A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors
This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Zhao, Chun [verfasserIn] |
|---|
| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2017 |
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| Schlagwörter: |
Sensor phenomena and characterization |
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| Übergeordnetes Werk: |
Enthalten in: Journal of microelectromechanical systems - New York, NY : IEEE, 1992, 26(2017), 3, Seite 501-503 |
|---|---|
| Übergeordnetes Werk: |
volume:26 ; year:2017 ; number:3 ; pages:501-503 |
| Links: |
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| DOI / URN: |
10.1109/JMEMS.2017.2690942 |
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| 520 | |a This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] | ||
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| 700 | 1 | |a Zou, Xudong |4 oth | |
| 700 | 1 | |a Seshia, Ashwin |4 oth | |
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10.1109/JMEMS.2017.2690942 doi PQ20171125 (DE-627)OLC1995235938 (DE-599)GBVOLC1995235938 (PRQ)i942-9ad377630346c4c2386d7ef0b8f8ee91486595f4fac99930bf4082083b820ef90 (KEY)0213815820170000026000300501closedloopreadoutconfigurationformodelocalizedreso DE-627 ger DE-627 rakwb eng 620 DE-600 Zhao, Chun verfasserin aut A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors 2017 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] Voltage measurement Sensor phenomena and characterization Sensitivity Frequency measurement self-sustained oscillator Resonant frequency Mode localized resonant sensor Oscillators Pandit, Milind oth Sun, Boqian oth Sobreviela, Guillermo oth Zou, Xudong oth Seshia, Ashwin oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 26(2017), 3, Seite 501-503 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:26 year:2017 number:3 pages:501-503 http://dx.doi.org/10.1109/JMEMS.2017.2690942 Volltext http://ieeexplore.ieee.org/document/7902156 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 26 2017 3 501-503 |
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10.1109/JMEMS.2017.2690942 doi PQ20171125 (DE-627)OLC1995235938 (DE-599)GBVOLC1995235938 (PRQ)i942-9ad377630346c4c2386d7ef0b8f8ee91486595f4fac99930bf4082083b820ef90 (KEY)0213815820170000026000300501closedloopreadoutconfigurationformodelocalizedreso DE-627 ger DE-627 rakwb eng 620 DE-600 Zhao, Chun verfasserin aut A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors 2017 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] Voltage measurement Sensor phenomena and characterization Sensitivity Frequency measurement self-sustained oscillator Resonant frequency Mode localized resonant sensor Oscillators Pandit, Milind oth Sun, Boqian oth Sobreviela, Guillermo oth Zou, Xudong oth Seshia, Ashwin oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 26(2017), 3, Seite 501-503 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:26 year:2017 number:3 pages:501-503 http://dx.doi.org/10.1109/JMEMS.2017.2690942 Volltext http://ieeexplore.ieee.org/document/7902156 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 26 2017 3 501-503 |
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10.1109/JMEMS.2017.2690942 doi PQ20171125 (DE-627)OLC1995235938 (DE-599)GBVOLC1995235938 (PRQ)i942-9ad377630346c4c2386d7ef0b8f8ee91486595f4fac99930bf4082083b820ef90 (KEY)0213815820170000026000300501closedloopreadoutconfigurationformodelocalizedreso DE-627 ger DE-627 rakwb eng 620 DE-600 Zhao, Chun verfasserin aut A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors 2017 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] Voltage measurement Sensor phenomena and characterization Sensitivity Frequency measurement self-sustained oscillator Resonant frequency Mode localized resonant sensor Oscillators Pandit, Milind oth Sun, Boqian oth Sobreviela, Guillermo oth Zou, Xudong oth Seshia, Ashwin oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 26(2017), 3, Seite 501-503 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:26 year:2017 number:3 pages:501-503 http://dx.doi.org/10.1109/JMEMS.2017.2690942 Volltext http://ieeexplore.ieee.org/document/7902156 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 26 2017 3 501-503 |
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10.1109/JMEMS.2017.2690942 doi PQ20171125 (DE-627)OLC1995235938 (DE-599)GBVOLC1995235938 (PRQ)i942-9ad377630346c4c2386d7ef0b8f8ee91486595f4fac99930bf4082083b820ef90 (KEY)0213815820170000026000300501closedloopreadoutconfigurationformodelocalizedreso DE-627 ger DE-627 rakwb eng 620 DE-600 Zhao, Chun verfasserin aut A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors 2017 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] Voltage measurement Sensor phenomena and characterization Sensitivity Frequency measurement self-sustained oscillator Resonant frequency Mode localized resonant sensor Oscillators Pandit, Milind oth Sun, Boqian oth Sobreviela, Guillermo oth Zou, Xudong oth Seshia, Ashwin oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 26(2017), 3, Seite 501-503 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:26 year:2017 number:3 pages:501-503 http://dx.doi.org/10.1109/JMEMS.2017.2690942 Volltext http://ieeexplore.ieee.org/document/7902156 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 26 2017 3 501-503 |
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10.1109/JMEMS.2017.2690942 doi PQ20171125 (DE-627)OLC1995235938 (DE-599)GBVOLC1995235938 (PRQ)i942-9ad377630346c4c2386d7ef0b8f8ee91486595f4fac99930bf4082083b820ef90 (KEY)0213815820170000026000300501closedloopreadoutconfigurationformodelocalizedreso DE-627 ger DE-627 rakwb eng 620 DE-600 Zhao, Chun verfasserin aut A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors 2017 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] Voltage measurement Sensor phenomena and characterization Sensitivity Frequency measurement self-sustained oscillator Resonant frequency Mode localized resonant sensor Oscillators Pandit, Milind oth Sun, Boqian oth Sobreviela, Guillermo oth Zou, Xudong oth Seshia, Ashwin oth Enthalten in Journal of microelectromechanical systems New York, NY : IEEE, 1992 26(2017), 3, Seite 501-503 (DE-627)131059963 (DE-600)1106644-1 (DE-576)032853254 1057-7157 nnns volume:26 year:2017 number:3 pages:501-503 http://dx.doi.org/10.1109/JMEMS.2017.2690942 Volltext http://ieeexplore.ieee.org/document/7902156 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 GBV_ILN_150 AR 26 2017 3 501-503 |
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A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors |
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This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] |
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This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] |
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This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle. [2016-0307] |
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A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors |
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10.1109/JMEMS.2017.2690942 |
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