A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers
This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays re...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Yipeng Lu [verfasserIn] |
|---|
| Format: |
Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2015 |
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| Schlagwörter: |
high fill factor annular array piezoelectric micromachined ultrasonic transducers intravascular ultrasound imaging micromachined ultrasonic transducer (MUT) |
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| Übergeordnetes Werk: |
Enthalten in: Journal of microelectromechanical systems - New York, NY : IEEE, 1992, 24(2015), 4, Seite 904-913 |
|---|---|
| Übergeordnetes Werk: |
volume:24 ; year:2015 ; number:4 ; pages:904-913 |
| Links: |
|---|
| DOI / URN: |
10.1109/JMEMS.2014.2358991 |
|---|
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OLC195924485X |
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| 520 | |a This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. | ||
| 650 | 4 | |a high fill factor annular array | |
| 650 | 4 | |a piezoelectric | |
| 650 | 4 | |a Resonant frequency | |
| 650 | 4 | |a microsensors | |
| 650 | 4 | |a Arrays | |
| 650 | 4 | |a III-V semiconductors | |
| 650 | 4 | |a biomedical ultrasonics | |
| 650 | 4 | |a frequency 18.6 MHz | |
| 650 | 4 | |a ultrasonic imaging | |
| 650 | 4 | |a micromachining | |
| 650 | 4 | |a ultrasonic | |
| 650 | 4 | |a piezoelectric transducers | |
| 650 | 4 | |a III-V semiconductor materials | |
| 650 | 4 | |a piezoelectric micromachined ultrasonic transducers | |
| 650 | 4 | |a aluminium compounds | |
| 650 | 4 | |a Sensitivity | |
| 650 | 4 | |a transducer | |
| 650 | 4 | |a Transducers | |
| 650 | 4 | |a Aluminum nitride (AlN) | |
| 650 | 4 | |a Acoustics | |
| 650 | 4 | |a wide band gap semiconductors | |
| 650 | 4 | |a front side sacrificial etch | |
| 650 | 4 | |a CMOS integrated circuits | |
| 650 | 4 | |a intravascular ultrasound imaging | |
| 650 | 4 | |a Stress | |
| 650 | 4 | |a AlN-SiO 2 | |
| 650 | 4 | |a ultrasonic transducer arrays | |
| 650 | 4 | |a biomedical transducers | |
| 650 | 4 | |a micromachined ultrasonic transducer (MUT) | |
| 650 | 4 | |a size 25 mum | |
| 650 | 4 | |a phased array | |
| 650 | 4 | |a size 1.2 mm | |
| 650 | 4 | |a radio frequency resonators | |
| 650 | 4 | |a bandwidth 4.9 MHz | |
| 650 | 4 | |a piezoelectric MUT (PMUT) | |
| 650 | 4 | |a inertial sensor fabrication | |
| 650 | 4 | |a high frequency ultrasonic transducers | |
| 650 | 4 | |a Piezoelectricity | |
| 650 | 4 | |a Finite element method | |
| 650 | 4 | |a Influence | |
| 650 | 4 | |a Aluminum nitride | |
| 650 | 4 | |a Research | |
| 650 | 4 | |a Ultrasonic transducers | |
| 650 | 4 | |a Simulation methods | |
| 650 | 4 | |a Usage | |
| 700 | 1 | |a Heidari, Amir |4 oth | |
| 700 | 1 | |a Horsley, David A |4 oth | |
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| 856 | 4 | 1 | |u http://dx.doi.org/10.1109/JMEMS.2014.2358991 |3 Volltext |
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10.1109/JMEMS.2014.2358991 doi PQ20160617 (DE-627)OLC195924485X (DE-599)GBVOLC195924485X (PRQ)c1797-44b3aff84bf728f5f3e2e5c0823bd912ff8386959ba1f919aeb55a6c2be5b2ac0 (KEY)0213815820150000024000400904highfillfactorannulararrayofhighfrequencypiezoelec DE-627 ger DE-627 rakwb eng 620 DNB Yipeng Lu verfasserin aut A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. high fill factor annular array piezoelectric Resonant frequency microsensors Arrays III-V semiconductors biomedical ultrasonics frequency 18.6 MHz ultrasonic imaging micromachining ultrasonic piezoelectric transducers III-V semiconductor materials piezoelectric micromachined ultrasonic transducers aluminium compounds Sensitivity transducer Transducers Aluminum nitride (AlN) Acoustics wide band gap semiconductors front side sacrificial etch CMOS integrated circuits intravascular ultrasound imaging Stress AlN-SiO 2 ultrasonic transducer arrays biomedical transducers micromachined ultrasonic transducer (MUT) size 25 mum phased array size 1.2 mm radio frequency resonators bandwidth 4.9 MHz piezoelectric MUT (PMUT) inertial sensor fabrication high frequency ultrasonic transducers Piezoelectricity Finite element method Influence Aluminum nitride Research Ultrasonic transducers Simulation methods Usage Heidari, Amir oth Horsley, David A oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 904-913 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:904-913 http://dx.doi.org/10.1109/JMEMS.2014.2358991 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6912934 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 904-913 |
