Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications

Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of che...
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Gespeichert in:

Autor*in:	R Agarwal [verfasserIn] R Mukhiya R Sharma M K Sharma A K Goel

Format:	Artikel
Sprache:	Englisch

Erschienen:	2016

Schlagwörter:	bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science

Übergeordnetes Werk:	Enthalten in: Defence science journal - New Delhi : Centre, 1951, 66(2016), 5, Seite 485-488
Übergeordnetes Werk:	volume:66 ; year:2016 ; number:5 ; pages:485-488

Links:	Volltext Link aufrufen Link aufrufen

DOI / URN:	10.14429/dsj.66.10702

Katalog-ID:	OLC1984755536

Internformat


LEADER	01000caa a2200265 4500
001	OLC1984755536
003	DE-627
005	20230714224737.0
007	tu
008	161202s2016 xx \|\|\|\|\| 00\| \|\|eng c
024	7		\|a 10.14429/dsj.66.10702 \|2 doi
028	5	2	\|a PQ20170206
035			\|a (DE-627)OLC1984755536
035			\|a (DE-599)GBVOLC1984755536
035			\|a (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43
035			\|a (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
082	0	4	\|a 320 \|q ZDB
084			\|a 89.00 \|2 bkl
100	0		\|a R Agarwal \|e verfasserin \|4 aut
245	1	0	\|a Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications
264		1	\|c 2016
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
520			\|a Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.
650		4	\|a bio-sensing
650		4	\|a micro-cantilever
650		4	\|a bulk micromachining
650		4	\|a Label-free
650		4	\|a Simulation
650		4	\|a piezoresistor
650		4	\|a Biological & chemical weapons
650		4	\|a Design
650		4	\|a Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor
650		4	\|a Military Science
700	0		\|a R Mukhiya \|4 oth
700	0		\|a R Sharma \|4 oth
700	0		\|a M K Sharma \|4 oth
700	0		\|a A K Goel \|4 oth
773	0	8	\|i Enthalten in \|t Defence science journal \|d New Delhi : Centre, 1951 \|g 66(2016), 5, Seite 485-488 \|w (DE-627)130313327 \|w (DE-600)588844-X \|w (DE-576)9130313325 \|x 0011-748X \|7 nnns
773	1	8	\|g volume:66 \|g year:2016 \|g number:5 \|g pages:485-488
856	4	1	\|u http://dx.doi.org/10.14429/dsj.66.10702 \|3 Volltext
856	4	2	\|u http://search.proquest.com/docview/1838716848
856	4	2	\|u https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-POL
912			\|a SSG-OLC-TEC
912			\|a SSG-OLC-IBL
912			\|a SSG-OLC-DE-84
912			\|a GBV_ILN_11
912			\|a GBV_ILN_70
936	b	k	\|a 89.00 \|q AVZ
951			\|a AR
952			\|d 66 \|j 2016 \|e 5 \|h 485-488

