Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer
Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Zhao, Yan [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2015 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag London 2015 |
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| Übergeordnetes Werk: |
Enthalten in: The international journal of advanced manufacturing technology - Springer London, 1985, 85(2015), 5-8 vom: 31. Okt., Seite 1045-1051 |
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| Übergeordnetes Werk: |
volume:85 ; year:2015 ; number:5-8 ; day:31 ; month:10 ; pages:1045-1051 |
| Links: |
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| DOI / URN: |
10.1007/s00170-015-8020-3 |
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OLC2026084211 |
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| 520 | |a Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. | ||
| 650 | 4 | |a Multi-layer | |
| 650 | 4 | |a Ice fixed abrasives | |
| 650 | 4 | |a Subzero polishing | |
| 650 | 4 | |a Single-crystal germanium wafer | |
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| 700 | 1 | |a Sun, Yuli |4 aut | |
| 700 | 1 | |a Wang, Min |4 aut | |
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10.1007/s00170-015-8020-3 doi (DE-627)OLC2026084211 (DE-He213)s00170-015-8020-3-p DE-627 ger DE-627 rakwb eng 670 VZ Zhao, Yan verfasserin aut Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London 2015 Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. Multi-layer Ice fixed abrasives Subzero polishing Single-crystal germanium wafer Zuo, Dunwen aut Sun, Yuli aut Wang, Min aut Enthalten in The international journal of advanced manufacturing technology Springer London, 1985 85(2015), 5-8 vom: 31. Okt., Seite 1045-1051 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:85 year:2015 number:5-8 day:31 month:10 pages:1045-1051 https://doi.org/10.1007/s00170-015-8020-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_70 GBV_ILN_2018 GBV_ILN_2333 AR 85 2015 5-8 31 10 1045-1051 |
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10.1007/s00170-015-8020-3 doi (DE-627)OLC2026084211 (DE-He213)s00170-015-8020-3-p DE-627 ger DE-627 rakwb eng 670 VZ Zhao, Yan verfasserin aut Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London 2015 Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. Multi-layer Ice fixed abrasives Subzero polishing Single-crystal germanium wafer Zuo, Dunwen aut Sun, Yuli aut Wang, Min aut Enthalten in The international journal of advanced manufacturing technology Springer London, 1985 85(2015), 5-8 vom: 31. Okt., Seite 1045-1051 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:85 year:2015 number:5-8 day:31 month:10 pages:1045-1051 https://doi.org/10.1007/s00170-015-8020-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_70 GBV_ILN_2018 GBV_ILN_2333 AR 85 2015 5-8 31 10 1045-1051 |
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10.1007/s00170-015-8020-3 doi (DE-627)OLC2026084211 (DE-He213)s00170-015-8020-3-p DE-627 ger DE-627 rakwb eng 670 VZ Zhao, Yan verfasserin aut Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London 2015 Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. Multi-layer Ice fixed abrasives Subzero polishing Single-crystal germanium wafer Zuo, Dunwen aut Sun, Yuli aut Wang, Min aut Enthalten in The international journal of advanced manufacturing technology Springer London, 1985 85(2015), 5-8 vom: 31. Okt., Seite 1045-1051 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:85 year:2015 number:5-8 day:31 month:10 pages:1045-1051 https://doi.org/10.1007/s00170-015-8020-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_70 GBV_ILN_2018 GBV_ILN_2333 AR 85 2015 5-8 31 10 1045-1051 |
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10.1007/s00170-015-8020-3 doi (DE-627)OLC2026084211 (DE-He213)s00170-015-8020-3-p DE-627 ger DE-627 rakwb eng 670 VZ Zhao, Yan verfasserin aut Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London 2015 Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. Multi-layer Ice fixed abrasives Subzero polishing Single-crystal germanium wafer Zuo, Dunwen aut Sun, Yuli aut Wang, Min aut Enthalten in The international journal of advanced manufacturing technology Springer London, 1985 85(2015), 5-8 vom: 31. Okt., Seite 1045-1051 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:85 year:2015 number:5-8 day:31 month:10 pages:1045-1051 https://doi.org/10.1007/s00170-015-8020-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_70 GBV_ILN_2018 GBV_ILN_2333 AR 85 2015 5-8 31 10 1045-1051 |
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10.1007/s00170-015-8020-3 doi (DE-627)OLC2026084211 (DE-He213)s00170-015-8020-3-p DE-627 ger DE-627 rakwb eng 670 VZ Zhao, Yan verfasserin aut Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag London 2015 Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. Multi-layer Ice fixed abrasives Subzero polishing Single-crystal germanium wafer Zuo, Dunwen aut Sun, Yuli aut Wang, Min aut Enthalten in The international journal of advanced manufacturing technology Springer London, 1985 85(2015), 5-8 vom: 31. Okt., Seite 1045-1051 (DE-627)129185299 (DE-600)52651-4 (DE-576)014456192 0268-3768 nnns volume:85 year:2015 number:5-8 day:31 month:10 pages:1045-1051 https://doi.org/10.1007/s00170-015-8020-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_70 GBV_ILN_2018 GBV_ILN_2333 AR 85 2015 5-8 31 10 1045-1051 |
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Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. © Springer-Verlag London 2015 |
| abstractGer |
Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. © Springer-Verlag London 2015 |
| abstract_unstemmed |
Abstract Based on the self-dressing of ice fixed abrasive polishing (IFAP) by melting, a new method of subzero polishing was proposed in this paper as multi-layer ice fixed abrasive polishing (MIFAP). The multi-layer ice fixed abrasive polishing tool (MIFAPT) was designed as triple-layer and used to polishing single-crystal germanium (sc-Ge) wafer through “rough polishing—semi-fine polishing—fine polishing” (RP-SP-FP) by one time of clamping in subzero. The results show that the surface roughness Sa of sc-Ge wafer polished by MIFAPT is at the nanoscale as the same as by single-layer ice fixed abrasive polishing tool (SIFAPT). Compared with SIFAP, the machining efficient of MIFAP is increased by about 66.7 %. © Springer-Verlag London 2015 |
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| title_short |
Experimental study on multi-layer ice fixed abrasive polishing of single crystal germanium wafer |
| url |
https://doi.org/10.1007/s00170-015-8020-3 |
| remote_bool |
false |
| author2 |
Zuo, Dunwen Sun, Yuli Wang, Min |
| author2Str |
Zuo, Dunwen Sun, Yuli Wang, Min |
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129185299 |
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n |
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| doi_str |
10.1007/s00170-015-8020-3 |
| up_date |
2024-07-04T03:04:11.014Z |
| _version_ |
1803615994925547520 |
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