Improved surface morphology of a Ti/Al/Ni/Au ohmic contact for AlGaN/GaN heterostructure by Al2O3 particles
Autor*in: |
Lim, Jin Hong [verfasserIn] |
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Format: |
Artikel |
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Sprache: |
Englisch |
Erschienen: |
2015 |
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Übergeordnetes Werk: |
Enthalten in: Microelectronics reliability - Amsterdam [u.a.] : Elsevier, 1964, 55(2015), 12, Seite 2565-2568 |
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Übergeordnetes Werk: |
volume:55 ; year:2015 ; number:12 ; pages:2565-2568 |
Links: |
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DOI / URN: |
10.1016/j.microrel.2015.10.005 |
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