Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits

This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybri...
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Autor*in:	Tian, Yang [verfasserIn] Wang, Hong Liu, Zhihong Meng, Qianqian Lee, Kokyan

Format:	Artikel
Sprache:	Englisch

Erschienen:	2016

Schlagwörter:	Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss

Übergeordnetes Werk:	Enthalten in: IEEE microwave and wireless components letters - New York, NY : Inst., 1991, 26(2016), 3, Seite 162-164
Übergeordnetes Werk:	volume:26 ; year:2016 ; number:3 ; pages:162-164

Links:	Volltext Link aufrufen

DOI / URN:	10.1109/LMWC.2016.2524657

Katalog-ID:	OLC1974265420

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allfields	10.1109/LMWC.2016.2524657 doi PQ20160430 (DE-627)OLC1974265420 (DE-599)GBVOLC1974265420 (PRQ)i537-fe2b2d26f84c3fb736b1692c656bf4f62eae64e99f07f3cdbc2dd2381d3e367b0 (KEY)0392640020160000026000300162lowlossmicrocoaxialratracehybridforsibasedmicrowav DE-627 ger DE-627 rakwb eng 620 DNB 53.82 bkl Tian, Yang verfasserin aut Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications. Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss Wang, Hong oth Liu, Zhihong oth Meng, Qianqian oth Lee, Kokyan oth Enthalten in IEEE microwave and wireless components letters New York, NY : Inst., 1991 26(2016), 3, Seite 162-164 (DE-627)130939455 (DE-600)1059336-6 (DE-576)025091948 1051-8207 nnns volume:26 year:2016 number:3 pages:162-164 http://dx.doi.org/10.1109/LMWC.2016.2524657 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7419232 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2016 53.82 AVZ AR 26 2016 3 162-164
spelling	10.1109/LMWC.2016.2524657 doi PQ20160430 (DE-627)OLC1974265420 (DE-599)GBVOLC1974265420 (PRQ)i537-fe2b2d26f84c3fb736b1692c656bf4f62eae64e99f07f3cdbc2dd2381d3e367b0 (KEY)0392640020160000026000300162lowlossmicrocoaxialratracehybridforsibasedmicrowav DE-627 ger DE-627 rakwb eng 620 DNB 53.82 bkl Tian, Yang verfasserin aut Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications. Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss Wang, Hong oth Liu, Zhihong oth Meng, Qianqian oth Lee, Kokyan oth Enthalten in IEEE microwave and wireless components letters New York, NY : Inst., 1991 26(2016), 3, Seite 162-164 (DE-627)130939455 (DE-600)1059336-6 (DE-576)025091948 1051-8207 nnns volume:26 year:2016 number:3 pages:162-164 http://dx.doi.org/10.1109/LMWC.2016.2524657 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7419232 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2016 53.82 AVZ AR 26 2016 3 162-164
allfields_unstemmed	10.1109/LMWC.2016.2524657 doi PQ20160430 (DE-627)OLC1974265420 (DE-599)GBVOLC1974265420 (PRQ)i537-fe2b2d26f84c3fb736b1692c656bf4f62eae64e99f07f3cdbc2dd2381d3e367b0 (KEY)0392640020160000026000300162lowlossmicrocoaxialratracehybridforsibasedmicrowav DE-627 ger DE-627 rakwb eng 620 DNB 53.82 bkl Tian, Yang verfasserin aut Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications. Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss Wang, Hong oth Liu, Zhihong oth Meng, Qianqian oth Lee, Kokyan oth Enthalten in IEEE microwave and wireless components letters New York, NY : Inst., 1991 26(2016), 3, Seite 162-164 (DE-627)130939455 (DE-600)1059336-6 (DE-576)025091948 1051-8207 nnns volume:26 year:2016 number:3 pages:162-164 http://dx.doi.org/10.1109/LMWC.2016.2524657 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7419232 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2016 53.82 AVZ AR 26 2016 3 162-164
allfieldsGer	10.1109/LMWC.2016.2524657 doi PQ20160430 (DE-627)OLC1974265420 (DE-599)GBVOLC1974265420 (PRQ)i537-fe2b2d26f84c3fb736b1692c656bf4f62eae64e99f07f3cdbc2dd2381d3e367b0 (KEY)0392640020160000026000300162lowlossmicrocoaxialratracehybridforsibasedmicrowav DE-627 ger DE-627 rakwb eng 620 DNB 53.82 bkl Tian, Yang verfasserin aut Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications. Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss Wang, Hong oth Liu, Zhihong oth Meng, Qianqian oth Lee, Kokyan oth Enthalten in IEEE microwave and wireless components letters New York, NY : Inst., 1991 26(2016), 3, Seite 162-164 (DE-627)130939455 (DE-600)1059336-6 (DE-576)025091948 1051-8207 nnns volume:26 year:2016 number:3 pages:162-164 http://dx.doi.org/10.1109/LMWC.2016.2524657 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7419232 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2016 53.82 AVZ AR 26 2016 3 162-164
