Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion
Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Ture Savadkoohi, Parisa [verfasserIn] |
|---|
| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2009 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag 2009 |
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| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 16(2009), 7 vom: 14. Nov., Seite 1187-1192 |
|---|---|
| Übergeordnetes Werk: |
volume:16 ; year:2009 ; number:7 ; day:14 ; month:11 ; pages:1187-1192 |
| Links: |
|---|
| DOI / URN: |
10.1007/s00542-009-0946-7 |
|---|
| Katalog-ID: |
OLC2034928237 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2034928237 | ||
| 003 | DE-627 | ||
| 005 | 20230502121331.0 | ||
| 007 | tu | ||
| 008 | 200820s2009 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s00542-009-0946-7 |2 doi | |
| 035 | |a (DE-627)OLC2034928237 | ||
| 035 | |a (DE-He213)s00542-009-0946-7-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 620 |q VZ |
| 082 | 0 | 4 | |a 510 |q VZ |
| 100 | 1 | |a Ture Savadkoohi, Parisa |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion |
| 264 | 1 | |c 2009 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © Springer-Verlag 2009 | ||
| 520 | |a Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. | ||
| 650 | 4 | |a RF MEMS | |
| 650 | 4 | |a Varactors | |
| 650 | 4 | |a Electromechanics | |
| 700 | 1 | |a Colpo, Sabrina |4 aut | |
| 700 | 1 | |a Margesin, Benno |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Microsystem technologies |d Springer-Verlag, 1994 |g 16(2009), 7 vom: 14. Nov., Seite 1187-1192 |w (DE-627)182644278 |w (DE-600)1223008-X |w (DE-576)045302146 |x 0946-7076 |7 nnns |
| 773 | 1 | 8 | |g volume:16 |g year:2009 |g number:7 |g day:14 |g month:11 |g pages:1187-1192 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s00542-009-0946-7 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a SSG-OLC-MAT | ||
| 912 | |a SSG-OPC-MAT | ||
| 912 | |a GBV_ILN_40 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_95 | ||
| 912 | |a GBV_ILN_267 | ||
| 912 | |a GBV_ILN_2018 | ||
| 912 | |a GBV_ILN_2020 | ||
| 912 | |a GBV_ILN_2048 | ||
| 912 | |a GBV_ILN_4036 | ||
| 912 | |a GBV_ILN_4116 | ||
| 912 | |a GBV_ILN_4277 | ||
| 951 | |a AR | ||
| 952 | |d 16 |j 2009 |e 7 |b 14 |c 11 |h 1187-1192 | ||
| author_variant |
s p t sp spt s c sc b m bm |
|---|---|
| matchkey_str |
article:09467076:2009----::oedsgoafesuebeaaiobsdnlcrsa |
| hierarchy_sort_str |
2009 |
| publishDate |
2009 |
| allfields |
10.1007/s00542-009-0946-7 doi (DE-627)OLC2034928237 (DE-He213)s00542-009-0946-7-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Ture Savadkoohi, Parisa verfasserin aut Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion 2009 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2009 Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. RF MEMS Varactors Electromechanics Colpo, Sabrina aut Margesin, Benno aut Enthalten in Microsystem technologies Springer-Verlag, 1994 16(2009), 7 vom: 14. Nov., Seite 1187-1192 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 https://doi.org/10.1007/s00542-009-0946-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4277 AR 16 2009 7 14 11 1187-1192 |
| spelling |
10.1007/s00542-009-0946-7 doi (DE-627)OLC2034928237 (DE-He213)s00542-009-0946-7-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Ture Savadkoohi, Parisa verfasserin aut Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion 2009 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2009 Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. RF MEMS Varactors Electromechanics Colpo, Sabrina aut Margesin, Benno aut Enthalten in Microsystem technologies Springer-Verlag, 1994 16(2009), 7 vom: 14. Nov., Seite 1187-1192 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 https://doi.org/10.1007/s00542-009-0946-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4277 AR 16 2009 7 14 11 1187-1192 |
| allfields_unstemmed |
10.1007/s00542-009-0946-7 doi (DE-627)OLC2034928237 (DE-He213)s00542-009-0946-7-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Ture Savadkoohi, Parisa verfasserin aut Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion 2009 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2009 Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. RF MEMS Varactors Electromechanics Colpo, Sabrina aut Margesin, Benno aut Enthalten in Microsystem technologies Springer-Verlag, 1994 16(2009), 7 vom: 14. Nov., Seite 1187-1192 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 https://doi.org/10.1007/s00542-009-0946-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4277 AR 16 2009 7 14 11 1187-1192 |
