The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes
Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize th...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Xi, Zhanwen [verfasserIn] |
|---|
| Format: |
Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2015 |
|---|
| Schlagwörter: |
|---|
| Anmerkung: |
© Springer-Verlag Berlin Heidelberg 2015 |
|---|
| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer Berlin Heidelberg, 1994, 22(2015), 8 vom: 31. März, Seite 2035-2042 |
|---|---|
| Übergeordnetes Werk: |
volume:22 ; year:2015 ; number:8 ; day:31 ; month:03 ; pages:2035-2042 |
| Links: |
|---|
| DOI / URN: |
10.1007/s00542-015-2509-4 |
|---|
| Katalog-ID: |
OLC2034944291 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2034944291 | ||
| 003 | DE-627 | ||
| 005 | 20230502121525.0 | ||
| 007 | tu | ||
| 008 | 200820s2015 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s00542-015-2509-4 |2 doi | |
| 035 | |a (DE-627)OLC2034944291 | ||
| 035 | |a (DE-He213)s00542-015-2509-4-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 620 |q VZ |
| 082 | 0 | 4 | |a 510 |q VZ |
| 100 | 1 | |a Xi, Zhanwen |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes |
| 264 | 1 | |c 2015 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © Springer-Verlag Berlin Heidelberg 2015 | ||
| 520 | |a Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. | ||
| 650 | 4 | |a Contact Pair | |
| 650 | 4 | |a Contact Process | |
| 650 | 4 | |a Contact Duration | |
| 650 | 4 | |a Shock Acceleration | |
| 650 | 4 | |a Flexible Electrode | |
| 700 | 1 | |a Cao, Yun |4 aut | |
| 700 | 1 | |a Yu, Pingxin |4 aut | |
| 700 | 1 | |a Nie, Weirong |4 aut | |
| 700 | 1 | |a Wang, Jiong |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Microsystem technologies |d Springer Berlin Heidelberg, 1994 |g 22(2015), 8 vom: 31. März, Seite 2035-2042 |w (DE-627)182644278 |w (DE-600)1223008-X |w (DE-576)045302146 |x 0946-7076 |7 nnns |
| 773 | 1 | 8 | |g volume:22 |g year:2015 |g number:8 |g day:31 |g month:03 |g pages:2035-2042 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s00542-015-2509-4 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a SSG-OLC-MAT | ||
| 912 | |a SSG-OPC-MAT | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_267 | ||
| 912 | |a GBV_ILN_2018 | ||
| 912 | |a GBV_ILN_2048 | ||
| 912 | |a GBV_ILN_4277 | ||
| 951 | |a AR | ||
| 952 | |d 22 |j 2015 |e 8 |b 31 |c 03 |h 2035-2042 | ||
| author_variant |
z x zx y c yc p y py w n wn j w jw |
|---|---|
| matchkey_str |
article:09467076:2015----::hsmltoadiuletotcpoesfmmietasic |
| hierarchy_sort_str |
2015 |
| publishDate |
2015 |
| allfields |
10.1007/s00542-015-2509-4 doi (DE-627)OLC2034944291 (DE-He213)s00542-015-2509-4-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Xi, Zhanwen verfasserin aut The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode Cao, Yun aut Yu, Pingxin aut Nie, Weirong aut Wang, Jiong aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 22(2015), 8 vom: 31. März, Seite 2035-2042 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 https://doi.org/10.1007/s00542-015-2509-4 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 22 2015 8 31 03 2035-2042 |
| spelling |
10.1007/s00542-015-2509-4 doi (DE-627)OLC2034944291 (DE-He213)s00542-015-2509-4-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Xi, Zhanwen verfasserin aut The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode Cao, Yun aut Yu, Pingxin aut Nie, Weirong aut Wang, Jiong aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 22(2015), 8 vom: 31. März, Seite 2035-2042 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 https://doi.org/10.1007/s00542-015-2509-4 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 22 2015 8 31 03 2035-2042 |
| allfields_unstemmed |
10.1007/s00542-015-2509-4 doi (DE-627)OLC2034944291 (DE-He213)s00542-015-2509-4-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Xi, Zhanwen verfasserin aut The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode Cao, Yun aut Yu, Pingxin aut Nie, Weirong aut Wang, Jiong aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 22(2015), 8 vom: 31. März, Seite 2035-2042 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 https://doi.org/10.1007/s00542-015-2509-4 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 22 2015 8 31 03 2035-2042 |
| allfieldsGer |
10.1007/s00542-015-2509-4 doi (DE-627)OLC2034944291 (DE-He213)s00542-015-2509-4-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Xi, Zhanwen verfasserin aut The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode Cao, Yun aut Yu, Pingxin aut Nie, Weirong aut Wang, Jiong aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 22(2015), 8 vom: 31. März, Seite 2035-2042 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 https://doi.org/10.1007/s00542-015-2509-4 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 22 2015 8 31 03 2035-2042 |