allfieldsSound	10.1109/LMWC.2016.2524657 doi PQ20160430 (DE-627)OLC1974265420 (DE-599)GBVOLC1974265420 (PRQ)i537-fe2b2d26f84c3fb736b1692c656bf4f62eae64e99f07f3cdbc2dd2381d3e367b0 (KEY)0392640020160000026000300162lowlossmicrocoaxialratracehybridforsibasedmicrowav DE-627 ger DE-627 rakwb eng 620 DNB 53.82 bkl Tian, Yang verfasserin aut Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications. Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss Wang, Hong oth Liu, Zhihong oth Meng, Qianqian oth Lee, Kokyan oth Enthalten in IEEE microwave and wireless components letters New York, NY : Inst., 1991 26(2016), 3, Seite 162-164 (DE-627)130939455 (DE-600)1059336-6 (DE-576)025091948 1051-8207 nnns volume:26 year:2016 number:3 pages:162-164 http://dx.doi.org/10.1109/LMWC.2016.2524657 Volltext http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7419232 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2016 53.82 AVZ AR 26 2016 3 162-164
language	English
source	Enthalten in IEEE microwave and wireless components letters 26(2016), 3, Seite 162-164 volume:26 year:2016 number:3 pages:162-164
sourceStr	Enthalten in IEEE microwave and wireless components letters 26(2016), 3, Seite 162-164 volume:26 year:2016 number:3 pages:162-164
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topic_facet	Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss
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topic_title	620 DNB 53.82 bkl Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits Microwave circuits Silicon Propagation losses Microwave integrated circuits transmission loss CMOS integrated circuits phase response Isolation rat-race hybrid S-parameters Resists System-on-chip return loss
topic	ddc 620 bkl 53.82 misc Microwave circuits misc Silicon misc Propagation losses misc Microwave integrated circuits misc transmission loss misc CMOS integrated circuits misc phase response misc Isolation misc rat-race hybrid misc S-parameters misc Resists misc System-on-chip misc return loss
topic_unstemmed	ddc 620 bkl 53.82 misc Microwave circuits misc Silicon misc Propagation losses misc Microwave integrated circuits misc transmission loss misc CMOS integrated circuits misc phase response misc Isolation misc rat-race hybrid misc S-parameters misc Resists misc System-on-chip misc return loss
topic_browse	ddc 620 bkl 53.82 misc Microwave circuits misc Silicon misc Propagation losses misc Microwave integrated circuits misc transmission loss misc CMOS integrated circuits misc phase response misc Isolation misc rat-race hybrid misc S-parameters misc Resists misc System-on-chip misc return loss
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title	Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits
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title_full	Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits
author_sort	Tian, Yang
journal	IEEE microwave and wireless components letters
journalStr	IEEE microwave and wireless components letters
lang_code	eng
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container_start_page	162
author_browse	Tian, Yang
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class	620 DNB 53.82 bkl
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author-letter	Tian, Yang
doi_str_mv	10.1109/LMWC.2016.2524657
dewey-full	620
title_sort	low-loss microcoaxial rat-race hybrid for si-based microwave integrated circuits
title_auth	Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits
abstract	This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications.
abstractGer	This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications.
abstract_unstemmed	This letter presents a microcoaxial rat-race hybrid for Si-based Ku-Band microwave applications. The device fabrication is conducted using a low-thermal-budget multilayer Cu Damescene process, which is fully compatible with CMOS back-end-of-line (BEOL) technology. The reported on-chip rat-race hybrid shows a best transmission loss (0.32 dB for sum ports and 0.25 dB for difference ports) of the reported on-chip rat-race hybrids. The demonstrated rat-race hybrid has isolation better than 20 dB and signal reflection of all ports less than <inline-formula> <tex-math notation="LaTeX">-</tex-math></inline-formula>12 dB in the operation band, which is corresponding to a fractional bandwidth (FBW) of about 34% and 29% in the symmetrical and differential modes, respectively. As the lines of the hybrid are folded to closely routed meander structures, more than 75% of size reduction is achieved. With these advanced features, the microcoaxial rat-race can be used for the high performance Si-based microwave applications.
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2016
container_issue	3
title_short	Low-Loss Microcoaxial Rat-Race Hybrid for Si-Based Microwave Integrated Circuits
url	http://dx.doi.org/10.1109/LMWC.2016.2524657 http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7419232
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author2	Wang, Hong Liu, Zhihong Meng, Qianqian Lee, Kokyan
author2Str	Wang, Hong Liu, Zhihong Meng, Qianqian Lee, Kokyan
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doi_str	10.1109/LMWC.2016.2524657
up_date	2024-07-04T04:07:00.499Z
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