| allfieldsGer |
10.1007/s00542-009-0946-7 doi (DE-627)OLC2034928237 (DE-He213)s00542-009-0946-7-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Ture Savadkoohi, Parisa verfasserin aut Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion 2009 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2009 Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. RF MEMS Varactors Electromechanics Colpo, Sabrina aut Margesin, Benno aut Enthalten in Microsystem technologies Springer-Verlag, 1994 16(2009), 7 vom: 14. Nov., Seite 1187-1192 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 https://doi.org/10.1007/s00542-009-0946-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4277 AR 16 2009 7 14 11 1187-1192 |
| allfieldsSound |
10.1007/s00542-009-0946-7 doi (DE-627)OLC2034928237 (DE-He213)s00542-009-0946-7-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Ture Savadkoohi, Parisa verfasserin aut Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion 2009 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2009 Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. RF MEMS Varactors Electromechanics Colpo, Sabrina aut Margesin, Benno aut Enthalten in Microsystem technologies Springer-Verlag, 1994 16(2009), 7 vom: 14. Nov., Seite 1187-1192 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 https://doi.org/10.1007/s00542-009-0946-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4277 AR 16 2009 7 14 11 1187-1192 |
| language |
English |
| source |
Enthalten in Microsystem technologies 16(2009), 7 vom: 14. Nov., Seite 1187-1192 volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 |
| sourceStr |
Enthalten in Microsystem technologies 16(2009), 7 vom: 14. Nov., Seite 1187-1192 volume:16 year:2009 number:7 day:14 month:11 pages:1187-1192 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
RF MEMS Varactors Electromechanics |
| dewey-raw |
620 |
| isfreeaccess_bool |
false |
| container_title |
Microsystem technologies |
| authorswithroles_txt_mv |
Ture Savadkoohi, Parisa @@aut@@ Colpo, Sabrina @@aut@@ Margesin, Benno @@aut@@ |
| publishDateDaySort_date |
2009-11-14T00:00:00Z |
| hierarchy_top_id |
182644278 |
| dewey-sort |
3620 |
| id |
OLC2034928237 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2034928237</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230502121331.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2009 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00542-009-0946-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2034928237</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00542-009-0946-7-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ture Savadkoohi, Parisa</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2009</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag 2009</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RF MEMS</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Varactors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electromechanics</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Colpo, Sabrina</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Margesin, Benno</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Microsystem technologies</subfield><subfield code="d">Springer-Verlag, 1994</subfield><subfield code="g">16(2009), 7 vom: 14. Nov., Seite 1187-1192</subfield><subfield code="w">(DE-627)182644278</subfield><subfield code="w">(DE-600)1223008-X</subfield><subfield code="w">(DE-576)045302146</subfield><subfield code="x">0946-7076</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:16</subfield><subfield code="g">year:2009</subfield><subfield code="g">number:7</subfield><subfield code="g">day:14</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:1187-1192</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00542-009-0946-7</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_267</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">16</subfield><subfield code="j">2009</subfield><subfield code="e">7</subfield><subfield code="b">14</subfield><subfield code="c">11</subfield><subfield code="h">1187-1192</subfield></datafield></record></collection>
|
| author |
Ture Savadkoohi, Parisa |
| spellingShingle |
Ture Savadkoohi, Parisa ddc 620 ddc 510 misc RF MEMS misc Varactors misc Electromechanics Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion |
| authorStr |
Ture Savadkoohi, Parisa |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)182644278 |
| format |
Article |
| dewey-ones |
