Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate

Gespeichert in:

Autor*in:	Kim, Hyoun Woo [verfasserIn]

Format:	Artikel
Sprache:	Englisch

Erschienen:	2004

Schlagwörter:	Polymer Structural Quality Cleaning Temperature Homoepitaxial Film

Anmerkung:	© Kluwer Academic Publishers 2004

Übergeordnetes Werk:	Enthalten in: Journal of materials science - Kluwer Academic Publishers, 1966, 39(2004), 22 vom: Nov., Seite 6861-6862
Übergeordnetes Werk:	volume:39 ; year:2004 ; number:22 ; month:11 ; pages:6861-6862

Links:	Volltext

DOI / URN:	10.1023/B:JMSC.0000045621.01061.7c

Katalog-ID:	OLC2046296427

Internformat


LEADER	01000caa a22002652 4500
001	OLC2046296427
003	DE-627
005	20230503123215.0
007	tu
008	200820s2004 xx \|\|\|\|\| 00\| \|\|eng c
024	7		\|a 10.1023/B:JMSC.0000045621.01061.7c \|2 doi
035			\|a (DE-627)OLC2046296427
035			\|a (DE-He213)B:JMSC.0000045621.01061.7c-p
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
082	0	4	\|a 670 \|q VZ
100	1		\|a Kim, Hyoun Woo \|e verfasserin \|4 aut
245	1	0	\|a Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
264		1	\|c 2004
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
500			\|a © Kluwer Academic Publishers 2004
650		4	\|a Polymer
650		4	\|a Structural Quality
650		4	\|a Cleaning Temperature
650		4	\|a Homoepitaxial Film
773	0	8	\|i Enthalten in \|t Journal of materials science \|d Kluwer Academic Publishers, 1966 \|g 39(2004), 22 vom: Nov., Seite 6861-6862 \|w (DE-627)129546372 \|w (DE-600)218324-9 \|w (DE-576)014996774 \|x 0022-2461 \|7 nnns
773	1	8	\|g volume:39 \|g year:2004 \|g number:22 \|g month:11 \|g pages:6861-6862
856	4	1	\|u https://doi.org/10.1023/B:JMSC.0000045621.01061.7c \|z lizenzpflichtig \|3 Volltext
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-TEC
912			\|a GBV_ILN_20
912			\|a GBV_ILN_21
912			\|a GBV_ILN_23
912			\|a GBV_ILN_30
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_62
912			\|a GBV_ILN_65
912			\|a GBV_ILN_70
912			\|a GBV_ILN_100
912			\|a GBV_ILN_602
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2005
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2015
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_4046
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4323
951			\|a AR
952			\|d 39 \|j 2004 \|e 22 \|c 11 \|h 6861-6862

