Leak detection methods for glass capped and polymer sealed MEMS packaging

Abstract This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction w...
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Gespeichert in:

Autor*in:	Millar, Suzanne [verfasserIn] Desmulliez, Marc P. Y. McCracken, Stewart

Format:	Artikel
Sprache:	Englisch

Erschienen:	2011

Schlagwörter:	Dwell Time Leak Rate Cavity Volume Leak Test Leak Channel

Anmerkung:	© Springer-Verlag 2011

Übergeordnetes Werk:	Enthalten in: Microsystem technologies - Springer-Verlag, 1994, 17(2011), 4 vom: 05. Feb., Seite 677-684
Übergeordnetes Werk:	volume:17 ; year:2011 ; number:4 ; day:05 ; month:02 ; pages:677-684

Links:	Volltext

DOI / URN:	10.1007/s00542-010-1200-z

Katalog-ID:	OLC2034930150

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allfields	10.1007/s00542-010-1200-z doi (DE-627)OLC2034930150 (DE-He213)s00542-010-1200-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Millar, Suzanne verfasserin aut Leak detection methods for glass capped and polymer sealed MEMS packaging 2011 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2011 Abstract This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × $ 10^{−3} $ $ cm^{3} $. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. Dwell Time Leak Rate Cavity Volume Leak Test Leak Channel Desmulliez, Marc P. Y. aut McCracken, Stewart aut Enthalten in Microsystem technologies Springer-Verlag, 1994 17(2011), 4 vom: 05. Feb., Seite 677-684 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:17 year:2011 number:4 day:05 month:02 pages:677-684 https://doi.org/10.1007/s00542-010-1200-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_20 GBV_ILN_40 GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4116 GBV_ILN_4277 GBV_ILN_4335 AR 17 2011 4 05 02 677-684
spelling	10.1007/s00542-010-1200-z doi (DE-627)OLC2034930150 (DE-He213)s00542-010-1200-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Millar, Suzanne verfasserin aut Leak detection methods for glass capped and polymer sealed MEMS packaging 2011 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2011 Abstract This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × $ 10^{−3} $ $ cm^{3} $. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. Dwell Time Leak Rate Cavity Volume Leak Test Leak Channel Desmulliez, Marc P. Y. aut McCracken, Stewart aut Enthalten in Microsystem technologies Springer-Verlag, 1994 17(2011), 4 vom: 05. Feb., Seite 677-684 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:17 year:2011 number:4 day:05 month:02 pages:677-684 https://doi.org/10.1007/s00542-010-1200-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_20 GBV_ILN_40 GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2048 GBV_ILN_4116 GBV_ILN_4277 GBV_ILN_4335 AR 17 2011 4 05 02 677-684
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title_sort	leak detection methods for glass capped and polymer sealed mems packaging
title_auth	Leak detection methods for glass capped and polymer sealed MEMS packaging
abstract	Abstract This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × $ 10^{−3} $ $ cm^{3} $. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. © Springer-Verlag 2011
abstractGer	Abstract This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × $ 10^{−3} $ $ cm^{3} $. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. © Springer-Verlag 2011
abstract_unstemmed	Abstract This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × $ 10^{−3} $ $ cm^{3} $. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. © Springer-Verlag 2011
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up_date	2024-07-03T23:03:49.857Z
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A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × $ 10^{−3} $ $ cm^{3} $. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Dwell Time</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Leak Rate</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Cavity Volume</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Leak Test</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Leak Channel</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Desmulliez, Marc P. 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Leak detection methods for glass capped and polymer sealed MEMS packaging

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