithography big inlet-outlet sections realized resonant structure finite element analysis Microfluidics photolithography two-photon processes epoxy resins polymerisation fabrication time complex SMR sensors shell-writing procedure fabrication step intrinsically 3-D nature Doppler measurement finite-element methods simulations microfluidic systems microchannel flow lab-on-a-chip experimental quality factor laser doppler vibrometry Laser beams complex suspended microchannel resonator Polymers Fabrication two-photon polymerization lithography Finite element method Research Simulation methods Usage Resonators Qualtieri, Antonio oth Pisanello, Ferruccio oth Ricciardi, Carlo oth Pirri, Candido Fabrizio oth De Vittorio, Massimo oth Rizzi, Francesco oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 1038-1042 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:1038-1042 http://dx.doi.org/10.1109/JMEMS.2014.2376986 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6995979 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 1038-1042 |
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10.1109/JMEMS.2014.2376986 doi PQ20160617 (DE-627)OLC1959244809 (DE-599)GBVOLC1959244809 (PRQ)c1792-4751756fe3ef193a348a2b0f3274c5c1930c1c4ecac0761ecab1023a45b636b0 (KEY)0213815820150000024000401038twophotonpolymerizationlithographyandlaserdopplerv DE-627 ger DE-627 rakwb eng 620 DNB Accoto, Celso verfasserin aut Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. biosensors two-photon direct laser writing Sensors biomechanical sensing applications Resonant frequency Microchannels optical realization lab-on-chip Lithography big inlet-outlet sections realized resonant structure finite element analysis Microfluidics photolithography two-photon processes epoxy resins polymerisation fabrication time complex SMR sensors shell-writing procedure fabrication step intrinsically 3-D nature Doppler measurement finite-element methods simulations microfluidic systems microchannel flow lab-on-a-chip experimental quality factor laser doppler vibrometry Laser beams complex suspended microchannel resonator Polymers Fabrication two-photon polymerization lithography Finite element method Research Simulation methods Usage Resonators Qualtieri, Antonio oth Pisanello, Ferruccio oth Ricciardi, Carlo oth Pirri, Candido Fabrizio oth De Vittorio, Massimo oth Rizzi, Francesco oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 1038-1042 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:1038-1042 http://dx.doi.org/10.1109/JMEMS.2014.2376986 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6995979 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 1038-1042 |
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10.1109/JMEMS.2014.2376986 doi PQ20160617 (DE-627)OLC1959244809 (DE-599)GBVOLC1959244809 (PRQ)c1792-4751756fe3ef193a348a2b0f3274c5c1930c1c4ecac0761ecab1023a45b636b0 (KEY)0213815820150000024000401038twophotonpolymerizationlithographyandlaserdopplerv DE-627 ger DE-627 rakwb eng 620 DNB Accoto, Celso verfasserin aut Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. biosensors two-photon direct laser writing Sensors biomechanical sensing applications Resonant frequency Microchannels optical realization lab-on-chip Lithography big inlet-outlet sections realized resonant structure finite element analysis Microfluidics photolithography two-photon processes epoxy resins polymerisation fabrication time complex SMR sensors shell-writing procedure fabrication step intrinsically 3-D nature Doppler measurement finite-element methods simulations microfluidic systems microchannel flow lab-on-a-chip experimental quality factor laser doppler vibrometry Laser beams complex suspended microchannel resonator Polymers Fabrication two-photon polymerization lithography Finite element method Research Simulation methods Usage Resonators Qualtieri, Antonio oth Pisanello, Ferruccio oth Ricciardi, Carlo oth Pirri, Candido Fabrizio oth De Vittorio, Massimo oth Rizzi, Francesco oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 1038-1042 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:1038-1042 http://dx.doi.org/10.1109/JMEMS.2014.2376986 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6995979 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 1038-1042 |
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10.1109/JMEMS.2014.2376986 doi PQ20160617 (DE-627)OLC1959244809 (DE-599)GBVOLC1959244809 (PRQ)c1792-4751756fe3ef193a348a2b0f3274c5c1930c1c4ecac0761ecab1023a45b636b0 (KEY)0213815820150000024000401038twophotonpolymerizationlithographyandlaserdopplerv DE-627 ger DE-627 rakwb eng 620 DNB Accoto, Celso verfasserin aut Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. biosensors two-photon direct laser writing Sensors biomechanical sensing applications Resonant frequency Microchannels optical realization lab-on-chip Lithography big inlet-outlet sections realized resonant structure finite element analysis Microfluidics photolithography two-photon processes epoxy resins polymerisation fabrication time complex SMR sensors shell-writing procedure fabrication step intrinsically 3-D nature Doppler measurement finite-element methods simulations microfluidic systems microchannel flow lab-on-a-chip experimental quality factor laser doppler vibrometry Laser beams complex suspended microchannel resonator Polymers Fabrication two-photon polymerization lithography Finite element method Research Simulation methods Usage Resonators Qualtieri, Antonio oth Pisanello, Ferruccio oth Ricciardi, Carlo oth Pirri, Candido Fabrizio oth De Vittorio, Massimo oth Rizzi, Francesco oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 1038-1042 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:1038-1042 http://dx.doi.org/10.1109/JMEMS.2014.2376986 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6995979 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 1038-1042 |
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Enthalten in Journal of microelectromechanical systems 24(2015), 4, Seite 1038-1042 volume:24 year:2015 number:4 pages:1038-1042 |
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Enthalten in Journal of microelectromechanical systems 24(2015), 4, Seite 1038-1042 volume:24 year:2015 number:4 pages:1038-1042 |
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Accoto, Celso @@aut@@ Qualtieri, Antonio @@oth@@ Pisanello, Ferruccio @@oth@@ Ricciardi, Carlo @@oth@@ Pirri, Candido Fabrizio @@oth@@ De Vittorio, Massimo @@oth@@ Rizzi, Francesco @@oth@@ |
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620 DNB Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator biosensors two-photon direct laser writing Sensors biomechanical sensing applications Resonant frequency Microchannels optical realization lab-on-chip Lithography big inlet-outlet sections realized resonant structure finite element analysis Microfluidics photolithography two-photon processes epoxy resins polymerisation fabrication time complex SMR sensors shell-writing procedure fabrication step intrinsically 3-D nature Doppler measurement finite-element methods simulations microfluidic systems microchannel flow lab-on-a-chip experimental quality factor laser doppler vibrometry Laser beams complex suspended microchannel resonator Polymers Fabrication two-photon polymerization lithography Finite element method Research Simulation methods Usage Resonators |
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Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator |
| abstract |
We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. |
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We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. |
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We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of ~60. |
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Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator |
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Qualtieri, Antonio Pisanello, Ferruccio Ricciardi, Carlo Pirri, Candido Fabrizio De Vittorio, Massimo Rizzi, Francesco |
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