A tightly coupled non-equilibrium model for inductively coupled radio-frequency plasmas

Gespeichert in:

Autor*in:	Cambier, A. J.-L [verfasserIn] Alfuhaid, S Munafo, A Panesi, M

Format:	Artikel
Sprache:	Englisch

Erschienen:	2015

Schlagwörter:	Maxwell equations High temperature plasmas Plasma (Ionized gases) Analysis Boltzmann constant

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 118(2015), 13
Übergeordnetes Werk:	volume:118 ; year:2015 ; number:13

Katalog-ID:	OLC1969732512

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