| spelling |
10.1109/JMEMS.2014.2358991 doi PQ20160617 (DE-627)OLC195924485X (DE-599)GBVOLC195924485X (PRQ)c1797-44b3aff84bf728f5f3e2e5c0823bd912ff8386959ba1f919aeb55a6c2be5b2ac0 (KEY)0213815820150000024000400904highfillfactorannulararrayofhighfrequencypiezoelec DE-627 ger DE-627 rakwb eng 620 DNB Yipeng Lu verfasserin aut A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. high fill factor annular array piezoelectric Resonant frequency microsensors Arrays III-V semiconductors biomedical ultrasonics frequency 18.6 MHz ultrasonic imaging micromachining ultrasonic piezoelectric transducers III-V semiconductor materials piezoelectric micromachined ultrasonic transducers aluminium compounds Sensitivity transducer Transducers Aluminum nitride (AlN) Acoustics wide band gap semiconductors front side sacrificial etch CMOS integrated circuits intravascular ultrasound imaging Stress AlN-SiO 2 ultrasonic transducer arrays biomedical transducers micromachined ultrasonic transducer (MUT) size 25 mum phased array size 1.2 mm radio frequency resonators bandwidth 4.9 MHz piezoelectric MUT (PMUT) inertial sensor fabrication high frequency ultrasonic transducers Piezoelectricity Finite element method Influence Aluminum nitride Research Ultrasonic transducers Simulation methods Usage Heidari, Amir oth Horsley, David A oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 904-913 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:904-913 http://dx.doi.org/10.1109/JMEMS.2014.2358991 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6912934 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 904-913 |
| allfields_unstemmed |
10.1109/JMEMS.2014.2358991 doi PQ20160617 (DE-627)OLC195924485X (DE-599)GBVOLC195924485X (PRQ)c1797-44b3aff84bf728f5f3e2e5c0823bd912ff8386959ba1f919aeb55a6c2be5b2ac0 (KEY)0213815820150000024000400904highfillfactorannulararrayofhighfrequencypiezoelec DE-627 ger DE-627 rakwb eng 620 DNB Yipeng Lu verfasserin aut A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. high fill factor annular array piezoelectric Resonant frequency microsensors Arrays III-V semiconductors biomedical ultrasonics frequency 18.6 MHz ultrasonic imaging micromachining ultrasonic piezoelectric transducers III-V semiconductor materials piezoelectric micromachined ultrasonic transducers aluminium compounds Sensitivity transducer Transducers Aluminum nitride (AlN) Acoustics wide band gap semiconductors front side sacrificial etch CMOS integrated circuits intravascular ultrasound imaging Stress AlN-SiO 2 ultrasonic transducer arrays biomedical transducers micromachined ultrasonic transducer (MUT) size 25 mum phased array size 1.2 mm radio frequency resonators bandwidth 4.9 MHz piezoelectric MUT (PMUT) inertial sensor fabrication high frequency ultrasonic transducers Piezoelectricity Finite element method Influence Aluminum nitride Research Ultrasonic transducers Simulation methods Usage Heidari, Amir oth Horsley, David A oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 904-913 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:904-913 http://dx.doi.org/10.1109/JMEMS.2014.2358991 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6912934 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 904-913 |
| allfieldsGer |
