Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates
Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Pedraza, A. J. [verfasserIn] |
|---|
| Format: |
Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
1992 |
|---|
| Schlagwörter: |
|---|
| Anmerkung: |
© The Minerals, Metals and Materials Society, and ASM International 1992 |
|---|
| Übergeordnetes Werk: |
Enthalten in: Metallurgical transactions. A, Physical metallurgy and materials science - Springer-Verlag, 1975, 23(1992), 4 vom: Apr., Seite 1095-1103 |
|---|---|
| Übergeordnetes Werk: |
volume:23 ; year:1992 ; number:4 ; month:04 ; pages:1095-1103 |
| Links: |
|---|
| DOI / URN: |
10.1007/BF02665041 |
|---|
| Katalog-ID: |
OLC2053975539 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2053975539 | ||
| 003 | DE-627 | ||
| 005 | 20230303053501.0 | ||
| 007 | tu | ||
| 008 | 200820s1992 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/BF02665041 |2 doi | |
| 035 | |a (DE-627)OLC2053975539 | ||
| 035 | |a (DE-He213)BF02665041-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 670 |a 530 |q VZ |
| 100 | 1 | |a Pedraza, A. J. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| 264 | 1 | |c 1992 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © The Minerals, Metals and Materials Society, and ASM International 1992 | ||
| 520 | |a Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. | ||
| 650 | 4 | |a Metallurgical Transaction | |
| 650 | 4 | |a Sapphire | |
| 650 | 4 | |a Excimer Laser | |
| 650 | 4 | |a Sapphire Substrate | |
| 650 | 4 | |a Copper Film | |
| 700 | 1 | |a Godbole, M. J. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Metallurgical transactions. A, Physical metallurgy and materials science |d Springer-Verlag, 1975 |g 23(1992), 4 vom: Apr., Seite 1095-1103 |w (DE-627)129429058 |w (DE-600)192156-3 |w (DE-576)01480204X |x 0026-086X |7 nnns |
| 773 | 1 | 8 | |g volume:23 |g year:1992 |g number:4 |g month:04 |g pages:1095-1103 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/BF02665041 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a SSG-OLC-PHY | ||
| 912 | |a GBV_ILN_11 | ||
| 912 | |a GBV_ILN_20 | ||
| 912 | |a GBV_ILN_21 | ||
| 912 | |a GBV_ILN_23 | ||
| 912 | |a GBV_ILN_30 | ||
| 912 | |a GBV_ILN_62 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_602 | ||
| 912 | |a GBV_ILN_2004 | ||
| 912 | |a GBV_ILN_2006 | ||
| 912 | |a GBV_ILN_2015 | ||
| 912 | |a GBV_ILN_2016 | ||
| 912 | |a GBV_ILN_2020 | ||
| 912 | |a GBV_ILN_2027 | ||
| 912 | |a GBV_ILN_4035 | ||
| 912 | |a GBV_ILN_4046 | ||
| 912 | |a GBV_ILN_4082 | ||
| 912 | |a GBV_ILN_4307 | ||
| 912 | |a GBV_ILN_4313 | ||
| 912 | |a GBV_ILN_4319 | ||
| 912 | |a GBV_ILN_4323 | ||
| 912 | |a GBV_ILN_4700 | ||
| 951 | |a AR | ||
| 952 | |d 23 |j 1992 |e 4 |c 04 |h 1095-1103 | ||
| author_variant |
a j p aj ajp m j g mj mjg |
|---|---|
| matchkey_str |
article:0026086X:1992----::aeehnesutrraodpstootimtlifl |
| hierarchy_sort_str |
1992 |
| publishDate |
1992 |
| allfields |
10.1007/BF02665041 doi (DE-627)OLC2053975539 (DE-He213)BF02665041-p DE-627 ger DE-627 rakwb eng 670 530 VZ Pedraza, A. J. verfasserin aut Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates 1992 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Minerals, Metals and Materials Society, and ASM International 1992 Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film Godbole, M. J. aut Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science Springer-Verlag, 1975 23(1992), 4 vom: Apr., Seite 1095-1103 (DE-627)129429058 (DE-600)192156-3 (DE-576)01480204X 0026-086X nnns volume:23 year:1992 number:4 month:04 pages:1095-1103 https://doi.org/10.1007/BF02665041 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_62 GBV_ILN_70 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_4035 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 23 1992 4 04 1095-1103 |
| spelling |
10.1007/BF02665041 doi (DE-627)OLC2053975539 (DE-He213)BF02665041-p DE-627 ger DE-627 rakwb eng 670 530 VZ Pedraza, A. J. verfasserin aut Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates 1992 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Minerals, Metals and Materials Society, and ASM International 1992 Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film Godbole, M. J. aut Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science Springer-Verlag, 1975 23(1992), 4 vom: Apr., Seite 1095-1103 (DE-627)129429058 (DE-600)192156-3 (DE-576)01480204X 0026-086X nnns volume:23 year:1992 number:4 month:04 pages:1095-1103 https://doi.org/10.1007/BF02665041 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_62 GBV_ILN_70 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_4035 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 23 1992 4 04 1095-1103 |
| allfields_unstemmed |
10.1007/BF02665041 doi (DE-627)OLC2053975539 (DE-He213)BF02665041-p DE-627 ger DE-627 rakwb eng 670 530 VZ Pedraza, A. J. verfasserin aut Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates 1992 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Minerals, Metals and Materials Society, and ASM International 1992 Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film Godbole, M. J. aut Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science Springer-Verlag, 1975 23(1992), 4 vom: Apr., Seite 1095-1103 (DE-627)129429058 (DE-600)192156-3 (DE-576)01480204X 0026-086X nnns volume:23 year:1992 number:4 month:04 pages:1095-1103 https://doi.org/10.1007/BF02665041 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_62 GBV_ILN_70 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_4035 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 23 1992 4 04 1095-1103 |
| allfieldsGer |
