Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications
Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not o...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Gavrilov, N. V. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2001 |
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| Schlagwörter: |
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| Anmerkung: |
© Plenum Publishing Corporation 2001 |
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| Übergeordnetes Werk: |
Enthalten in: Russian physics journal - Kluwer Academic Publishers-Plenum Publishers, 1992, 44(2001), 9 vom: Sept., Seite 952-961 |
|---|---|
| Übergeordnetes Werk: |
volume:44 ; year:2001 ; number:9 ; month:09 ; pages:952-961 |
| Links: |
|---|
| DOI / URN: |
10.1023/A:1014310006483 |
|---|
| Katalog-ID: |
OLC2033057119 |
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| 520 | |a Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. | ||
| 650 | 4 | |a Glow Discharge | |
| 650 | 4 | |a Pulse Repetition Rate | |
| 650 | 4 | |a Hollow Cathode | |
| 650 | 4 | |a Weak Magnetic Field | |
| 650 | 4 | |a Cathode Layer | |
| 700 | 1 | |a Emlin, D. R. |4 aut | |
| 700 | 1 | |a Nikulin, S. P. |4 aut | |
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10.1023/A:1014310006483 doi (DE-627)OLC2033057119 (DE-He213)A:1014310006483-p DE-627 ger DE-627 rakwb eng 530 370 VZ Gavrilov, N. V. verfasserin aut Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. Glow Discharge Pulse Repetition Rate Hollow Cathode Weak Magnetic Field Cathode Layer Emlin, D. R. aut Nikulin, S. P. aut Enthalten in Russian physics journal Kluwer Academic Publishers-Plenum Publishers, 1992 44(2001), 9 vom: Sept., Seite 952-961 (DE-627)131169718 (DE-600)1138228-4 (DE-576)033029253 1064-8887 nnns volume:44 year:2001 number:9 month:09 pages:952-961 https://doi.org/10.1023/A:1014310006483 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_40 GBV_ILN_70 GBV_ILN_2021 GBV_ILN_4700 AR 44 2001 9 09 952-961 |
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10.1023/A:1014310006483 doi (DE-627)OLC2033057119 (DE-He213)A:1014310006483-p DE-627 ger DE-627 rakwb eng 530 370 VZ Gavrilov, N. V. verfasserin aut Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. Glow Discharge Pulse Repetition Rate Hollow Cathode Weak Magnetic Field Cathode Layer Emlin, D. R. aut Nikulin, S. P. aut Enthalten in Russian physics journal Kluwer Academic Publishers-Plenum Publishers, 1992 44(2001), 9 vom: Sept., Seite 952-961 (DE-627)131169718 (DE-600)1138228-4 (DE-576)033029253 1064-8887 nnns volume:44 year:2001 number:9 month:09 pages:952-961 https://doi.org/10.1023/A:1014310006483 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_40 GBV_ILN_70 GBV_ILN_2021 GBV_ILN_4700 AR 44 2001 9 09 952-961 |
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10.1023/A:1014310006483 doi (DE-627)OLC2033057119 (DE-He213)A:1014310006483-p DE-627 ger DE-627 rakwb eng 530 370 VZ Gavrilov, N. V. verfasserin aut Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. Glow Discharge Pulse Repetition Rate Hollow Cathode Weak Magnetic Field Cathode Layer Emlin, D. R. aut Nikulin, S. P. aut Enthalten in Russian physics journal Kluwer Academic Publishers-Plenum Publishers, 1992 44(2001), 9 vom: Sept., Seite 952-961 (DE-627)131169718 (DE-600)1138228-4 (DE-576)033029253 1064-8887 nnns volume:44 year:2001 number:9 month:09 pages:952-961 https://doi.org/10.1023/A:1014310006483 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_40 GBV_ILN_70 GBV_ILN_2021 GBV_ILN_4700 AR 44 2001 9 09 952-961 |
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10.1023/A:1014310006483 doi (DE-627)OLC2033057119 (DE-He213)A:1014310006483-p DE-627 ger DE-627 rakwb eng 530 370 VZ Gavrilov, N. V. verfasserin aut Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. Glow Discharge Pulse Repetition Rate Hollow Cathode Weak Magnetic Field Cathode Layer Emlin, D. R. aut Nikulin, S. P. aut Enthalten in Russian physics journal Kluwer Academic Publishers-Plenum Publishers, 1992 44(2001), 9 vom: Sept., Seite 952-961 (DE-627)131169718 (DE-600)1138228-4 (DE-576)033029253 1064-8887 nnns volume:44 year:2001 number:9 month:09 pages:952-961 https://doi.org/10.1023/A:1014310006483 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_40 GBV_ILN_70 GBV_ILN_2021 GBV_ILN_4700 AR 44 2001 9 09 952-961 |
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10.1023/A:1014310006483 doi (DE-627)OLC2033057119 (DE-He213)A:1014310006483-p DE-627 ger DE-627 rakwb eng 530 370 VZ Gavrilov, N. V. verfasserin aut Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. Glow Discharge Pulse Repetition Rate Hollow Cathode Weak Magnetic Field Cathode Layer Emlin, D. R. aut Nikulin, S. P. aut Enthalten in Russian physics journal Kluwer Academic Publishers-Plenum Publishers, 1992 44(2001), 9 vom: Sept., Seite 952-961 (DE-627)131169718 (DE-600)1138228-4 (DE-576)033029253 1064-8887 nnns volume:44 year:2001 number:9 month:09 pages:952-961 https://doi.org/10.1023/A:1014310006483 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_40 GBV_ILN_70 GBV_ILN_2021 GBV_ILN_4700 AR 44 2001 9 09 952-961 |
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Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications |
| abstract |
Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. © Plenum Publishing Corporation 2001 |
| abstractGer |
Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. © Plenum Publishing Corporation 2001 |
| abstract_unstemmed |
Abstract The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (∼$ 10^{–3} $ T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (∼10%). A decrease in statistical straggling of the delay time to breakdown (∼$ 10^{2} $ times) and in discharge formative time (∼10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section ∼100 $ cm^{2} $ with an energy of ions of up to 40 keV at an average current density of up to 1 mA/$ cm^{2} $. © Plenum Publishing Corporation 2001 |
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| container_issue |
9 |
| title_short |
Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications |
| url |
https://doi.org/10.1023/A:1014310006483 |
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| author2 |
Emlin, D. R. Nikulin, S. P. |
| author2Str |
Emlin, D. R. Nikulin, S. P. |
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| doi_str |
10.1023/A:1014310006483 |
| up_date |
2024-07-03T15:31:25.590Z |
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1803572410415316992 |
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