Indexfelder

author_variant	h w k hw hwk
matchkey_str	article:00222461:2004----::fetfniulaigeprtrotetutrlultohme
hierarchy_sort_str	2004
publishDate	2004
allfields	10.1023/B:JMSC.0000045621.01061.7c doi (DE-627)OLC2046296427 (DE-He213)B:JMSC.0000045621.01061.7c-p DE-627 ger DE-627 rakwb eng 670 VZ Kim, Hyoun Woo verfasserin aut Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 2004 Polymer Structural Quality Cleaning Temperature Homoepitaxial Film Enthalten in Journal of materials science Kluwer Academic Publishers, 1966 39(2004), 22 vom: Nov., Seite 6861-6862 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:39 year:2004 number:22 month:11 pages:6861-6862 https://doi.org/10.1023/B:JMSC.0000045621.01061.7c lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_100 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4319 GBV_ILN_4323 AR 39 2004 22 11 6861-6862
spelling	10.1023/B:JMSC.0000045621.01061.7c doi (DE-627)OLC2046296427 (DE-He213)B:JMSC.0000045621.01061.7c-p DE-627 ger DE-627 rakwb eng 670 VZ Kim, Hyoun Woo verfasserin aut Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 2004 Polymer Structural Quality Cleaning Temperature Homoepitaxial Film Enthalten in Journal of materials science Kluwer Academic Publishers, 1966 39(2004), 22 vom: Nov., Seite 6861-6862 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:39 year:2004 number:22 month:11 pages:6861-6862 https://doi.org/10.1023/B:JMSC.0000045621.01061.7c lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_100 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4319 GBV_ILN_4323 AR 39 2004 22 11 6861-6862
allfields_unstemmed	10.1023/B:JMSC.0000045621.01061.7c doi (DE-627)OLC2046296427 (DE-He213)B:JMSC.0000045621.01061.7c-p DE-627 ger DE-627 rakwb eng 670 VZ Kim, Hyoun Woo verfasserin aut Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 2004 Polymer Structural Quality Cleaning Temperature Homoepitaxial Film Enthalten in Journal of materials science Kluwer Academic Publishers, 1966 39(2004), 22 vom: Nov., Seite 6861-6862 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:39 year:2004 number:22 month:11 pages:6861-6862 https://doi.org/10.1023/B:JMSC.0000045621.01061.7c lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_100 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4319 GBV_ILN_4323 AR 39 2004 22 11 6861-6862
allfieldsGer	10.1023/B:JMSC.0000045621.01061.7c doi (DE-627)OLC2046296427 (DE-He213)B:JMSC.0000045621.01061.7c-p DE-627 ger DE-627 rakwb eng 670 VZ Kim, Hyoun Woo verfasserin aut Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 2004 Polymer Structural Quality Cleaning Temperature Homoepitaxial Film Enthalten in Journal of materials science Kluwer Academic Publishers, 1966 39(2004), 22 vom: Nov., Seite 6861-6862 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:39 year:2004 number:22 month:11 pages:6861-6862 https://doi.org/10.1023/B:JMSC.0000045621.01061.7c lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_100 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4319 GBV_ILN_4323 AR 39 2004 22 11 6861-6862
allfieldsSound	10.1023/B:JMSC.0000045621.01061.7c doi (DE-627)OLC2046296427 (DE-He213)B:JMSC.0000045621.01061.7c-p DE-627 ger DE-627 rakwb eng 670 VZ Kim, Hyoun Woo verfasserin aut Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 2004 Polymer Structural Quality Cleaning Temperature Homoepitaxial Film Enthalten in Journal of materials science Kluwer Academic Publishers, 1966 39(2004), 22 vom: Nov., Seite 6861-6862 (DE-627)129546372 (DE-600)218324-9 (DE-576)014996774 0022-2461 nnns volume:39 year:2004 number:22 month:11 pages:6861-6862 https://doi.org/10.1023/B:JMSC.0000045621.01061.7c lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_100 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4319 GBV_ILN_4323 AR 39 2004 22 11 6861-6862
language	English
source	Enthalten in Journal of materials science 39(2004), 22 vom: Nov., Seite 6861-6862 volume:39 year:2004 number:22 month:11 pages:6861-6862
sourceStr	Enthalten in Journal of materials science 39(2004), 22 vom: Nov., Seite 6861-6862 volume:39 year:2004 number:22 month:11 pages:6861-6862
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	Polymer Structural Quality Cleaning Temperature Homoepitaxial Film
dewey-raw	670
isfreeaccess_bool	false
container_title	Journal of materials science
authorswithroles_txt_mv	Kim, Hyoun Woo @@aut@@
publishDateDaySort_date	2004-11-01T00:00:00Z
hierarchy_top_id	129546372
dewey-sort	3670
id	OLC2046296427
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2046296427</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230503123215.