Cross- and in-plane thermal conductivity of AlN thin films measured using differential 3-omega method

Gespeichert in:

Autor*in:	Bogner, Manuel [verfasserIn] Benstetter, Günther Fu, Yong Qing

Format:	Artikel
Sprache:	Englisch

Erschienen:	2017

Übergeordnetes Werk:	Enthalten in: Surface & coatings technology - Lausanne : Elsevier Sequoia, 1986, (2017)
Übergeordnetes Werk:	year:2017

Links:	Volltext

DOI / URN:	10.1016/j.surfcoat.2017.01.100

Katalog-ID:	OLC1990392156

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