10.1007/BF02665041 doi (DE-627)OLC2053975539 (DE-He213)BF02665041-p DE-627 ger DE-627 rakwb eng 670 530 VZ Pedraza, A. J. verfasserin aut Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates 1992 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Minerals, Metals and Materials Society, and ASM International 1992 Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film Godbole, M. J. aut Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science Springer-Verlag, 1975 23(1992), 4 vom: Apr., Seite 1095-1103 (DE-627)129429058 (DE-600)192156-3 (DE-576)01480204X 0026-086X nnns volume:23 year:1992 number:4 month:04 pages:1095-1103 https://doi.org/10.1007/BF02665041 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_62 GBV_ILN_70 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_4035 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 23 1992 4 04 1095-1103 |
| allfieldsSound |
10.1007/BF02665041 doi (DE-627)OLC2053975539 (DE-He213)BF02665041-p DE-627 ger DE-627 rakwb eng 670 530 VZ Pedraza, A. J. verfasserin aut Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates 1992 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Minerals, Metals and Materials Society, and ASM International 1992 Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film Godbole, M. J. aut Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science Springer-Verlag, 1975 23(1992), 4 vom: Apr., Seite 1095-1103 (DE-627)129429058 (DE-600)192156-3 (DE-576)01480204X 0026-086X nnns volume:23 year:1992 number:4 month:04 pages:1095-1103 https://doi.org/10.1007/BF02665041 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_62 GBV_ILN_70 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_4035 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 23 1992 4 04 1095-1103 |
| language |
English |
| source |
Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science 23(1992), 4 vom: Apr., Seite 1095-1103 volume:23 year:1992 number:4 month:04 pages:1095-1103 |
| sourceStr |
Enthalten in Metallurgical transactions. A, Physical metallurgy and materials science 23(1992), 4 vom: Apr., Seite 1095-1103 volume:23 year:1992 number:4 month:04 pages:1095-1103 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film |
| dewey-raw |
670 |
| isfreeaccess_bool |
false |
| container_title |
Metallurgical transactions. A, Physical metallurgy and materials science |
| authorswithroles_txt_mv |
Pedraza, A. J. @@aut@@ Godbole, M. J. @@aut@@ |
| publishDateDaySort_date |
1992-04-01T00:00:00Z |
| hierarchy_top_id |
129429058 |
| dewey-sort |
3670 |
| id |
OLC2053975539 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2053975539</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230303053501.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s1992 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/BF02665041</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2053975539</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)BF02665041-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="a">530</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Pedraza, A. J.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1992</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© The Minerals, Metals and Materials Society, and ASM International 1992</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metallurgical Transaction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sapphire</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Excimer Laser</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sapphire Substrate</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Copper Film</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Godbole, M. J.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Metallurgical transactions. A, Physical metallurgy and materials science</subfield><subfield code="d">Springer-Verlag, 1975</subfield><subfield code="g">23(1992), 4 vom: Apr., Seite 1095-1103</subfield><subfield code="w">(DE-627)129429058</subfield><subfield code="w">(DE-600)192156-3</subfield><subfield code="w">(DE-576)01480204X</subfield><subfield code="x">0026-086X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:23</subfield><subfield code="g">year:1992</subfield><subfield code="g">number:4</subfield><subfield code="g">month:04</subfield><subfield code="g">pages:1095-1103</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/BF02665041</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2016</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">23</subfield><subfield code="j">1992</subfield><subfield code="e">4</subfield><subfield code="c">04</subfield><subfield code="h">1095-1103</subfield></datafield></record></collection>
|
| author |
Pedraza, A. J. |
| spellingShingle |
Pedraza, A. J. ddc 670 misc Metallurgical Transaction misc Sapphire misc Excimer Laser misc Sapphire Substrate misc Copper Film Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| authorStr |
Pedraza, A. J. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)129429058 |
| format |
Article |
| dewey-ones |
670 - Manufacturing 530 - Physics |
| delete_txt_mv |
keep |
| author_role |
aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0026-086X |
| topic_title |
670 530 VZ Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates Metallurgical Transaction Sapphire Excimer Laser Sapphire Substrate Copper Film |
| topic |
ddc 670 misc Metallurgical Transaction misc Sapphire misc Excimer Laser misc Sapphire Substrate misc Copper Film |
| topic_unstemmed |
ddc 670 misc Metallurgical Transaction misc Sapphire misc Excimer Laser misc Sapphire Substrate misc Copper Film |
| topic_browse |
ddc 670 misc Metallurgical Transaction misc Sapphire misc Excimer Laser misc Sapphire Substrate misc Copper Film |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
Metallurgical transactions. A, Physical metallurgy and materials science |
| hierarchy_parent_id |
129429058 |
