International Conference on High Aspect Ratio Microstructure Technology HARMST ’97

Gespeichert in:

Autor*in:	Bley, Peter [verfasserIn]

Format:	Artikel
Sprache:	Englisch

Erschienen:	1997

Schlagwörter:	Microstructure Aspect Ratio High Aspect Ratio Microstructure Technology High Aspect Ratio Microstructure

Anmerkung:	© Springer-Verlag Berlin Heidelberg 1997

Übergeordnetes Werk:	Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 4(1997), 1 vom: Dez., Seite 1-1
Übergeordnetes Werk:	volume:4 ; year:1997 ; number:1 ; month:12 ; pages:1-1

Links:	Volltext

DOI / URN:	10.1007/s005420050080

Katalog-ID:	OLC2034912322

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