Patterned crack-free PZT thick films for micro-electromechanical system applications
Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields...
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Gespeichert in:
| Autor*in: |
Dauchy, F. [verfasserIn] |
|---|
| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2007 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag London Limited 2007 |
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| Übergeordnetes Werk: |
Enthalten in: The international journal of advanced manufacturing technology - Springer-Verlag, 1985, 33(2007), 1-2 vom: 16. März, Seite 86-94 |
|---|---|
| Übergeordnetes Werk: |
volume:33 ; year:2007 ; number:1-2 ; day:16 ; month:03 ; pages:86-94 |
| Links: |
|---|
| DOI / URN: |
10.1007/s00170-007-0968-1 |
|---|
| Katalog-ID: |
OLC2026012415 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2026012415 | ||
| 003 | DE-627 | ||
| 005 | 20230323115259.0 | ||
| 007 | tu | ||
| 008 | 200820s2007 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s00170-007-0968-1 |2 doi | |
| 035 | |a (DE-627)OLC2026012415 | ||
| 035 | |a (DE-He213)s00170-007-0968-1-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 670 |q VZ |
| 100 | 1 | |a Dauchy, F. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Patterned crack-free PZT thick films for micro-electromechanical system applications |
| 264 | 1 | |c 2007 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © Springer-Verlag London Limited 2007 | ||
| 520 | |a Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). | ||
| 650 | 4 | |a Sol gel | |
| 650 | 4 | |a Thick film | |
| 650 | 4 | |a MEMS | |
| 650 | 4 | |a Multilayer | |
| 700 | 1 | |a Dorey, R. A. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t The international journal of advanced manufacturing technology |d Springer-Verlag, 1985 |g 33(2007), 1-2 vom: 16. März, Seite 86-94 |w (DE-627)129185299 |w (DE-600)52651-4 |w (DE-576)014456192 |x 0268-3768 |7 nnns |
| 773 | 1 | 8 | |g volume:33 |g year:2007 |g number:1-2 |g day:16 |g month:03 |g pages:86-94 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s00170-007-0968-1 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a GBV_ILN_20 | ||
| 912 | |a GBV_ILN_21 | ||
| 912 | |a GBV_ILN_26 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_150 | ||
| 912 | |a GBV_ILN_2006 | ||
| 912 | |a GBV_ILN_2018 | ||
| 912 | |a GBV_ILN_2241 | ||
| 912 | |a GBV_ILN_2333 | ||
| 912 | |a GBV_ILN_4046 | ||
| 912 | |a GBV_ILN_4277 | ||
| 912 | |a GBV_ILN_4307 | ||
| 951 | |a AR | ||
| 952 | |d 33 |j 2007 |e 1-2 |b 16 |c 03 |h 86-94 | ||
| author_variant |
f d fd r a d ra rad |
|---|---|
| matchkey_str |
article:02683768:2007----::atrecakreztikimfrireetoehnc |
| hierarchy_sort_str |
2007 |
| publishDate |
2007 |
| allfields |
10.1007/s00170-007-0968-1 doi (DE-627)OLC2026012415 (DE-He213)s00170-007-0968-1-p DE-627 ger DE-627 rakwb eng 670 VZ Dauchy, F. verfasserin aut Patterned crack-free PZT thick films for micro-electromechanical system applications 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London Limited 2007 Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). Sol gel Thick film MEMS Multilayer Dorey, R. A. aut Enthalten in The international journal of advanced manufacturing technology Springer-Verlag, 1985 33(2007), 1-2 vom: 16. März, Seite 86-94 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 https://doi.org/10.1007/s00170-007-0968-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_26 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2241 GBV_ILN_2333 GBV_ILN_4046 GBV_ILN_4277 GBV_ILN_4307 AR 33 2007 1-2 16 03 86-94 |
| spelling |
10.1007/s00170-007-0968-1 doi (DE-627)OLC2026012415 (DE-He213)s00170-007-0968-1-p DE-627 ger DE-627 rakwb eng 670 VZ Dauchy, F. verfasserin aut Patterned crack-free PZT thick films for micro-electromechanical system applications 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London Limited 2007 Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). Sol gel Thick film MEMS Multilayer Dorey, R. A. aut Enthalten in The international journal of advanced manufacturing technology Springer-Verlag, 1985 33(2007), 1-2 vom: 16. März, Seite 86-94 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 https://doi.org/10.1007/s00170-007-0968-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_26 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2241 GBV_ILN_2333 GBV_ILN_4046 GBV_ILN_4277 GBV_ILN_4307 AR 33 2007 1-2 16 03 86-94 |
| allfields_unstemmed |
10.1007/s00170-007-0968-1 doi (DE-627)OLC2026012415 (DE-He213)s00170-007-0968-1-p DE-627 ger DE-627 rakwb eng 670 VZ Dauchy, F. verfasserin aut Patterned crack-free PZT thick films for micro-electromechanical system applications 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London Limited 2007 Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). Sol gel Thick film MEMS Multilayer Dorey, R. A. aut Enthalten in The international journal of advanced manufacturing technology Springer-Verlag, 1985 33(2007), 1-2 vom: 16. März, Seite 86-94 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 https://doi.org/10.1007/s00170-007-0968-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_26 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2241 GBV_ILN_2333 GBV_ILN_4046 GBV_ILN_4277 GBV_ILN_4307 AR 33 2007 1-2 16 03 86-94 |
