Shape memory alloy based controllable multi-port microvalve
Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and ei...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Megnin, Christof [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2019 |
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| Anmerkung: |
© Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
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| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Springer Berlin Heidelberg, 1994, 26(2019), 3 vom: 17. Sept., Seite 793-800 |
|---|---|
| Übergeordnetes Werk: |
volume:26 ; year:2019 ; number:3 ; day:17 ; month:09 ; pages:793-800 |
| Links: |
|---|
| DOI / URN: |
10.1007/s00542-019-04614-w |
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OLC2034961277 |
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| 520 | |a Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. | ||
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| 700 | 1 | |a Gueltig, Marcel |4 aut | |
| 700 | 1 | |a Kohl, Manfred |4 aut | |
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10.1007/s00542-019-04614-w doi (DE-627)OLC2034961277 (DE-He213)s00542-019-04614-w-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Megnin, Christof verfasserin aut Shape memory alloy based controllable multi-port microvalve 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. Moradi, Bahman aut Zuern, Jannik aut Ossmer, Hinnerk aut Gueltig, Marcel aut Kohl, Manfred aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 26(2019), 3 vom: 17. Sept., Seite 793-800 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:26 year:2019 number:3 day:17 month:09 pages:793-800 https://doi.org/10.1007/s00542-019-04614-w lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_4277 AR 26 2019 3 17 09 793-800 |
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10.1007/s00542-019-04614-w doi (DE-627)OLC2034961277 (DE-He213)s00542-019-04614-w-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Megnin, Christof verfasserin aut Shape memory alloy based controllable multi-port microvalve 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. Moradi, Bahman aut Zuern, Jannik aut Ossmer, Hinnerk aut Gueltig, Marcel aut Kohl, Manfred aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 26(2019), 3 vom: 17. Sept., Seite 793-800 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:26 year:2019 number:3 day:17 month:09 pages:793-800 https://doi.org/10.1007/s00542-019-04614-w lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_4277 AR 26 2019 3 17 09 793-800 |
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10.1007/s00542-019-04614-w doi (DE-627)OLC2034961277 (DE-He213)s00542-019-04614-w-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Megnin, Christof verfasserin aut Shape memory alloy based controllable multi-port microvalve 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. Moradi, Bahman aut Zuern, Jannik aut Ossmer, Hinnerk aut Gueltig, Marcel aut Kohl, Manfred aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 26(2019), 3 vom: 17. Sept., Seite 793-800 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:26 year:2019 number:3 day:17 month:09 pages:793-800 https://doi.org/10.1007/s00542-019-04614-w lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_4277 AR 26 2019 3 17 09 793-800 |
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10.1007/s00542-019-04614-w doi (DE-627)OLC2034961277 (DE-He213)s00542-019-04614-w-p DE-627 ger DE-627 rakwb eng 620 VZ 510 VZ Megnin, Christof verfasserin aut Shape memory alloy based controllable multi-port microvalve 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. Moradi, Bahman aut Zuern, Jannik aut Ossmer, Hinnerk aut Gueltig, Marcel aut Kohl, Manfred aut Enthalten in Microsystem technologies Springer Berlin Heidelberg, 1994 26(2019), 3 vom: 17. Sept., Seite 793-800 (DE-627)182644278 (DE-600)1223008-X (DE-576)045302146 0946-7076 nnns volume:26 year:2019 number:3 day:17 month:09 pages:793-800 https://doi.org/10.1007/s00542-019-04614-w lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-MAT SSG-OPC-MAT GBV_ILN_70 GBV_ILN_267 GBV_ILN_2018 GBV_ILN_4277 AR 26 2019 3 17 09 793-800 |
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Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. © Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
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Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. © Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
| abstract_unstemmed |
Abstract This paper describes an innovative miniature multi-port valve with a thin foil of shape memory alloy (SMA) as actuator for switching and dosing gaseous and liquid media. The normally closed (NC) microvalve has two structured SMA actuators that are switched independently of each other and either two inputs and one output or one input and two outputs. In addition to switching the media in the 3/4-way arrangement, it can also be used with a flow sensor in a closed loop control for dosing. Furthermore, the valve design is layer-based so that individual components can be manufactured according to given requirements or using different manufacturing technologies depending on the batch size. The SMA multi-port microvalve showed flow rates of about 2300 ml/min (nitrogen gas) and about 45 ml/min (water) for an applied pressure difference of 200 kPa and a heating current of about 400 mA. For flow regulation a closed loop control was realized and evaluated for a pressure difference of 100 kPa and a setpoint value of 900 ml/min. © Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
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Shape memory alloy based controllable multi-port microvalve |
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Moradi, Bahman Zuern, Jannik Ossmer, Hinnerk Gueltig, Marcel Kohl, Manfred |
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