10.1109/JMEMS.2014.2358991 doi PQ20160617 (DE-627)OLC195924485X (DE-599)GBVOLC195924485X (PRQ)c1797-44b3aff84bf728f5f3e2e5c0823bd912ff8386959ba1f919aeb55a6c2be5b2ac0 (KEY)0213815820150000024000400904highfillfactorannulararrayofhighfrequencypiezoelec DE-627 ger DE-627 rakwb eng 620 DNB Yipeng Lu verfasserin aut A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. high fill factor annular array piezoelectric Resonant frequency microsensors Arrays III-V semiconductors biomedical ultrasonics frequency 18.6 MHz ultrasonic imaging micromachining ultrasonic piezoelectric transducers III-V semiconductor materials piezoelectric micromachined ultrasonic transducers aluminium compounds Sensitivity transducer Transducers Aluminum nitride (AlN) Acoustics wide band gap semiconductors front side sacrificial etch CMOS integrated circuits intravascular ultrasound imaging Stress AlN-SiO 2 ultrasonic transducer arrays biomedical transducers micromachined ultrasonic transducer (MUT) size 25 mum phased array size 1.2 mm radio frequency resonators bandwidth 4.9 MHz piezoelectric MUT (PMUT) inertial sensor fabrication high frequency ultrasonic transducers Piezoelectricity Finite element method Influence Aluminum nitride Research Ultrasonic transducers Simulation methods Usage Heidari, Amir oth Horsley, David A oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 904-913 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:904-913 http://dx.doi.org/10.1109/JMEMS.2014.2358991 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6912934 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 904-913 |
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10.1109/JMEMS.2014.2358991 doi PQ20160617 (DE-627)OLC195924485X (DE-599)GBVOLC195924485X (PRQ)c1797-44b3aff84bf728f5f3e2e5c0823bd912ff8386959ba1f919aeb55a6c2be5b2ac0 (KEY)0213815820150000024000400904highfillfactorannulararrayofhighfrequencypiezoelec DE-627 ger DE-627 rakwb eng 620 DNB Yipeng Lu verfasserin aut A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. high fill factor annular array piezoelectric Resonant frequency microsensors Arrays III-V semiconductors biomedical ultrasonics frequency 18.6 MHz ultrasonic imaging micromachining ultrasonic piezoelectric transducers III-V semiconductor materials piezoelectric micromachined ultrasonic transducers aluminium compounds Sensitivity transducer Transducers Aluminum nitride (AlN) Acoustics wide band gap semiconductors front side sacrificial etch CMOS integrated circuits intravascular ultrasound imaging Stress AlN-SiO 2 ultrasonic transducer arrays biomedical transducers micromachined ultrasonic transducer (MUT) size 25 mum phased array size 1.2 mm radio frequency resonators bandwidth 4.9 MHz piezoelectric MUT (PMUT) inertial sensor fabrication high frequency ultrasonic transducers Piezoelectricity Finite element method Influence Aluminum nitride Research Ultrasonic transducers Simulation methods Usage Heidari, Amir oth Horsley, David A oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 24(2015), 4, Seite 904-913 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:24 year:2015 number:4 pages:904-913 http://dx.doi.org/10.1109/JMEMS.2014.2358991 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6912934 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 24 2015 4 904-913 |
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Yipeng Lu ddc 620 misc high fill factor annular array misc piezoelectric misc Resonant frequency misc microsensors misc Arrays misc III-V semiconductors misc biomedical ultrasonics misc frequency 18.6 MHz misc ultrasonic imaging misc micromachining misc ultrasonic misc piezoelectric transducers misc III-V semiconductor materials misc piezoelectric micromachined ultrasonic transducers misc aluminium compounds misc Sensitivity misc transducer misc Transducers misc Aluminum nitride (AlN) misc Acoustics misc wide band gap semiconductors misc front side sacrificial etch misc CMOS integrated circuits misc intravascular ultrasound imaging misc Stress misc AlN-SiO 2 misc ultrasonic transducer arrays misc biomedical transducers misc micromachined ultrasonic transducer (MUT) misc size 25 mum misc phased array misc size 1.2 mm misc radio frequency resonators misc bandwidth 4.9 MHz misc piezoelectric MUT (PMUT) misc inertial sensor fabrication misc high frequency ultrasonic transducers misc Piezoelectricity misc Finite element method misc Influence misc Aluminum nitride misc Research misc Ultrasonic transducers misc Simulation methods misc Usage A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers |
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620 DNB A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers high fill factor annular array piezoelectric Resonant frequency microsensors Arrays III-V semiconductors biomedical ultrasonics frequency 18.6 MHz ultrasonic imaging micromachining ultrasonic piezoelectric transducers III-V semiconductor materials piezoelectric micromachined ultrasonic transducers aluminium compounds Sensitivity transducer Transducers Aluminum nitride (AlN) Acoustics wide band gap semiconductors front side sacrificial etch CMOS integrated circuits intravascular ultrasound imaging Stress AlN-SiO 2 ultrasonic transducer arrays biomedical transducers micromachined ultrasonic transducer (MUT) size 25 mum phased array size 1.2 mm radio frequency resonators bandwidth 4.9 MHz piezoelectric MUT (PMUT) inertial sensor fabrication high frequency ultrasonic transducers Piezoelectricity Finite element method Influence Aluminum nitride Research Ultrasonic transducers Simulation methods Usage |
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ddc 620 misc high fill factor annular array misc piezoelectric misc Resonant frequency misc microsensors misc Arrays misc III-V semiconductors misc biomedical ultrasonics misc frequency 18.6 MHz misc ultrasonic imaging misc micromachining misc ultrasonic misc piezoelectric transducers misc III-V semiconductor materials misc piezoelectric micromachined ultrasonic transducers misc aluminium compounds misc Sensitivity misc transducer misc Transducers misc Aluminum nitride (AlN) misc Acoustics misc wide band gap semiconductors misc front side sacrificial etch misc CMOS integrated circuits misc intravascular ultrasound imaging misc Stress misc AlN-SiO 2 misc ultrasonic transducer arrays misc biomedical transducers misc micromachined ultrasonic transducer (MUT) misc size 25 mum misc phased array misc size 1.2 mm misc radio frequency resonators misc bandwidth 4.9 MHz misc piezoelectric MUT (PMUT) misc inertial sensor fabrication misc high frequency ultrasonic transducers misc Piezoelectricity misc Finite element method misc Influence misc Aluminum nitride misc Research misc Ultrasonic transducers misc Simulation methods misc Usage |
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ddc 620 misc high fill factor annular array misc piezoelectric misc Resonant frequency misc microsensors misc Arrays misc III-V semiconductors misc biomedical ultrasonics misc frequency 18.6 MHz misc ultrasonic imaging misc micromachining misc ultrasonic misc piezoelectric transducers misc III-V semiconductor materials misc piezoelectric micromachined ultrasonic transducers misc aluminium compounds misc Sensitivity misc transducer misc Transducers misc Aluminum nitride (AlN) misc Acoustics misc wide band gap semiconductors misc front side sacrificial etch misc CMOS integrated circuits misc intravascular ultrasound imaging misc Stress misc AlN-SiO 2 misc ultrasonic transducer arrays misc biomedical transducers misc micromachined ultrasonic transducer (MUT) misc size 25 mum misc phased array misc size 1.2 mm misc radio frequency resonators misc bandwidth 4.9 MHz misc piezoelectric MUT (PMUT) misc inertial sensor fabrication misc high frequency ultrasonic transducers misc Piezoelectricity misc Finite element method misc Influence misc Aluminum nitride misc Research misc Ultrasonic transducers misc Simulation methods misc Usage |
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ddc 620 misc high fill factor annular array misc piezoelectric misc Resonant frequency misc microsensors misc Arrays misc III-V semiconductors misc biomedical ultrasonics misc frequency 18.6 MHz misc ultrasonic imaging misc micromachining misc ultrasonic misc piezoelectric transducers misc III-V semiconductor materials misc piezoelectric micromachined ultrasonic transducers misc aluminium compounds misc Sensitivity misc transducer misc Transducers misc Aluminum nitride (AlN) misc Acoustics misc wide band gap semiconductors misc front side sacrificial etch misc CMOS integrated circuits misc intravascular ultrasound imaging misc Stress misc AlN-SiO 2 misc ultrasonic transducer arrays misc biomedical transducers misc micromachined ultrasonic transducer (MUT) misc size 25 mum misc phased array misc size 1.2 mm misc radio frequency resonators misc bandwidth 4.9 MHz misc piezoelectric MUT (PMUT) misc inertial sensor fabrication misc high frequency ultrasonic transducers misc Piezoelectricity misc Finite element method misc Influence misc Aluminum nitride misc Research misc Ultrasonic transducers misc Simulation methods misc Usage |