| allfieldsGer |
10.1007/s00170-007-0968-1 doi (DE-627)OLC2026012415 (DE-He213)s00170-007-0968-1-p DE-627 ger DE-627 rakwb eng 670 VZ Dauchy, F. verfasserin aut Patterned crack-free PZT thick films for micro-electromechanical system applications 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London Limited 2007 Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). Sol gel Thick film MEMS Multilayer Dorey, R. A. aut Enthalten in The international journal of advanced manufacturing technology Springer-Verlag, 1985 33(2007), 1-2 vom: 16. März, Seite 86-94 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 https://doi.org/10.1007/s00170-007-0968-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_26 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2241 GBV_ILN_2333 GBV_ILN_4046 GBV_ILN_4277 GBV_ILN_4307 AR 33 2007 1-2 16 03 86-94 |
| allfieldsSound |
10.1007/s00170-007-0968-1 doi (DE-627)OLC2026012415 (DE-He213)s00170-007-0968-1-p DE-627 ger DE-627 rakwb eng 670 VZ Dauchy, F. verfasserin aut Patterned crack-free PZT thick films for micro-electromechanical system applications 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London Limited 2007 Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). Sol gel Thick film MEMS Multilayer Dorey, R. A. aut Enthalten in The international journal of advanced manufacturing technology Springer-Verlag, 1985 33(2007), 1-2 vom: 16. März, Seite 86-94 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 https://doi.org/10.1007/s00170-007-0968-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_26 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2241 GBV_ILN_2333 GBV_ILN_4046 GBV_ILN_4277 GBV_ILN_4307 AR 33 2007 1-2 16 03 86-94 |
| language |
English |
| source |
Enthalten in The international journal of advanced manufacturing technology 33(2007), 1-2 vom: 16. März, Seite 86-94 volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 |
| sourceStr |
Enthalten in The international journal of advanced manufacturing technology 33(2007), 1-2 vom: 16. März, Seite 86-94 volume:33 year:2007 number:1-2 day:16 month:03 pages:86-94 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Sol gel Thick film MEMS Multilayer |
| dewey-raw |
670 |
| isfreeaccess_bool |
false |
| container_title |
The international journal of advanced manufacturing technology |
| authorswithroles_txt_mv |
Dauchy, F. @@aut@@ Dorey, R. A. @@aut@@ |
| publishDateDaySort_date |
2007-03-16T00:00:00Z |
| hierarchy_top_id |
129185299 |
| dewey-sort |
3670 |
| id |
OLC2026012415 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2026012415</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230323115259.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2007 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00170-007-0968-1</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2026012415</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00170-007-0968-1-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Dauchy, F.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Patterned crack-free PZT thick films for micro-electromechanical system applications</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag London Limited 2007</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS).</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sol gel</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thick film</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Multilayer</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dorey, R. A.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">The international journal of advanced manufacturing technology</subfield><subfield code="d">Springer-Verlag, 1985</subfield><subfield code="g">33(2007), 1-2 vom: 16. März, Seite 86-94</subfield><subfield code="w">(DE-627)129185299</subfield><subfield code="w">(DE-600)52651-4</subfield><subfield code="w">(DE-576)014456192</subfield><subfield code="x">0268-3768</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:33</subfield><subfield code="g">year:2007</subfield><subfield code="g">number:1-2</subfield><subfield code="g">day:16</subfield><subfield code="g">month:03</subfield><subfield code="g">pages:86-94</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00170-007-0968-1</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_26</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2241</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2333</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">33</subfield><subfield code="j">2007</subfield><subfield code="e">1-2</subfield><subfield code="b">16</subfield><subfield code="c">03</subfield><subfield code="h">86-94</subfield></datafield></record></collection>
|
| author |
Dauchy, F. |
| spellingShingle |
Dauchy, F. ddc 670 misc Sol gel misc Thick film misc MEMS misc Multilayer Patterned crack-free PZT thick films for micro-electromechanical system applications |
| authorStr |