| dewey-tens |
670 - Manufacturing 530 - Physics |
| hierarchy_top_title |
Metallurgical transactions. A, Physical metallurgy and materials science |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)129429058 (DE-600)192156-3 (DE-576)01480204X |
| title |
Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| ctrlnum |
(DE-627)OLC2053975539 (DE-He213)BF02665041-p |
| title_full |
Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| author_sort |
Pedraza, A. J. |
| journal |
Metallurgical transactions. A, Physical metallurgy and materials science |
| journalStr |
Metallurgical transactions. A, Physical metallurgy and materials science |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
600 - Technology 500 - Science |
| recordtype |
marc |
| publishDateSort |
1992 |
| contenttype_str_mv |
txt |
| container_start_page |
1095 |
| author_browse |
Pedraza, A. J. Godbole, M. J. |
| container_volume |
23 |
| class |
670 530 VZ |
| format_se |
Aufsätze |
| author-letter |
Pedraza, A. J. |
| doi_str_mv |
10.1007/BF02665041 |
| dewey-full |
670 530 |
| title_sort |
laser-enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| title_auth |
Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| abstract |
Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. © The Minerals, Metals and Materials Society, and ASM International 1992 |
| abstractGer |
Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. © The Minerals, Metals and Materials Society, and ASM International 1992 |
| abstract_unstemmed |
Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity. © The Minerals, Metals and Materials Society, and ASM International 1992 |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_62 GBV_ILN_70 GBV_ILN_602 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_4035 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 |
| container_issue |
4 |
| title_short |
Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates |
| url |
https://doi.org/10.1007/BF02665041 |
| remote_bool |
false |
| author2 |
Godbole, M. J. |
| author2Str |
Godbole, M. J. |
| ppnlink |
129429058 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/BF02665041 |
| up_date |
2024-07-03T21:26:06.461Z |
| _version_ |
1803594725025906689 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2053975539</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230303053501.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200820s1992 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/BF02665041</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2053975539</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)BF02665041-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="a">530</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Pedraza, A. J.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1992</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© The Minerals, Metals and Materials Society, and ASM International 1992</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Laser-assisted sputter deposition has been used to deposit thin metallic films onto ceramic substrates. This process allows the building of a film of arbitrary thickness by sequential deposition of 5- to 150-nm-thick layers alternating with laser melting. Highly adherent films of copper on sapphire and on quartz were obtained. Pulsed-laser treatment also enhances the adhesion of nickel films to sapphire substrates. This critical step in the process is the laser irradiation following each of the initial depositions. In these early stages, an interfacial reaction between film and substrate takes place during laser irradiations. An interfacial compound forms whose nature has been studied by transmission electron microscopy. The morphological features of the film, as well as the amount of film removed during these first irradiations, were analyzed as a function of laser energy density by scanning electron microscopy and by energy dispersive X-ray spectroscopy. The results were correlated with computer simulations of the thermal response of the two-media system to laser heating. The role of the interfacial thermal conductivity during laser processing is analyzed. The state of the substrate,e.g., annealed or as-polished, influences the morphology of the irradiated film. This effect is related to an enhancement of interfacial thermal conductivity.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metallurgical Transaction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sapphire</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Excimer Laser</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sapphire Substrate</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Copper Film</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Godbole, M. J.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Metallurgical transactions. A, Physical metallurgy and materials science</subfield><subfield code="d">Springer-Verlag, 1975</subfield><subfield code="g">23(1992), 4 vom: Apr., Seite 1095-1103</subfield><subfield code="w">(DE-627)129429058</subfield><subfield code="w">(DE-600)192156-3</subfield><subfield code="w">(DE-576)01480204X</subfield><subfield code="x">0026-086X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:23</subfield><subfield code="g">year:1992</subfield><subfield code="g">number:4</subfield><subfield code="g">month:04</subfield><subfield code="g">pages:1095-1103</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/BF02665041</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2016</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">23</subfield><subfield code="j">1992</subfield><subfield code="e">4</subfield><subfield code="c">04</subfield><subfield code="h">1095-1103</subfield></datafield></record></collection>
|
| score |
7.401787 |