Fabrication of CVD diamond photoconductive detectors

Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts wer...
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Autor*in:	Marinelli, M. [verfasserIn] Milani, E. Paoletti, A. Tucciarone, A. Rinati, G. V.

Format:	Artikel
Sprache:	Englisch

Erschienen:	1999

Schlagwörter:	Microwave Chemical Vapour Deposition Boundary Effect Diamond Film Lower Contribution

Anmerkung:	© Springer-Verlag Berlin Heidelberg 1999

Übergeordnetes Werk:	Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 6(1999), 2 vom: Dez., Seite 73-76
Übergeordnetes Werk:	volume:6 ; year:1999 ; number:2 ; month:12 ; pages:73-76

Links:	Volltext

DOI / URN:	10.1007/s005420050178

Katalog-ID:	OLC2034913140

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allfields	10.1007/s005420050178 doi (DE-627)OLC2034913140 (DE-He213)s005420050178-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Marinelli, M. verfasserin aut Fabrication of CVD diamond photoconductive detectors 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 1999 Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. Microwave Chemical Vapour Deposition Boundary Effect Diamond Film Lower Contribution Milani, E. aut Paoletti, A. aut Tucciarone, A. aut Rinati, G. V. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 6(1999), 2 vom: Dez., Seite 73-76 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:6 year:1999 number:2 month:12 pages:73-76 https://doi.org/10.1007/s005420050178 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OLC-PHA SSG-OLC-DE-84 SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 6 1999 2 12 73-76
spelling	10.1007/s005420050178 doi (DE-627)OLC2034913140 (DE-He213)s005420050178-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Marinelli, M. verfasserin aut Fabrication of CVD diamond photoconductive detectors 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 1999 Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. Microwave Chemical Vapour Deposition Boundary Effect Diamond Film Lower Contribution Milani, E. aut Paoletti, A. aut Tucciarone, A. aut Rinati, G. V. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 6(1999), 2 vom: Dez., Seite 73-76 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:6 year:1999 number:2 month:12 pages:73-76 https://doi.org/10.1007/s005420050178 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OLC-PHA SSG-OLC-DE-84 SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 6 1999 2 12 73-76
allfields_unstemmed	10.1007/s005420050178 doi (DE-627)OLC2034913140 (DE-He213)s005420050178-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Marinelli, M. verfasserin aut Fabrication of CVD diamond photoconductive detectors 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 1999 Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. Microwave Chemical Vapour Deposition Boundary Effect Diamond Film Lower Contribution Milani, E. aut Paoletti, A. aut Tucciarone, A. aut Rinati, G. V. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 6(1999), 2 vom: Dez., Seite 73-76 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:6 year:1999 number:2 month:12 pages:73-76 https://doi.org/10.1007/s005420050178 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OLC-PHA SSG-OLC-DE-84 SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 6 1999 2 12 73-76
allfieldsGer	10.1007/s005420050178 doi (DE-627)OLC2034913140 (DE-He213)s005420050178-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Marinelli, M. verfasserin aut Fabrication of CVD diamond photoconductive detectors 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 1999 Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. Microwave Chemical Vapour Deposition Boundary Effect Diamond Film Lower Contribution Milani, E. aut Paoletti, A. aut Tucciarone, A. aut Rinati, G. V. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 6(1999), 2 vom: Dez., Seite 73-76 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:6 year:1999 number:2 month:12 pages:73-76 https://doi.org/10.1007/s005420050178 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OLC-PHA SSG-OLC-DE-84 SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 6 1999 2 12 73-76
allfieldsSound	10.1007/s005420050178 doi (DE-627)OLC2034913140 (DE-He213)s005420050178-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Marinelli, M. verfasserin aut Fabrication of CVD diamond photoconductive detectors 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 1999 Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. Microwave Chemical Vapour Deposition Boundary Effect Diamond Film Lower Contribution Milani, E. aut Paoletti, A. aut Tucciarone, A. aut Rinati, G. V. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 6(1999), 2 vom: Dez., Seite 73-76 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:6 year:1999 number:2 month:12 pages:73-76 https://doi.org/10.1007/s005420050178 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OLC-PHA SSG-OLC-DE-84 SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 6 1999 2 12 73-76
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title_auth	Fabrication of CVD diamond photoconductive detectors
abstract	Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. © Springer-Verlag Berlin Heidelberg 1999
abstractGer	Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. © Springer-Verlag Berlin Heidelberg 1999
abstract_unstemmed	Abstract We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic processes. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects. © Springer-Verlag Berlin Heidelberg 1999
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container_issue	2
title_short	Fabrication of CVD diamond photoconductive detectors
url	https://doi.org/10.1007/s005420050178
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author2	Milani, E. Paoletti, A. Tucciarone, A. Rinati, G. V.
author2Str	Milani, E. Paoletti, A. Tucciarone, A. Rinati, G. V.
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doi_str	10.1007/s005420050178
up_date	2024-07-03T22:59:08.507Z
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