Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone
Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fi...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Zhang, Guo Jun [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2014 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag Berlin Heidelberg 2014 |
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| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer Berlin Heidelberg, 1994, 21(2014), 8 vom: 30. Juli, Seite 1697-1708 |
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| Übergeordnetes Werk: |
volume:21 ; year:2014 ; number:8 ; day:30 ; month:07 ; pages:1697-1708 |
| Links: |
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| DOI / URN: |
10.1007/s00542-014-2262-0 |
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| Katalog-ID: |
OLC2034940687 |
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| 520 | |a Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. | ||
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10.1007/s00542-014-2262-0 doi (DE-627)OLC2034940687 (DE-He213)s00542-014-2262-0-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Zhang, Guo Jun verfasserin aut Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2014 Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. Hair Cell Hydrophone Lateralis Nerve Standing Wave Field Bury Oxide Layer Liu, Lin Xian aut Zhang, Wen Dong aut Xue, Chen Yang aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 21(2014), 8 vom: 30. Juli, Seite 1697-1708 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:21 year:2014 number:8 day:30 month:07 pages:1697-1708 https://doi.org/10.1007/s00542-014-2262-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 21 2014 8 30 07 1697-1708 |
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10.1007/s00542-014-2262-0 doi (DE-627)OLC2034940687 (DE-He213)s00542-014-2262-0-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Zhang, Guo Jun verfasserin aut Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2014 Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. Hair Cell Hydrophone Lateralis Nerve Standing Wave Field Bury Oxide Layer Liu, Lin Xian aut Zhang, Wen Dong aut Xue, Chen Yang aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 21(2014), 8 vom: 30. Juli, Seite 1697-1708 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:21 year:2014 number:8 day:30 month:07 pages:1697-1708 https://doi.org/10.1007/s00542-014-2262-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 21 2014 8 30 07 1697-1708 |
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10.1007/s00542-014-2262-0 doi (DE-627)OLC2034940687 (DE-He213)s00542-014-2262-0-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Zhang, Guo Jun verfasserin aut Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2014 Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. Hair Cell Hydrophone Lateralis Nerve Standing Wave Field Bury Oxide Layer Liu, Lin Xian aut Zhang, Wen Dong aut Xue, Chen Yang aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 21(2014), 8 vom: 30. Juli, Seite 1697-1708 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:21 year:2014 number:8 day:30 month:07 pages:1697-1708 https://doi.org/10.1007/s00542-014-2262-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 21 2014 8 30 07 1697-1708 |
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10.1007/s00542-014-2262-0 doi (DE-627)OLC2034940687 (DE-He213)s00542-014-2262-0-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Zhang, Guo Jun verfasserin aut Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2014 Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. Hair Cell Hydrophone Lateralis Nerve Standing Wave Field Bury Oxide Layer Liu, Lin Xian aut Zhang, Wen Dong aut Xue, Chen Yang aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 21(2014), 8 vom: 30. Juli, Seite 1697-1708 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:21 year:2014 number:8 day:30 month:07 pages:1697-1708 https://doi.org/10.1007/s00542-014-2262-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 21 2014 8 30 07 1697-1708 |
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10.1007/s00542-014-2262-0 doi (DE-627)OLC2034940687 (DE-He213)s00542-014-2262-0-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Zhang, Guo Jun verfasserin aut Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2014 Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. Hair Cell Hydrophone Lateralis Nerve Standing Wave Field Bury Oxide Layer Liu, Lin Xian aut Zhang, Wen Dong aut Xue, Chen Yang aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 21(2014), 8 vom: 30. Juli, Seite 1697-1708 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:21 year:2014 number:8 day:30 month:07 pages:1697-1708 https://doi.org/10.1007/s00542-014-2262-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 21 2014 8 30 07 1697-1708 |
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620 VZ 510 VZ Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone Hair Cell Hydrophone Lateralis Nerve Standing Wave Field Bury Oxide Layer |
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Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone |
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Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone |
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Zhang, Guo Jun |
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Zhang, Guo Jun Liu, Lin Xian Zhang, Wen Dong Xue, Chen Yang |
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design of a monolithic integrated three-dimensional mems bionic vector hydrophone |
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Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone |
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Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. © Springer-Verlag Berlin Heidelberg 2014 |
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Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. © Springer-Verlag Berlin Heidelberg 2014 |
| abstract_unstemmed |
Abstract In this paper, micro-electromechanical systems (MEMS) technology and the bionic principle are used to develop a low-frequency high-sensitivity three-dimensional omni-vector hydrophone that can obtain vector information of an underwater sound field by imitating the auditory principle of a fish’s lateral line organ. The key features are smaller size, better consistency, better low-frequency characteristic, higher sensitivity, and rigid mounting, which thus allow a spatial acoustic source to be detected directionally by a single hydrophone. The bionic MEMS microstructure was designed and fabricated and consists of two components: the vertical detection unit including a four-beam-cilium structure and a level detection unit including a double T-shaped beam structure. On the basis of theoretical analysis, the structure size and layout location of the piezoresistors are determined by simulation analysis and the double cilia type microstructure is fabricated integrally by MEMS manufacturing technology; after which the acoustic package of the microstructure is complete and the prototype is produced. Finally, this paper presents the experimental characterization of the microdevice, validating the concept and the analytical models used. The test results show that the three-dimensional vector hydrophone has a flat frequency response curve, exhibits a sensitivity of −185 dB (X, Y) and −181 dB (Z) (1 kHz, 0 dB reference 1 V/uPa) and shows a good directivity pattern in the form of an “8” shaped. More importantly, the depth of the concave point reaches 47.7 dB, and the asymmetry is only 0.5 dB, indicating that the three-dimensional vector hydrophone has great advantages in spatial orientation, which is suitable for applications in sonar systems. © Springer-Verlag Berlin Heidelberg 2014 |
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Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone |
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