Dauchy, F. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)129185299 |
| format |
Article |
| dewey-ones |
670 - Manufacturing |
| delete_txt_mv |
keep |
| author_role |
aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0268-3768 |
| topic_title |
670 VZ Patterned crack-free PZT thick films for micro-electromechanical system applications Sol gel Thick film MEMS Multilayer |
| topic |
ddc 670 misc Sol gel misc Thick film misc MEMS misc Multilayer |
| topic_unstemmed |
ddc 670 misc Sol gel misc Thick film misc MEMS misc Multilayer |
| topic_browse |
ddc 670 misc Sol gel misc Thick film misc MEMS misc Multilayer |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
The international journal of advanced manufacturing technology |
| hierarchy_parent_id |
129185299 |
| dewey-tens |
670 - Manufacturing |
| hierarchy_top_title |
The international journal of advanced manufacturing technology |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 |
| title |
Patterned crack-free PZT thick films for micro-electromechanical system applications |
| ctrlnum |
(DE-627)OLC2026012415 (DE-He213)s00170-007-0968-1-p |
| title_full |
Patterned crack-free PZT thick films for micro-electromechanical system applications |
| author_sort |
Dauchy, F. |
| journal |
The international journal of advanced manufacturing technology |
| journalStr |
The international journal of advanced manufacturing technology |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
600 - Technology |
| recordtype |
marc |
| publishDateSort |
2007 |
| contenttype_str_mv |
txt |
| container_start_page |
86 |
| author_browse |
Dauchy, F. Dorey, R. A. |
| container_volume |
33 |
| class |
670 VZ |
| format_se |
Aufsätze |
| author-letter |
Dauchy, F. |
| doi_str_mv |
10.1007/s00170-007-0968-1 |
| dewey-full |
670 |
| title_sort |
patterned crack-free pzt thick films for micro-electromechanical system applications |
| title_auth |
Patterned crack-free PZT thick films for micro-electromechanical system applications |
| abstract |
Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). © Springer-Verlag London Limited 2007 |
| abstractGer |
Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). © Springer-Verlag London Limited 2007 |
| abstract_unstemmed |
Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). © Springer-Verlag London Limited 2007 |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_26 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2241 GBV_ILN_2333 GBV_ILN_4046 GBV_ILN_4277 GBV_ILN_4307 |
| container_issue |
1-2 |
| title_short |
Patterned crack-free PZT thick films for micro-electromechanical system applications |
| url |
https://doi.org/10.1007/s00170-007-0968-1 |
| remote_bool |
false |
| author2 |
Dorey, R. A. |
| author2Str |
Dorey, R. A. |
| ppnlink |
129185299 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/s00170-007-0968-1 |
| up_date |
2024-07-04T02:53:50.723Z |
| _version_ |
1803615344507486208 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2026012415</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230323115259.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2007 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00170-007-0968-1</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2026012415</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00170-007-0968-1-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Dauchy, F.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Patterned crack-free PZT thick films for micro-electromechanical system applications</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag London Limited 2007</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS).</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sol gel</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thick film</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Multilayer</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dorey, R. A.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">The international journal of advanced manufacturing technology</subfield><subfield code="d">Springer-Verlag, 1985</subfield><subfield code="g">33(2007), 1-2 vom: 16. März, Seite 86-94</subfield><subfield code="w">(DE-627)129185299</subfield><subfield code="w">(DE-600)52651-4</subfield><subfield code="w">(DE-576)014456192</subfield><subfield code="x">0268-3768</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:33</subfield><subfield code="g">year:2007</subfield><subfield code="g">number:1-2</subfield><subfield code="g">day:16</subfield><subfield code="g">month:03</subfield><subfield code="g">pages:86-94</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00170-007-0968-1</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_26</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2241</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2333</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">33</subfield><subfield code="j">2007</subfield><subfield code="e">1-2</subfield><subfield code="b">16</subfield><subfield code="c">03</subfield><subfield code="h">86-94</subfield></datafield></record></collection>
|
| score |
7.400304 |