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A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers |
| abstract |
This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. |
| abstractGer |
This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. |
| abstract_unstemmed |
This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for intravascular ultrasound imaging. At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam. |
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At 1061 transducers/mm 2 , the PMUT array has a 10-20 times higher density than previous PMUT arrays realized to date. Aluminum nitride (AlN)-based PMUTs described in this paper are fabricated using a process compatible with the fabrication of inertial sensors, radio frequency (RF) resonators, and CMOS integrated circuits. The PMUTs are released using a front-side sacrificial etch through etching holes that are subsequently sealed by a thin layer of parylene. Finite element method and analytical results, including resonant frequency, pressure sensitivity, output acoustic pressure, and directivity are given to guide the PMUT design effectively, and are shown to match well with measurement results. Due to the PMUTs thin membrane (750-nm AlN/800-nm SiO 2 ) and small diameter, a single 25-μm PMUT has approximately omnidirectional directivity and no near-field zone with irregular pressure pattern. PMUTs are characterized in both the frequency and time domains. Measurement results show a large displacement response of 2.5 nm/V at resonance and good frequency matching in air, high center frequency of 18.6 MHz and wide bandwidth of 4.9 MHz, when immersed in fluid. Phased array simulations based on measured PMUT parameters show a tightly focused high-output pressure acoustic beam.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">high fill factor annular array</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">piezoelectric</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Resonant frequency</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microsensors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Arrays</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">III-V semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">biomedical ultrasonics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">frequency 18.6 MHz</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">ultrasonic imaging</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">micromachining</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">ultrasonic</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">piezoelectric transducers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">III-V semiconductor materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">piezoelectric micromachined ultrasonic transducers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">aluminium compounds</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sensitivity</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">transducer</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Transducers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield 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ind2="4"><subfield code="a">micromachined ultrasonic transducer (MUT)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">size 25 mum</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">phased array</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">size 1.2 mm</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">radio frequency resonators</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">bandwidth 4.9 MHz</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">piezoelectric MUT (PMUT)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">inertial sensor fabrication</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">high frequency ultrasonic transducers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield 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