Laser Modulation Interference Microscopy as a Means of Controlling the Form and Roughness of Optical Surfaces
The use of the technology of modulation interference microscopy as an effective means of quality control of precision optical surfaces with roughness on the order of 1 nm and flatness up to 10 nm at an aperture up to 100 mm is considered.
Gespeichert in:
| Autor*in: |
Ignat’ev, P. S. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2015 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer Science+Business Media New York 2015 |
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| Übergeordnetes Werk: |
Enthalten in: Measurement techniques - Springer US, 1958, 58(2015), 7 vom: Okt., Seite 772-776 |
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| Übergeordnetes Werk: |
volume:58 ; year:2015 ; number:7 ; month:10 ; pages:772-776 |
| Links: |
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| DOI / URN: |
10.1007/s11018-015-0792-1 |
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10.1007/s11018-015-0792-1 doi (DE-627)OLC204773505X (DE-He213)s11018-015-0792-1-p DE-627 ger DE-627 rakwb eng 620 VZ 11 ssgn Ignat’ev, P. S. verfasserin aut Laser Modulation Interference Microscopy as a Means of Controlling the Form and Roughness of Optical Surfaces 2015 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer Science+Business Media New York 2015 The use of the technology of modulation interference microscopy as an effective means of quality control of precision optical surfaces with roughness on the order of 1 nm and flatness up to 10 nm at an aperture up to 100 mm is considered. modulation interference microscopy super-high resolution anisotropy optical surface Kol’ner, L. S. aut Indukaev, K. V. aut Teleshevskii, V. I. aut Enthalten in Measurement techniques Springer US, 1958 58(2015), 7 vom: Okt., Seite 772-776 (DE-627)129596876 (DE-600)240846-6 (DE-576)015090051 0543-1972 nnns volume:58 year:2015 number:7 month:10 pages:772-776 https://doi.org/10.1007/s11018-015-0792-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_70 GBV_ILN_170 AR 58 2015 7 10 772-776 |
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The use of the technology of modulation interference microscopy as an effective means of quality control of precision optical surfaces with roughness on the order of 1 nm and flatness up to 10 nm at an aperture up to 100 mm is considered. © Springer Science+Business Media New York 2015 |
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The use of the technology of modulation interference microscopy as an effective means of quality control of precision optical surfaces with roughness on the order of 1 nm and flatness up to 10 nm at an aperture up to 100 mm is considered. © Springer Science+Business Media New York 2015 |
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