International Conference on High Aspect Ratio Microstructure Technology HARMST ’97
Autor*in: |
Bley, Peter [verfasserIn] |
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Format: |
Artikel |
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Sprache: |
Englisch |
Erschienen: |
1997 |
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Schlagwörter: |
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Anmerkung: |
© Springer-Verlag Berlin Heidelberg 1997 |
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Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 4(1997), 1 vom: Dez., Seite 1-1 |
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Übergeordnetes Werk: |
volume:4 ; year:1997 ; number:1 ; month:12 ; pages:1-1 |
Links: |
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DOI / URN: |
10.1007/s005420050080 |
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Katalog-ID: |
OLC2034912322 |
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10.1007/s005420050080 doi (DE-627)OLC2034912322 (DE-He213)s005420050080-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Bley, Peter verfasserin aut International Conference on High Aspect Ratio Microstructure Technology HARMST ’97 1997 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 1997 Microstructure Aspect Ratio High Aspect Ratio Microstructure Technology High Aspect Ratio Microstructure Enthalten in Microsystem technologies Springer-Verlag, 1994 4(1997), 1 vom: Dez., Seite 1-1 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:4 year:1997 number:1 month:12 pages:1-1 https://doi.org/10.1007/s005420050080 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 4 1997 1 12 1-1 |
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