Indexfelder

author_variant	r a ra
matchkey_str	article:0011748X:2016----::iielmnmtobsdeinnsmltosfircnieepafrfrhmc
hierarchy_sort_str	2016
bklnumber	89.00
publishDate	2016
allfields	10.14429/dsj.66.10702 doi PQ20170206 (DE-627)OLC1984755536 (DE-599)GBVOLC1984755536 (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43 (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr DE-627 ger DE-627 rakwb eng 320 ZDB 89.00 bkl R Agarwal verfasserin aut Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®. bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science R Mukhiya oth R Sharma oth M K Sharma oth A K Goel oth Enthalten in Defence science journal New Delhi : Centre, 1951 66(2016), 5, Seite 485-488 (DE-627)130313327 (DE-600)588844-X (DE-576)9130313325 0011-748X nnns volume:66 year:2016 number:5 pages:485-488 http://dx.doi.org/10.14429/dsj.66.10702 Volltext http://search.proquest.com/docview/1838716848 https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-POL SSG-OLC-TEC SSG-OLC-IBL SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_70 89.00 AVZ AR 66 2016 5 485-488
spelling	10.14429/dsj.66.10702 doi PQ20170206 (DE-627)OLC1984755536 (DE-599)GBVOLC1984755536 (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43 (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr DE-627 ger DE-627 rakwb eng 320 ZDB 89.00 bkl R Agarwal verfasserin aut Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®. bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science R Mukhiya oth R Sharma oth M K Sharma oth A K Goel oth Enthalten in Defence science journal New Delhi : Centre, 1951 66(2016), 5, Seite 485-488 (DE-627)130313327 (DE-600)588844-X (DE-576)9130313325 0011-748X nnns volume:66 year:2016 number:5 pages:485-488 http://dx.doi.org/10.14429/dsj.66.10702 Volltext http://search.proquest.com/docview/1838716848 https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-POL SSG-OLC-TEC SSG-OLC-IBL SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_70 89.00 AVZ AR 66 2016 5 485-488
allfields_unstemmed	10.14429/dsj.66.10702 doi PQ20170206 (DE-627)OLC1984755536 (DE-599)GBVOLC1984755536 (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43 (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr DE-627 ger DE-627 rakwb eng 320 ZDB 89.00 bkl R Agarwal verfasserin aut Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®. bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science R Mukhiya oth R Sharma oth M K Sharma oth A K Goel oth Enthalten in Defence science journal New Delhi : Centre, 1951 66(2016), 5, Seite 485-488 (DE-627)130313327 (DE-600)588844-X (DE-576)9130313325 0011-748X nnns volume:66 year:2016 number:5 pages:485-488 http://dx.doi.org/10.14429/dsj.66.10702 Volltext http://search.proquest.com/docview/1838716848 https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-POL SSG-OLC-TEC SSG-OLC-IBL SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_70 89.00 AVZ AR 66 2016 5 485-488
allfieldsGer	10.14429/dsj.66.10702 doi PQ20170206 (DE-627)OLC1984755536 (DE-599)GBVOLC1984755536 (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43 (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr DE-627 ger DE-627 rakwb eng 320 ZDB 89.00 bkl R Agarwal verfasserin aut Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®. bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science R Mukhiya oth R Sharma oth M K Sharma oth A K Goel oth Enthalten in Defence science journal New Delhi : Centre, 1951 66(2016), 5, Seite 485-488 (DE-627)130313327 (DE-600)588844-X (DE-576)9130313325 0011-748X nnns volume:66 year:2016 number:5 pages:485-488 http://dx.doi.org/10.14429/dsj.66.10702 Volltext http://search.proquest.com/docview/1838716848 https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-POL SSG-OLC-TEC SSG-OLC-IBL SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_70 89.00 AVZ AR 66 2016 5 485-488
allfieldsSound	10.14429/dsj.66.10702 doi PQ20170206 (DE-627)OLC1984755536 (DE-599)GBVOLC1984755536 (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43 (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr DE-627 ger DE-627 rakwb eng 320 ZDB 89.00 bkl R Agarwal verfasserin aut Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications 2016 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®. bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science R Mukhiya oth R Sharma oth M K Sharma oth A K Goel oth Enthalten in Defence science journal New Delhi : Centre, 1951 66(2016), 5, Seite 485-488 (DE-627)130313327 (DE-600)588844-X (DE-576)9130313325 0011-748X nnns volume:66 year:2016 number:5 pages:485-488 http://dx.doi.org/10.14429/dsj.66.10702 Volltext http://search.proquest.com/docview/1838716848 https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-POL SSG-OLC-TEC SSG-OLC-IBL SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_70 89.00 AVZ AR 66 2016 5 485-488
language	English
source	Enthalten in Defence science journal 66(2016), 5, Seite 485-488 volume:66 year:2016 number:5 pages:485-488
sourceStr	Enthalten in Defence science journal 66(2016), 5, Seite 485-488 volume:66 year:2016 number:5 pages:485-488
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science
dewey-raw	320
isfreeaccess_bool	false
container_title	Defence science journal
authorswithroles_txt_mv	R Agarwal @@aut@@ R Mukhiya @@oth@@ R Sharma @@oth@@ M K Sharma @@oth@@ A K Goel @@oth@@
publishDateDaySort_date	2016-01-01T00:00:00Z
hierarchy_top_id	130313327
dewey-sort	3320
id	OLC1984755536
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a2200265 4500</leader><controlfield tag="001">OLC1984755536</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230714224737.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">161202s2016 xx \|\|\|\|\| 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.14429/dsj.66.10702</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">PQ20170206</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1984755536</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1984755536</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">320</subfield><subfield code="q">ZDB</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">89.00</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">R Agarwal</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2016</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">bio-sensing</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">micro-cantilever</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">bulk micromachining</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Label-free</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Simulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">piezoresistor</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Biological & chemical weapons</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Design</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Military Science</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">R Mukhiya</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">R Sharma</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">M K Sharma</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">A K Goel</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Defence science journal</subfield><subfield code="d">New Delhi : Centre, 1951</subfield><subfield code="g">66(2016), 5, Seite 485-488</subfield><subfield code="w">(DE-627)130313327</subfield><subfield code="w">(DE-600)588844-X</subfield><subfield code="w">(DE-576)9130313325</subfield><subfield code="x">0011-748X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:66</subfield><subfield code="g">year:2016</subfield><subfield code="g">number:5</subfield><subfield code="g">pages:485-488</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">http://dx.doi.org/10.14429/dsj.66.10702</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">http://search.proquest.com/docview/1838716848</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-POL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-IBL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-DE-84</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">89.00</subfield><subfield code="q">AVZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">66</subfield><subfield code="j">2016</subfield><subfield code="e">5</subfield><subfield code="h">485-488</subfield></datafield></record></collection>
