Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method
Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the p...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
MASCIA, L [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
1997 |
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| Schlagwörter: |
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| Anmerkung: |
© Chapman and Hall 1997 |
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| Übergeordnetes Werk: |
Enthalten in: Journal of materials science - Kluwer Academic Publishers-Plenum Publishers, 1966, 32(1997), 3 vom: Feb., Seite 667-674 |
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| Übergeordnetes Werk: |
volume:32 ; year:1997 ; number:3 ; month:02 ; pages:667-674 |
| Links: |
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| DOI / URN: |
10.1023/A:1018535718438 |
|---|
| Katalog-ID: |
OLC2046233654 |
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| 520 | |a Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. | ||
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10.1023/A:1018535718438 doi (DE-627)OLC2046233654 (DE-He213)A:1018535718438-p DE-627 ger DE-627 rakwb eng 670 VZ MASCIA, L verfasserin aut Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method 1997 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman and Hall 1997 Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. Plasma Treatment Dense Layer Silica Coating Transmission Electron Microscopy Examination Plasma Chamber ZHANG, Z aut Enthalten in Journal of materials science Kluwer Academic Publishers-Plenum Publishers, 1966 32(1997), 3 vom: Feb., Seite 667-674 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:32 year:1997 number:3 month:02 pages:667-674 https://doi.org/10.1023/A:1018535718438 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 32 1997 3 02 667-674 |
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10.1023/A:1018535718438 doi (DE-627)OLC2046233654 (DE-He213)A:1018535718438-p DE-627 ger DE-627 rakwb eng 670 VZ MASCIA, L verfasserin aut Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method 1997 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman and Hall 1997 Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. Plasma Treatment Dense Layer Silica Coating Transmission Electron Microscopy Examination Plasma Chamber ZHANG, Z aut Enthalten in Journal of materials science Kluwer Academic Publishers-Plenum Publishers, 1966 32(1997), 3 vom: Feb., Seite 667-674 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:32 year:1997 number:3 month:02 pages:667-674 https://doi.org/10.1023/A:1018535718438 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 32 1997 3 02 667-674 |
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10.1023/A:1018535718438 doi (DE-627)OLC2046233654 (DE-He213)A:1018535718438-p DE-627 ger DE-627 rakwb eng 670 VZ MASCIA, L verfasserin aut Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method 1997 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman and Hall 1997 Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. Plasma Treatment Dense Layer Silica Coating Transmission Electron Microscopy Examination Plasma Chamber ZHANG, Z aut Enthalten in Journal of materials science Kluwer Academic Publishers-Plenum Publishers, 1966 32(1997), 3 vom: Feb., Seite 667-674 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:32 year:1997 number:3 month:02 pages:667-674 https://doi.org/10.1023/A:1018535718438 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 32 1997 3 02 667-674 |
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10.1023/A:1018535718438 doi (DE-627)OLC2046233654 (DE-He213)A:1018535718438-p DE-627 ger DE-627 rakwb eng 670 VZ MASCIA, L verfasserin aut Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method 1997 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman and Hall 1997 Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. Plasma Treatment Dense Layer Silica Coating Transmission Electron Microscopy Examination Plasma Chamber ZHANG, Z aut Enthalten in Journal of materials science Kluwer Academic Publishers-Plenum Publishers, 1966 32(1997), 3 vom: Feb., Seite 667-674 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:32 year:1997 number:3 month:02 pages:667-674 https://doi.org/10.1023/A:1018535718438 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 32 1997 3 02 667-674 |
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10.1023/A:1018535718438 doi (DE-627)OLC2046233654 (DE-He213)A:1018535718438-p DE-627 ger DE-627 rakwb eng 670 VZ MASCIA, L verfasserin aut Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method 1997 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman and Hall 1997 Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. Plasma Treatment Dense Layer Silica Coating Transmission Electron Microscopy Examination Plasma Chamber ZHANG, Z aut Enthalten in Journal of materials science Kluwer Academic Publishers-Plenum Publishers, 1966 32(1997), 3 vom: Feb., Seite 667-674 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:32 year:1997 number:3 month:02 pages:667-674 https://doi.org/10.1023/A:1018535718438 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 32 1997 3 02 667-674 |
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MASCIA, L |
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670 VZ Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method Plasma Treatment Dense Layer Silica Coating Transmission Electron Microscopy Examination Plasma Chamber |
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ddc 670 misc Plasma Treatment misc Dense Layer misc Silica Coating misc Transmission Electron Microscopy Examination misc Plasma Chamber |
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Journal of materials science |
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Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method |
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Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method |
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1997 |
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MASCIA, L ZHANG, Z |
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MASCIA, L |
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670 |
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dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method |
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Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method |
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Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. © Chapman and Hall 1997 |
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Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. © Chapman and Hall 1997 |
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Abstract Silica gel coatings prepared by the sol-gel method were subjected to low-temperature plasma treatments in air and argon. This was found to give rise to the formation of a dense outer layer, whose thickness increased with the duration of the treatment and decreased when the pressure in the plasma chamber was reduced. The formation of a dense layer in the coatings was confirmed from measurements of the overall thickness and the refractive index by ellipsometry, and also from TEM examination and light transmission experiments. The coatings were found to contain an uppermost layer of alumina, which was formed through secondary sputtering of aluminium from the electrodes in the plasma chamber. The concentration of alumina in the mixture with silica decreased through the thickness of the coating and became zero at a distance slightly smaller than the overall thickness of the dense layer. The thickness of the dense layer was found to be slightly higher with argon than with air plasma treatments. Whereas the aluminium concentration through the thickness of the coating was the same for the two types of treatment, a carbon residue was found only in the case of argon plasma treatments. The composition of the underlying silica layers was found to correspond to $ SiO_{1.6} $. © Chapman and Hall 1997 |
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Dense outer layers formed by plasma treatments of silica coatings produced by the sol–gel method |
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