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2004 xx \|\|\|\|\| 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1023/B:JMSC.0000045621.01061.7c</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2046296427</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)B:JMSC.0000045621.01061.7c-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kim, Hyoun Woo</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2004</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Kluwer Academic Publishers 2004</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Polymer</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Structural Quality</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Cleaning Temperature</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Homoepitaxial Film</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of materials science</subfield><subfield code="d">Kluwer Academic Publishers, 1966</subfield><subfield code="g">39(2004), 22 vom: Nov., Seite 6861-6862</subfield><subfield code="w">(DE-627)129546372</subfield><subfield code="w">(DE-600)218324-9</subfield><subfield code="w">(DE-576)014996774</subfield><subfield code="x">0022-2461</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:39</subfield><subfield code="g">year:2004</subfield><subfield code="g">number:22</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:6861-6862</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1023/B:JMSC.0000045621.01061.7c</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">39</subfield><subfield code="j">2004</subfield><subfield code="e">22</subfield><subfield code="c">11</subfield><subfield code="h">6861-6862</subfield></datafield></record></collection>
author	Kim, Hyoun Woo
spellingShingle	Kim, Hyoun Woo ddc 670 misc Polymer misc Structural Quality misc Cleaning Temperature misc Homoepitaxial Film Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
authorStr	Kim, Hyoun Woo
ppnlink_with_tag_str_mv	@@773@@(DE-627)129546372
format	Article
dewey-ones	670 - Manufacturing
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0022-2461
topic_title	670 VZ Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate Polymer Structural Quality Cleaning Temperature Homoepitaxial Film
topic	ddc 670 misc Polymer misc Structural Quality misc Cleaning Temperature misc Homoepitaxial Film
topic_unstemmed	ddc 670 misc Polymer misc Structural Quality misc Cleaning Temperature misc Homoepitaxial Film
topic_browse	ddc 670 misc Polymer misc Structural Quality misc Cleaning Temperature misc Homoepitaxial Film
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
hierarchy_parent_title	Journal of materials science
hierarchy_parent_id	129546372
dewey-tens	670 - Manufacturing
hierarchy_top_title	Journal of materials science
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)129546372 (DE-600)218324-9 (DE-576)014996774
title	Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
ctrlnum	(DE-627)OLC2046296427 (DE-He213)B:JMSC.0000045621.01061.7c-p
title_full	Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
author_sort	Kim, Hyoun Woo
journal	Journal of materials science
journalStr	Journal of materials science
lang_code	eng
isOA_bool	false
dewey-hundreds	600 - Technology
recordtype	marc
publishDateSort	2004
contenttype_str_mv	txt
container_start_page	6861
author_browse	Kim, Hyoun Woo
container_volume	39
class	670 VZ
format_se	Aufsätze
author-letter	Kim, Hyoun Woo
doi_str_mv	10.1023/B:JMSC.0000045621.01061.7c
dewey-full	670
title_sort	effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on si substrate
title_auth	Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
abstract	© Kluwer Academic Publishers 2004
abstractGer	© Kluwer Academic Publishers 2004
abstract_unstemmed	© Kluwer Academic Publishers 2004
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_100 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4319 GBV_ILN_4323
container_issue	22
title_short	Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
url	https://doi.org/10.1023/B:JMSC.0000045621.01061.7c
remote_bool	false
ppnlink	129546372
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
doi_str	10.1023/B:JMSC.0000045621.01061.7c
up_date	2024-07-04T04:43:43.081Z
_version_	1803622257086431233
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2046296427</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230503123215.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s2004 xx \|\|\|\|\| 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1023/B:JMSC.0000045621.01061.7c</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2046296427</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)B:JMSC.0000045621.01061.7c-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kim, Hyoun Woo</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2004</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Kluwer Academic Publishers 2004</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Polymer</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Structural Quality</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Cleaning Temperature</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Homoepitaxial Film</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of materials science</subfield><subfield code="d">Kluwer Academic Publishers, 1966</subfield><subfield code="g">39(2004), 22 vom: Nov., Seite 6861-6862</subfield><subfield code="w">(DE-627)129546372</subfield><subfield code="w">(DE-600)218324-9</subfield><subfield code="w">(DE-576)014996774</subfield><subfield code="x">0022-2461</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:39</subfield><subfield code="g">year:2004</subfield><subfield code="g">number:22</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:6861-6862</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1023/B:JMSC.0000045621.01061.7c</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">39</subfield><subfield code="j">2004</subfield><subfield code="e">22</subfield><subfield code="c">11</subfield><subfield code="h">6861-6862</subfield></datafield></record></collection>
score	7.401658

Nicht das Richtige dabei?

Schreiben Sie uns!

Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?