A prism-based non-linear optical readout method for MEMS cantilever arrays
Autor*in: |
Adiyan, Ulas [verfasserIn] |
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Format: |
Artikel |
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Sprache: |
Englisch |
Erschienen: |
2016 |
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Übergeordnetes Werk: |
Enthalten in: Sensors and actuators |
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Übergeordnetes Werk: |
volume:250 ; year:2016 ; pages:219-228 |
Links: |
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DOI / URN: |
10.1016/j.sna.2016.09.018 |
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