Design and simulation of high aspect ratio motion sensors

Gespeichert in:

Autor*in:	Yao, L. [verfasserIn] Chowanietz, E. McCormick, M. Lees, A.

Format:	Artikel
Sprache:	Englisch

Erschienen:	1996

Schlagwörter:	Aspect Ratio High Aspect Ratio Motion Sensor Ratio Motion

Anmerkung:	© Springer-Verlag Berlin Heidelberg 1996

Übergeordnetes Werk:	Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 2(1996), 4 vom: Okt., Seite 191-196
Übergeordnetes Werk:	volume:2 ; year:1996 ; number:4 ; month:10 ; pages:191-196

Links:	Volltext

DOI / URN:	10.1007/s005420050043

Katalog-ID:	OLC2034911776

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Design and simulation of high aspect ratio motion sensors

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