Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation
Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Jindal, Sumit Kumar [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2015 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag Berlin Heidelberg 2015 |
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| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer Berlin Heidelberg, 1994, 23(2015), 1 vom: 11. Okt., Seite 135-142 |
|---|---|
| Übergeordnetes Werk: |
volume:23 ; year:2015 ; number:1 ; day:11 ; month:10 ; pages:135-142 |
| Links: |
|---|
| DOI / URN: |
10.1007/s00542-015-2696-z |
|---|
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OLC2034945328 |
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| 520 | |a Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. | ||
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10.1007/s00542-015-2696-z doi (DE-627)OLC2034945328 (DE-He213)s00542-015-2696-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Jindal, Sumit Kumar verfasserin aut Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. Normal Mode Capacitance Variation Touch Point Capacitive Pressure Sensor Normal Mode Operation Raghuwanshi, Sanjeev Kumar aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 23(2015), 1 vom: 11. Okt., Seite 135-142 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:23 year:2015 number:1 day:11 month:10 pages:135-142 https://doi.org/10.1007/s00542-015-2696-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 23 2015 1 11 10 135-142 |
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10.1007/s00542-015-2696-z doi (DE-627)OLC2034945328 (DE-He213)s00542-015-2696-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Jindal, Sumit Kumar verfasserin aut Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. Normal Mode Capacitance Variation Touch Point Capacitive Pressure Sensor Normal Mode Operation Raghuwanshi, Sanjeev Kumar aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 23(2015), 1 vom: 11. Okt., Seite 135-142 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:23 year:2015 number:1 day:11 month:10 pages:135-142 https://doi.org/10.1007/s00542-015-2696-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 23 2015 1 11 10 135-142 |
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10.1007/s00542-015-2696-z doi (DE-627)OLC2034945328 (DE-He213)s00542-015-2696-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Jindal, Sumit Kumar verfasserin aut Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. Normal Mode Capacitance Variation Touch Point Capacitive Pressure Sensor Normal Mode Operation Raghuwanshi, Sanjeev Kumar aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 23(2015), 1 vom: 11. Okt., Seite 135-142 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:23 year:2015 number:1 day:11 month:10 pages:135-142 https://doi.org/10.1007/s00542-015-2696-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 23 2015 1 11 10 135-142 |
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10.1007/s00542-015-2696-z doi (DE-627)OLC2034945328 (DE-He213)s00542-015-2696-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Jindal, Sumit Kumar verfasserin aut Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. Normal Mode Capacitance Variation Touch Point Capacitive Pressure Sensor Normal Mode Operation Raghuwanshi, Sanjeev Kumar aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 23(2015), 1 vom: 11. Okt., Seite 135-142 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:23 year:2015 number:1 day:11 month:10 pages:135-142 https://doi.org/10.1007/s00542-015-2696-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 23 2015 1 11 10 135-142 |
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10.1007/s00542-015-2696-z doi (DE-627)OLC2034945328 (DE-He213)s00542-015-2696-z-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Jindal, Sumit Kumar verfasserin aut Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag Berlin Heidelberg 2015 Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. Normal Mode Capacitance Variation Touch Point Capacitive Pressure Sensor Normal Mode Operation Raghuwanshi, Sanjeev Kumar aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 23(2015), 1 vom: 11. Okt., Seite 135-142 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:23 year:2015 number:1 day:11 month:10 pages:135-142 https://doi.org/10.1007/s00542-015-2696-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_2048 GBV_ILN_4277 AR 23 2015 1 11 10 135-142 |
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Jindal, Sumit Kumar Raghuwanshi, Sanjeev Kumar |
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capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation |
| title_auth |
Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation |
| abstract |
Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. © Springer-Verlag Berlin Heidelberg 2015 |
| abstractGer |
Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. © Springer-Verlag Berlin Heidelberg 2015 |
| abstract_unstemmed |
Abstract Touch mode capacitive pressure sensor offer better performance in many applications than other devices. In touch mode operation of a capacitive pressure sensor the diaphragm touches the bottom of the substrate. Due to this several advantages such as near-linear output characteristics, large over range pressure and robust nature of the device was observed, which made it possible to withstand harsh industrial environment. To obtain better performance on the existing single sided touch mode capacitive pressure sensor (STMCPS) a double sided one has been proposed. In double sided touch mode capacitive pressure sensor (DTMCPS) an additional notch was etched at bottom of the substrate. So far in literature the advantage of DTMCPS over single sided has been discussed i.e. linear output characteristics, large over range protection and robust structure but no work is present which elaborates step by step calculation of performance parameters such as capacitance and sensitivity. Here we have completely derived the underlying expressions for performance parameters. The next step has been to validate our claims of higher sensitivity of this structure over single sided one. So MATLAB has been introduced and interpretations have been made. It has been proved that for the same size and touch point pressure as used in STMCPS the linear range of operation can be extended and the sensitivity can be enhanced for DTMCPS. Furthermore by addition of a notch the reliability of the sensor is also improved. © Springer-Verlag Berlin Heidelberg 2015 |
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Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation |
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