Active material micro-actuator arrays fabricated with SU-8 resin

Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed mi...
Ausführliche Beschreibung

Gespeichert in:

Autor*in:	Pokines, B. J. [verfasserIn] Tani, J. Esashi, M. Hamano, T. Mizuno, K. Inman, D. J.

Format:	Artikel
Sprache:	Englisch

Erschienen:	2001

Schlagwörter:	Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material

Anmerkung:	© Springer-Verlag Berlin Heidelberg 2001

Übergeordnetes Werk:	Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 7(2001), 3 vom: Okt., Seite 117-119
Übergeordnetes Werk:	volume:7 ; year:2001 ; number:3 ; month:10 ; pages:117-119

Links:	Volltext

DOI / URN:	10.1007/s005420100093

Katalog-ID:	OLC2034913744

Internformat


LEADER	01000caa a22002652 4500
001	OLC2034913744
003	DE-627
005	20230502121150.0
007	tu
008	200820s2001 xx \|\|\|\|\| 00\| \|\|eng c
024	7		\|a 10.1007/s005420100093 \|2 doi
035			\|a (DE-627)OLC2034913744
035			\|a (DE-He213)s005420100093-p
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
082	0	4	\|a 620 \|q VZ
082	0	4	\|a 510 \|q VZ
100	1		\|a Pokines, B. J. \|e verfasserin \|4 aut
245	1	0	\|a Active material micro-actuator arrays fabricated with SU-8 resin
264		1	\|c 2001
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
500			\|a © Springer-Verlag Berlin Heidelberg 2001
520			\|a Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall.
650		4	\|a Shape Memory
650		4	\|a Active Material
650		4	\|a Shape Memory Alloy
650		4	\|a High Aspect Ratio
650		4	\|a Piezoelectric Material
700	1		\|a Tani, J. \|4 aut
700	1		\|a Esashi, M. \|4 aut
700	1		\|a Hamano, T. \|4 aut
700	1		\|a Mizuno, K. \|4 aut
700	1		\|a Inman, D. J. \|4 aut
773	0	8	\|i Enthalten in \|t Microsystem technologies \|d Springer-Verlag, 1994 \|g 7(2001), 3 vom: Okt., Seite 117-119 \|w (DE-627)182644278 \|w (DE-600)1223008-X \|w (DE-576)045302146 \|x 0946-7076 \|7 nnns
773	1	8	\|g volume:7 \|g year:2001 \|g number:3 \|g month:10 \|g pages:117-119
856	4	1	\|u https://doi.org/10.1007/s005420100093 \|z lizenzpflichtig \|3 Volltext
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-TEC
912			\|a SSG-OLC-MAT
912			\|a SSG-OPC-MAT
912			\|a GBV_ILN_40
912			\|a GBV_ILN_70
912			\|a GBV_ILN_95
912			\|a GBV_ILN_267
912			\|a GBV_ILN_2018
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2048
912			\|a GBV_ILN_4036
912			\|a GBV_ILN_4277
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4336
951			\|a AR
952			\|d 7 \|j 2001 \|e 3 \|c 10 \|h 117-119

