Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism
Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The g...
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Gespeichert in:
| Autor*in: |
Chiu, Sheng-Ren [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2013 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag Berlin Heidelberg 2013 |
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| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer Berlin Heidelberg, 1994, 20(2013), 12 vom: 30. Nov., Seite 2173-2184 |
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| Übergeordnetes Werk: |
volume:20 ; year:2013 ; number:12 ; day:30 ; month:11 ; pages:2173-2184 |
| Links: |
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| DOI / URN: |
10.1007/s00542-013-1978-6 |
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| Katalog-ID: |
OLC2034938674 |
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| 520 | |a Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. | ||
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| 700 | 1 | |a Su, Yan-Kuin |4 aut | |
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10.1007/s00542-013-1978-6 doi (DE-627)OLC2034938674 (DE-He213)s00542-013-1978-6-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Chiu, Sheng-Ren verfasserin aut Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism 2013 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2013 Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. Micro-gyroscope Anti-phase mode Tuning fork MEMS Sue, Chung-Yang aut Lin, Chih-Hsiou aut Su, Yan-Kuin aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 20(2013), 12 vom: 30. Nov., Seite 2173-2184 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:20 year:2013 number:12 day:30 month:11 pages:2173-2184 https://doi.org/10.1007/s00542-013-1978-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 20 2013 12 30 11 2173-2184 |
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10.1007/s00542-013-1978-6 doi (DE-627)OLC2034938674 (DE-He213)s00542-013-1978-6-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Chiu, Sheng-Ren verfasserin aut Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism 2013 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2013 Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. Micro-gyroscope Anti-phase mode Tuning fork MEMS Sue, Chung-Yang aut Lin, Chih-Hsiou aut Su, Yan-Kuin aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 20(2013), 12 vom: 30. Nov., Seite 2173-2184 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:20 year:2013 number:12 day:30 month:11 pages:2173-2184 https://doi.org/10.1007/s00542-013-1978-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 20 2013 12 30 11 2173-2184 |
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10.1007/s00542-013-1978-6 doi (DE-627)OLC2034938674 (DE-He213)s00542-013-1978-6-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Chiu, Sheng-Ren verfasserin aut Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism 2013 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2013 Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. Micro-gyroscope Anti-phase mode Tuning fork MEMS Sue, Chung-Yang aut Lin, Chih-Hsiou aut Su, Yan-Kuin aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 20(2013), 12 vom: 30. Nov., Seite 2173-2184 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:20 year:2013 number:12 day:30 month:11 pages:2173-2184 https://doi.org/10.1007/s00542-013-1978-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 20 2013 12 30 11 2173-2184 |
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10.1007/s00542-013-1978-6 doi (DE-627)OLC2034938674 (DE-He213)s00542-013-1978-6-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Chiu, Sheng-Ren verfasserin aut Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism 2013 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2013 Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. Micro-gyroscope Anti-phase mode Tuning fork MEMS Sue, Chung-Yang aut Lin, Chih-Hsiou aut Su, Yan-Kuin aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 20(2013), 12 vom: 30. Nov., Seite 2173-2184 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:20 year:2013 number:12 day:30 month:11 pages:2173-2184 https://doi.org/10.1007/s00542-013-1978-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 20 2013 12 30 11 2173-2184 |
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10.1007/s00542-013-1978-6 doi (DE-627)OLC2034938674 (DE-He213)s00542-013-1978-6-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Chiu, Sheng-Ren verfasserin aut Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism 2013 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2013 Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. Micro-gyroscope Anti-phase mode Tuning fork MEMS Sue, Chung-Yang aut Lin, Chih-Hsiou aut Su, Yan-Kuin aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 20(2013), 12 vom: 30. Nov., Seite 2173-2184 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:20 year:2013 number:12 day:30 month:11 pages:2173-2184 https://doi.org/10.1007/s00542-013-1978-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 20 2013 12 30 11 2173-2184 |
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Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism |
| abstract |
Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. © Springer-Verlag Berlin Heidelberg 2013 |
| abstractGer |
Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. © Springer-Verlag Berlin Heidelberg 2013 |
| abstract_unstemmed |
Abstract In this paper, a novel micro-machined dual-axis tuning fork gyroscope (DTFG) with an anti-phase mechanism is proposed. The proposed anti-phase mechanism could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibrating frames of DTFG. The gyroscope is fabricated by the high-aspect-ratio silicon-on-insulation bulk micromachining process with a device layer thickness of 45 μm. Furthermore, a CMOS drive/readout ASIC Chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by direct wire-bonding. The experimental characterizations of DTFG demonstrate that the rate sensitivities of z-axis and x-axis sense modes are 2.2132 mV/DPS and 1.8477 mV/DPS respectively and the associated $ R^{2} $-linearity are 0.9995 and 0.9996. © Springer-Verlag Berlin Heidelberg 2013 |
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| container_issue |
12 |
| title_short |
Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism |
| url |
https://doi.org/10.1007/s00542-013-1978-6 |
| remote_bool |
false |
| author2 |
Sue, Chung-Yang Lin, Chih-Hsiou Su, Yan-Kuin |
| author2Str |
Sue, Chung-Yang Lin, Chih-Hsiou Su, Yan-Kuin |
| ppnlink |
182644278 |
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| doi_str |
10.1007/s00542-013-1978-6 |
| up_date |
2024-07-03T23:06:17.762Z |
| _version_ |
1803601028330815488 |
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7.400943 |