author	R Agarwal
spellingShingle	R Agarwal ddc 320 bkl 89.00 misc bio-sensing misc micro-cantilever misc bulk micromachining misc Label-free misc Simulation misc piezoresistor misc Biological & chemical weapons misc Design misc Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor misc Military Science Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications
authorStr	R Agarwal
ppnlink_with_tag_str_mv	@@773@@(DE-627)130313327
format	Article
dewey-ones	320 - Political science
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0011-748X
topic_title	320 ZDB 89.00 bkl Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications bio-sensing micro-cantilever bulk micromachining Label-free Simulation piezoresistor Biological & chemical weapons Design Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor Military Science
topic	ddc 320 bkl 89.00 misc bio-sensing misc micro-cantilever misc bulk micromachining misc Label-free misc Simulation misc piezoresistor misc Biological & chemical weapons misc Design misc Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor misc Military Science
topic_unstemmed	ddc 320 bkl 89.00 misc bio-sensing misc micro-cantilever misc bulk micromachining misc Label-free misc Simulation misc piezoresistor misc Biological & chemical weapons misc Design misc Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor misc Military Science
topic_browse	ddc 320 bkl 89.00 misc bio-sensing misc micro-cantilever misc bulk micromachining misc Label-free misc Simulation misc piezoresistor misc Biological & chemical weapons misc Design misc Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor misc Military Science
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	r m rm r s rs m k s mks a k g akg
hierarchy_parent_title	Defence science journal
hierarchy_parent_id	130313327
dewey-tens	320 - Political science
hierarchy_top_title	Defence science journal
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)130313327 (DE-600)588844-X (DE-576)9130313325
title	Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications
ctrlnum	(DE-627)OLC1984755536 (DE-599)GBVOLC1984755536 (PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43 (KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr
title_full	Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications
author_sort	R Agarwal
journal	Defence science journal
journalStr	Defence science journal
lang_code	eng
isOA_bool	false
dewey-hundreds	300 - Social sciences
recordtype	marc
publishDateSort	2016
contenttype_str_mv	txt
container_start_page	485
author_browse	R Agarwal
container_volume	66
class	320 ZDB 89.00 bkl
format_se	Aufsätze
author-letter	R Agarwal
doi_str_mv	10.14429/dsj.66.10702
dewey-full	320
title_sort	finite element method-based design and simulations of micro-cantilever platform for chemical and bio-sensing applications
title_auth	Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications
abstract	Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.
abstractGer	Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.
abstract_unstemmed	Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-POL SSG-OLC-TEC SSG-OLC-IBL SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_70
container_issue	5
title_short	Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications
url	http://dx.doi.org/10.14429/dsj.66.10702 http://search.proquest.com/docview/1838716848 https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0
remote_bool	false
author2	R Mukhiya R Sharma M K Sharma A K Goel
author2Str	R Mukhiya R Sharma M K Sharma A K Goel
ppnlink	130313327
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth oth
doi_str	10.14429/dsj.66.10702
up_date	2024-07-04T01:23:17.343Z
_version_	1803609647189327872
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a2200265 4500</leader><controlfield tag="001">OLC1984755536</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230714224737.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">161202s2016 xx \|\|\|\|\| 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.14429/dsj.66.10702</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">PQ20170206</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1984755536</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1984755536</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(PRQ)c2217-e9607983a48a9a6dc0f532bc6e96c34b0c6cc75b55fd31f461754c745d020af43</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(KEY)0060171320160000066000500485finiteelementmethodbaseddesignandsimulationsofmicr</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">320</subfield><subfield code="q">ZDB</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">89.00</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">R Agarwal</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2016</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">bio-sensing</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">micro-cantilever</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">bulk micromachining</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Label-free</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Simulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">piezoresistor</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Biological & chemical weapons</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Design</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Military Science</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">R Mukhiya</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">R Sharma</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">M K Sharma</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">A K Goel</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Defence science journal</subfield><subfield code="d">New Delhi : Centre, 1951</subfield><subfield code="g">66(2016), 5, Seite 485-488</subfield><subfield code="w">(DE-627)130313327</subfield><subfield code="w">(DE-600)588844-X</subfield><subfield code="w">(DE-576)9130313325</subfield><subfield code="x">0011-748X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:66</subfield><subfield code="g">year:2016</subfield><subfield code="g">number:5</subfield><subfield code="g">pages:485-488</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">http://dx.doi.org/10.14429/dsj.66.10702</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">http://search.proquest.com/docview/1838716848</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/article/86379652e10f409c9ad4ca4b8b13b2a0</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-POL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-IBL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-DE-84</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">89.00</subfield><subfield code="q">AVZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">66</subfield><subfield code="j">2016</subfield><subfield code="e">5</subfield><subfield code="h">485-488</subfield></datafield></record></collection>
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