A prism-based non-linear optical readout method for MEMS cantilever arrays

Gespeichert in:

Autor*in:	Adiyan, Ulas [verfasserIn] Civitci, Fehmi Yaralioglu, Goksen G Urey, Hakan

Format:	Artikel
Sprache:	Englisch

Erschienen:	2016

Übergeordnetes Werk:	Enthalten in: Sensors and actuators / A - Amsterdam [u.a.] : Elsevier, 1990, 250(2016), Seite 219-228
Übergeordnetes Werk:	volume:250 ; year:2016 ; pages:219-228

Links:	Volltext

DOI / URN:	10.1016/j.sna.2016.09.018

Katalog-ID:	OLC1985827069

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title	A prism-based non-linear optical readout method for MEMS cantilever arrays
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