Indexfelder

author_variant	b j p bj bjp j t jt m e me t h th k m km d j i dj dji
matchkey_str	article:09467076:2001----::cieaeilirataoaryfbi
hierarchy_sort_str	2001
publishDate	2001
allfields	10.1007/s005420100093 doi (DE-627)OLC2034913744 (DE-He213)s005420100093-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Pokines, B. J. verfasserin aut Active material micro-actuator arrays fabricated with SU-8 resin 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2001 Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material Tani, J. aut Esashi, M. aut Hamano, T. aut Mizuno, K. aut Inman, D. J. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 7(2001), 3 vom: Okt., Seite 117-119 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:7 year:2001 number:3 month:10 pages:117-119 https://doi.org/10.1007/s005420100093 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 7 2001 3 10 117-119
spelling	10.1007/s005420100093 doi (DE-627)OLC2034913744 (DE-He213)s005420100093-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Pokines, B. J. verfasserin aut Active material micro-actuator arrays fabricated with SU-8 resin 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2001 Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material Tani, J. aut Esashi, M. aut Hamano, T. aut Mizuno, K. aut Inman, D. J. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 7(2001), 3 vom: Okt., Seite 117-119 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:7 year:2001 number:3 month:10 pages:117-119 https://doi.org/10.1007/s005420100093 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 7 2001 3 10 117-119
allfields_unstemmed	10.1007/s005420100093 doi (DE-627)OLC2034913744 (DE-He213)s005420100093-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Pokines, B. J. verfasserin aut Active material micro-actuator arrays fabricated with SU-8 resin 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2001 Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material Tani, J. aut Esashi, M. aut Hamano, T. aut Mizuno, K. aut Inman, D. J. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 7(2001), 3 vom: Okt., Seite 117-119 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:7 year:2001 number:3 month:10 pages:117-119 https://doi.org/10.1007/s005420100093 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 7 2001 3 10 117-119
allfieldsGer	10.1007/s005420100093 doi (DE-627)OLC2034913744 (DE-He213)s005420100093-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Pokines, B. J. verfasserin aut Active material micro-actuator arrays fabricated with SU-8 resin 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2001 Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material Tani, J. aut Esashi, M. aut Hamano, T. aut Mizuno, K. aut Inman, D. J. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 7(2001), 3 vom: Okt., Seite 117-119 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:7 year:2001 number:3 month:10 pages:117-119 https://doi.org/10.1007/s005420100093 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 7 2001 3 10 117-119
allfieldsSound	10.1007/s005420100093 doi (DE-627)OLC2034913744 (DE-He213)s005420100093-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Pokines, B. J. verfasserin aut Active material micro-actuator arrays fabricated with SU-8 resin 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2001 Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material Tani, J. aut Esashi, M. aut Hamano, T. aut Mizuno, K. aut Inman, D. J. aut Enthalten in Microsystem technologies Springer-Verlag, 1994 7(2001), 3 vom: Okt., Seite 117-119 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:7 year:2001 number:3 month:10 pages:117-119 https://doi.org/10.1007/s005420100093 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336 AR 7 2001 3 10 117-119
language	English
source	Enthalten in Microsystem technologies 7(2001), 3 vom: Okt., Seite 117-119 volume:7 year:2001 number:3 month:10 pages:117-119
sourceStr	Enthalten in Microsystem technologies 7(2001), 3 vom: Okt., Seite 117-119 volume:7 year:2001 number:3 month:10 pages:117-119
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material
dewey-raw	620
isfreeaccess_bool	false
container_title	Microsystem technologies
authorswithroles_txt_mv	Pokines, B. J. @@aut@@ Tani, J. @@aut@@ Esashi, M. @@aut@@ Hamano, T. @@aut@@ Mizuno, K. @@aut@@ Inman, D. J. @@aut@@
publishDateDaySort_date	2001-10-01T00:00:00Z
hierarchy_top_id	182644278
dewey-sort	3620
id	OLC2034913744
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2034913744</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230502121150.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2001 xx \|\|\|\|\| 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s005420100093</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2034913744</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s005420100093-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Pokines, B. J.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Active material micro-actuator arrays fabricated with SU-8 resin</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2001</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag Berlin Heidelberg 2001</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Shape Memory</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Active Material</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Shape Memory Alloy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">High Aspect Ratio</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Piezoelectric Material</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tani, J.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Esashi, M.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hamano, T.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mizuno, K.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Inman, D. J.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Microsystem technologies</subfield><subfield code="d">Springer-Verlag, 1994</subfield><subfield code="g">7(2001), 3 vom: Okt., Seite 117-119</subfield><subfield code="w">(DE-627)182644278</subfield><subfield code="w">(DE-600)1223008-X</subfield><subfield code="w">(DE-576)045302146</subfield><subfield code="x">0946-7076</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:7</subfield><subfield code="g">year:2001</subfield><subfield code="g">number:3</subfield><subfield code="g">month:10</subfield><subfield code="g">pages:117-119</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s005420100093</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_267</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4336</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">7</subfield><subfield code="j">2001</subfield><subfield code="e">3</subfield><subfield code="c">10</subfield><subfield code="h">117-119</subfield></datafield></record></collection>