620 - Engineering & allied operations 510 - Mathematics |
| delete_txt_mv |
keep |
| author_role |
aut aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0946-7076 |
| topic_title |
620 VZ 510 VZ Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion RF MEMS Varactors Electromechanics |
| topic |
ddc 620 ddc 510 misc RF MEMS misc Varactors misc Electromechanics |
| topic_unstemmed |
ddc 620 ddc 510 misc RF MEMS misc Varactors misc Electromechanics |
| topic_browse |
ddc 620 ddc 510 misc RF MEMS misc Varactors misc Electromechanics |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
Microsystem technologies |
| hierarchy_parent_id |
182644278 |
| dewey-tens |
620 - Engineering 510 - Mathematics |
| hierarchy_top_title |
Microsystem technologies |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 |
| title |
Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion |
| ctrlnum |
(DE-627)OLC2034928237 (DE-He213)s00542-009-0946-7-p |
| title_full |
Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion |
| author_sort |
Ture Savadkoohi, Parisa |
| journal |
Microsystem technologies |
| journalStr |
Microsystem technologies |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
600 - Technology 500 - Science |
| recordtype |
marc |
| publishDateSort |
2009 |
| contenttype_str_mv |
txt |
| container_start_page |
1187 |
| author_browse |
Ture Savadkoohi, Parisa Colpo, Sabrina Margesin, Benno |
| container_volume |
16 |
| class |
620 VZ 510 VZ |
| format_se |
Aufsätze |
| author-letter |
Ture Savadkoohi, Parisa |
| doi_str_mv |
10.1007/s00542-009-0946-7 |
| dewey-full |
620 510 |
| title_sort |
novel design of a rf-mems tuneable capacitor based on electrostatically induced torsion |
| title_auth |
Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion |
| abstract |
Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. © Springer-Verlag 2009 |
| abstractGer |
Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. © Springer-Verlag 2009 |
| abstract_unstemmed |
Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented. © Springer-Verlag 2009 |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_40 GBV_ILN_70 GBV_ILN_95 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4277 |
| container_issue |
7 |
| title_short |
Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion |
| url |
https://doi.org/10.1007/s00542-009-0946-7 |
| remote_bool |
false |
| author2 |
Colpo, Sabrina Margesin, Benno |
| author2Str |
Colpo, Sabrina Margesin, Benno |
| ppnlink |
182644278 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/s00542-009-0946-7 |
| up_date |
2024-07-03T23:03:15.624Z |
| _version_ |
1803600837346328576 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2034928237</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230502121331.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2009 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00542-009-0946-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2034928237</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00542-009-0946-7-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ture Savadkoohi, Parisa</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2009</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag 2009</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RF MEMS</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Varactors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electromechanics</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Colpo, Sabrina</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Margesin, Benno</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Microsystem technologies</subfield><subfield code="d">Springer-Verlag, 1994</subfield><subfield code="g">16(2009), 7 vom: 14. Nov., Seite 1187-1192</subfield><subfield code="w">(DE-627)182644278</subfield><subfield code="w">(DE-600)1223008-X</subfield><subfield code="w">(DE-576)045302146</subfield><subfield code="x">0946-7076</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:16</subfield><subfield code="g">year:2009</subfield><subfield code="g">number:7</subfield><subfield code="g">day:14</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:1187-1192</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00542-009-0946-7</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_267</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">16</subfield><subfield code="j">2009</subfield><subfield code="e">7</subfield><subfield code="b">14</subfield><subfield code="c">11</subfield><subfield code="h">1187-1192</subfield></datafield></record></collection>
|
| score |
7.4022093 |