| allfieldsSound |
10.1007/s00542-015-2509-4 doi (DE-627)OLC2034944291 (DE-He213)s00542-015-2509-4-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Xi, Zhanwen verfasserin aut The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode Cao, Yun aut Yu, Pingxin aut Nie, Weirong aut Wang, Jiong aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 22(2015), 8 vom: 31. März, Seite 2035-2042 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 https://doi.org/10.1007/s00542-015-2509-4 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 22 2015 8 31 03 2035-2042 |
| language |
English |
| source |
Enthalten in Microsystem technologies 22(2015), 8 vom: 31. März, Seite 2035-2042 volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 |
| sourceStr |
Enthalten in Microsystem technologies 22(2015), 8 vom: 31. März, Seite 2035-2042 volume:22 year:2015 number:8 day:31 month:03 pages:2035-2042 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode |
| dewey-raw |
620 |
| isfreeaccess_bool |
false |
| container_title |
Microsystem technologies |
| authorswithroles_txt_mv |
Xi, Zhanwen @@aut@@ Cao, Yun @@aut@@ Yu, Pingxin @@aut@@ Nie, Weirong @@aut@@ Wang, Jiong @@aut@@ |
| publishDateDaySort_date |
2015-03-31T00:00:00Z |
| hierarchy_top_id |
182644278 |
| dewey-sort |
3620 |
| id |
OLC2034944291 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2034944291</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230502121525.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2015 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00542-015-2509-4</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2034944291</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00542-015-2509-4-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Xi, Zhanwen</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2015</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag Berlin Heidelberg 2015</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Contact Pair</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Contact Process</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Contact Duration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Shock Acceleration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Flexible Electrode</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cao, Yun</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yu, Pingxin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nie, Weirong</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wang, Jiong</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Microsystem technologies</subfield><subfield code="d">Springer Berlin Heidelberg, 1994</subfield><subfield code="g">22(2015), 8 vom: 31. März, Seite 2035-2042</subfield><subfield code="w">(DE-627)182644278</subfield><subfield code="w">(DE-600)1223008-X</subfield><subfield code="w">(DE-576)045302146</subfield><subfield code="x">0946-7076</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:22</subfield><subfield code="g">year:2015</subfield><subfield code="g">number:8</subfield><subfield code="g">day:31</subfield><subfield code="g">month:03</subfield><subfield code="g">pages:2035-2042</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00542-015-2509-4</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_267</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">22</subfield><subfield code="j">2015</subfield><subfield code="e">8</subfield><subfield code="b">31</subfield><subfield code="c">03</subfield><subfield code="h">2035-2042</subfield></datafield></record></collection>
|
| author |
Xi, Zhanwen |
| spellingShingle |
Xi, Zhanwen ddc 620 ddc 510 misc Contact Pair misc Contact Process misc Contact Duration misc Shock Acceleration misc Flexible Electrode The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes |
| authorStr |
Xi, Zhanwen |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)182644278 |
| format |
Article |
| dewey-ones |
620 - Engineering & allied operations 510 - Mathematics |
| delete_txt_mv |
keep |
| author_role |
aut aut aut aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0946-7076 |
| topic_title |
620 VZ 510 VZ The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes Contact Pair Contact Process Contact Duration Shock Acceleration Flexible Electrode |
| topic |
ddc 620 ddc 510 misc Contact Pair misc Contact Process misc Contact Duration misc Shock Acceleration misc Flexible Electrode |
| topic_unstemmed |
ddc 620 ddc 510 misc Contact Pair misc Contact Process misc Contact Duration misc Shock Acceleration misc Flexible Electrode |
| topic_browse |
ddc 620 ddc 510 misc Contact Pair misc Contact Process misc Contact Duration misc Shock Acceleration misc Flexible Electrode |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