author	Pokines, B. J.
spellingShingle	Pokines, B. J. ddc 620 ddc 510 misc Shape Memory misc Active Material misc Shape Memory Alloy misc High Aspect Ratio misc Piezoelectric Material Active material micro-actuator arrays fabricated with SU-8 resin
authorStr	Pokines, B. J.
ppnlink_with_tag_str_mv	@@773@@(DE-627)182644278
format	Article
dewey-ones	620 - Engineering & allied operations 510 - Mathematics
delete_txt_mv	keep
author_role	aut aut aut aut aut aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0946-7076
topic_title	620 VZ 510 VZ Active material micro-actuator arrays fabricated with SU-8 resin Shape Memory Active Material Shape Memory Alloy High Aspect Ratio Piezoelectric Material
topic	ddc 620 ddc 510 misc Shape Memory misc Active Material misc Shape Memory Alloy misc High Aspect Ratio misc Piezoelectric Material
topic_unstemmed	ddc 620 ddc 510 misc Shape Memory misc Active Material misc Shape Memory Alloy misc High Aspect Ratio misc Piezoelectric Material
topic_browse	ddc 620 ddc 510 misc Shape Memory misc Active Material misc Shape Memory Alloy misc High Aspect Ratio misc Piezoelectric Material
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
hierarchy_parent_title	Microsystem technologies
hierarchy_parent_id	182644278
dewey-tens	620 - Engineering 510 - Mathematics
hierarchy_top_title	Microsystem technologies
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)182644278 (DE-600)1223008-X (DE-576)045302146
title	Active material micro-actuator arrays fabricated with SU-8 resin
ctrlnum	(DE-627)OLC2034913744 (DE-He213)s005420100093-p
title_full	Active material micro-actuator arrays fabricated with SU-8 resin
author_sort	Pokines, B. J.
journal	Microsystem technologies
journalStr	Microsystem technologies
lang_code	eng
isOA_bool	false
dewey-hundreds	600 - Technology 500 - Science
recordtype	marc
publishDateSort	2001
contenttype_str_mv	txt
container_start_page	117
author_browse	Pokines, B. J. Tani, J. Esashi, M. Hamano, T. Mizuno, K. Inman, D. J.
container_volume	7
class	620 VZ 510 VZ
format_se	Aufsätze
author-letter	Pokines, B. J.
doi_str_mv	10.1007/s005420100093
dewey-full	620 510
title_sort	active material micro-actuator arrays fabricated with su-8 resin
title_auth	Active material micro-actuator arrays fabricated with SU-8 resin
abstract	Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. © Springer-Verlag Berlin Heidelberg 2001
abstractGer	Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. © Springer-Verlag Berlin Heidelberg 2001
abstract_unstemmed	Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall. © Springer-Verlag Berlin Heidelberg 2001
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4277 GBV_ILN_4313 GBV_ILN_4336
container_issue	3
title_short	Active material micro-actuator arrays fabricated with SU-8 resin
url	https://doi.org/10.1007/s005420100093
remote_bool	false
author2	Tani, J. Esashi, M. Hamano, T. Mizuno, K. Inman, D. J.
author2Str	Tani, J. Esashi, M. Hamano, T. Mizuno, K. Inman, D. J.
ppnlink	182644278
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
doi_str	10.1007/s005420100093
up_date	2024-07-03T22:59:18.320Z
_version_	1803600588515049472
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2034913744</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230502121150.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2001 xx \|\|\|\|\| 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s005420100093</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2034913744</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s005420100093-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Pokines, B. J.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Active material micro-actuator arrays fabricated with SU-8 resin</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2001</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag Berlin Heidelberg 2001</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 × 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 × 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Shape Memory</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Active Material</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Shape Memory Alloy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">High Aspect Ratio</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Piezoelectric Material</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tani, J.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Esashi, M.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hamano, T.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mizuno, K.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Inman, D. J.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Microsystem technologies</subfield><subfield code="d">Springer-Verlag, 1994</subfield><subfield code="g">7(2001), 3 vom: Okt., Seite 117-119</subfield><subfield code="w">(DE-627)182644278</subfield><subfield code="w">(DE-600)1223008-X</subfield><subfield code="w">(DE-576)045302146</subfield><subfield code="x">0946-7076</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:7</subfield><subfield code="g">year:2001</subfield><subfield code="g">number:3</subfield><subfield code="g">month:10</subfield><subfield code="g">pages:117-119</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s005420100093</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_267</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4336</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">7</subfield><subfield code="j">2001</subfield><subfield code="e">3</subfield><subfield code="c">10</subfield><subfield code="h">117-119</subfield></datafield></record></collection>
score	7.399164

Nicht das Richtige dabei?

Schreiben Sie uns!

Active material micro-actuator arrays fabricated with SU-8 resin

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?