Microsystem technologies |
| hierarchy_parent_id |
182644278 |
| dewey-tens |
620 - Engineering 510 - Mathematics |
| hierarchy_top_title |
Microsystem technologies |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 |
| title |
The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes |
| ctrlnum |
(DE-627)OLC2034944291 (DE-He213)s00542-015-2509-4-p |
| title_full |
The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes |
| author_sort |
Xi, Zhanwen |
| journal |
Microsystem technologies |
| journalStr |
Microsystem technologies |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
600 - Technology 500 - Science |
| recordtype |
marc |
| publishDateSort |
2015 |
| contenttype_str_mv |
txt |
| container_start_page |
2035 |
| author_browse |
Xi, Zhanwen Cao, Yun Yu, Pingxin Nie, Weirong Wang, Jiong |
| container_volume |
22 |
| class |
620 VZ 510 VZ |
| format_se |
Aufsätze |
| author-letter |
Xi, Zhanwen |
| doi_str_mv |
10.1007/s00542-015-2509-4 |
| dewey-full |
620 510 |
| title_sort |
the simulation and visual test contact process of a mems inertial switch with flexible electrodes |
| title_auth |
The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes |
| abstract |
Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. © Springer-Verlag Berlin Heidelberg 2015 |
| abstractGer |
Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. © Springer-Verlag Berlin Heidelberg 2015 |
| abstract_unstemmed |
Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results. © Springer-Verlag Berlin Heidelberg 2015 |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 |
| container_issue |
8 |
| title_short |
The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes |
| url |
https://doi.org/10.1007/s00542-015-2509-4 |
| remote_bool |
false |
| author2 |
Cao, Yun Yu, Pingxin Nie, Weirong Wang, Jiong |
| author2Str |
Cao, Yun Yu, Pingxin Nie, Weirong Wang, Jiong |
| ppnlink |
182644278 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/s00542-015-2509-4 |
| up_date |
2024-07-03T23:07:55.901Z |
| _version_ |
1803601131240161280 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2034944291</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230502121525.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2015 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00542-015-2509-4</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2034944291</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00542-015-2509-4-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Xi, Zhanwen</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2015</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag Berlin Heidelberg 2015</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video measurement has been used to visualize the switch contact process instead of electrical measurement for a deeper understanding of the dynamic contact process, and these images are used to visually validate simulation results. Comparisons between the simulation and image results are discussed. The image results are seen to be in good agreement with the dynamics simulation results.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Contact Pair</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Contact Process</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Contact Duration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Shock Acceleration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Flexible Electrode</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cao, Yun</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yu, Pingxin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nie, Weirong</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wang, Jiong</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Microsystem technologies</subfield><subfield code="d">Springer Berlin Heidelberg, 1994</subfield><subfield code="g">22(2015), 8 vom: 31. März, Seite 2035-2042</subfield><subfield code="w">(DE-627)182644278</subfield><subfield code="w">(DE-600)1223008-X</subfield><subfield code="w">(DE-576)045302146</subfield><subfield code="x">0946-7076</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:22</subfield><subfield code="g">year:2015</subfield><subfield code="g">number:8</subfield><subfield code="g">day:31</subfield><subfield code="g">month:03</subfield><subfield code="g">pages:2035-2042</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00542-015-2509-4</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-MAT</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_267</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">22</subfield><subfield code="j">2015</subfield><subfield code="e">8</subfield><subfield code="b">31</subfield><subfield code="c">03</subfield><subfield code="h">2035-2042</subfield></datafield></record></collection>
|
| score |
7.4011784 |