Hard plasma chemical coatings based on silicon carbon nitride
Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanica...
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| Autor*in: |
Ivashchenko, L. A. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2007 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer Science+Business Media, Inc. 2007 |
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| Übergeordnetes Werk: |
Enthalten in: Powder metallurgy and metal ceramics - Springer US, 1993, 46(2007), 11-12 vom: Nov., Seite 543-549 |
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| Übergeordnetes Werk: |
volume:46 ; year:2007 ; number:11-12 ; month:11 ; pages:543-549 |
| Links: |
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| DOI / URN: |
10.1007/s11106-007-0084-7 |
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| Katalog-ID: |
OLC2061150659 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2061150659 | ||
| 003 | DE-627 | ||
| 005 | 20230513032928.0 | ||
| 007 | tu | ||
| 008 | 200819s2007 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s11106-007-0084-7 |2 doi | |
| 035 | |a (DE-627)OLC2061150659 | ||
| 035 | |a (DE-He213)s11106-007-0084-7-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 670 |q VZ |
| 100 | 1 | |a Ivashchenko, L. A. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Hard plasma chemical coatings based on silicon carbon nitride |
| 264 | 1 | |c 2007 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © Springer Science+Business Media, Inc. 2007 | ||
| 520 | |a Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. | ||
| 650 | 4 | |a nanocrystalline coating | |
| 650 | 4 | |a silicon carbon nitride | |
| 650 | 4 | |a plasma-enhanced chemical vapor deposition (PECVD) | |
| 650 | 4 | |a methyltrichlorosilane (MTCS) | |
| 650 | 4 | |a nanoindentation | |
| 650 | 4 | |a adhesion | |
| 650 | 4 | |a friction | |
| 650 | 4 | |a microabrasive wear | |
| 700 | 1 | |a Ivashchenko, V. I. |4 aut | |
| 700 | 1 | |a Porada, O. K. |4 aut | |
| 700 | 1 | |a Dub, S. M. |4 aut | |
| 700 | 1 | |a Skrinskii, P. L. |4 aut | |
| 700 | 1 | |a Ushakov, M. V. |4 aut | |
| 700 | 1 | |a Karpets, M. V. |4 aut | |
| 700 | 1 | |a Stegnii, A. I. |4 aut | |
| 700 | 1 | |a Grishnova, L. A. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Powder metallurgy and metal ceramics |d Springer US, 1993 |g 46(2007), 11-12 vom: Nov., Seite 543-549 |w (DE-627)171221524 |w (DE-600)1167195-6 |w (DE-576)038719614 |x 1068-1302 |7 nnns |
| 773 | 1 | 8 | |g volume:46 |g year:2007 |g number:11-12 |g month:11 |g pages:543-549 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s11106-007-0084-7 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a SSG-OLC-PHA | ||
| 912 | |a SSG-OLC-DE-84 | ||
| 912 | |a GBV_ILN_32 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_2014 | ||
| 951 | |a AR | ||
| 952 | |d 46 |j 2007 |e 11-12 |c 11 |h 543-549 | ||
| author_variant |
l a i la lai v i i vi vii o k p ok okp s m d sm smd p l s pl pls m v u mv mvu m v k mv mvk a i s ai ais l a g la lag |
|---|---|
| matchkey_str |
article:10681302:2007----::adlsahmclotnsaeoslc |
| hierarchy_sort_str |
2007 |
| publishDate |
2007 |
| allfields |
10.1007/s11106-007-0084-7 doi (DE-627)OLC2061150659 (DE-He213)s11106-007-0084-7-p DE-627 ger DE-627 rakwb eng 670 VZ Ivashchenko, L. A. verfasserin aut Hard plasma chemical coatings based on silicon carbon nitride 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer Science+Business Media, Inc. 2007 Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear Ivashchenko, V. I. aut Porada, O. K. aut Dub, S. M. aut Skrinskii, P. L. aut Ushakov, M. V. aut Karpets, M. V. aut Stegnii, A. I. aut Grishnova, L. A. aut Enthalten in Powder metallurgy and metal ceramics Springer US, 1993 46(2007), 11-12 vom: Nov., Seite 543-549 (DE-627)171221524 (DE-600)1167195-6 (DE-576)038719614 1068-1302 nnns volume:46 year:2007 number:11-12 month:11 pages:543-549 https://doi.org/10.1007/s11106-007-0084-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_70 GBV_ILN_2014 AR 46 2007 11-12 11 543-549 |
| spelling |
10.1007/s11106-007-0084-7 doi (DE-627)OLC2061150659 (DE-He213)s11106-007-0084-7-p DE-627 ger DE-627 rakwb eng 670 VZ Ivashchenko, L. A. verfasserin aut Hard plasma chemical coatings based on silicon carbon nitride 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer Science+Business Media, Inc. 2007 Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear Ivashchenko, V. I. aut Porada, O. K. aut Dub, S. M. aut Skrinskii, P. L. aut Ushakov, M. V. aut Karpets, M. V. aut Stegnii, A. I. aut Grishnova, L. A. aut Enthalten in Powder metallurgy and metal ceramics Springer US, 1993 46(2007), 11-12 vom: Nov., Seite 543-549 (DE-627)171221524 (DE-600)1167195-6 (DE-576)038719614 1068-1302 nnns volume:46 year:2007 number:11-12 month:11 pages:543-549 https://doi.org/10.1007/s11106-007-0084-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_70 GBV_ILN_2014 AR 46 2007 11-12 11 543-549 |
| allfields_unstemmed |
10.1007/s11106-007-0084-7 doi (DE-627)OLC2061150659 (DE-He213)s11106-007-0084-7-p DE-627 ger DE-627 rakwb eng 670 VZ Ivashchenko, L. A. verfasserin aut Hard plasma chemical coatings based on silicon carbon nitride 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer Science+Business Media, Inc. 2007 Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear Ivashchenko, V. I. aut Porada, O. K. aut Dub, S. M. aut Skrinskii, P. L. aut Ushakov, M. V. aut Karpets, M. V. aut Stegnii, A. I. aut Grishnova, L. A. aut Enthalten in Powder metallurgy and metal ceramics Springer US, 1993 46(2007), 11-12 vom: Nov., Seite 543-549 (DE-627)171221524 (DE-600)1167195-6 (DE-576)038719614 1068-1302 nnns volume:46 year:2007 number:11-12 month:11 pages:543-549 https://doi.org/10.1007/s11106-007-0084-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_70 GBV_ILN_2014 AR 46 2007 11-12 11 543-549 |
| allfieldsGer |
10.1007/s11106-007-0084-7 doi (DE-627)OLC2061150659 (DE-He213)s11106-007-0084-7-p DE-627 ger DE-627 rakwb eng 670 VZ Ivashchenko, L. A. verfasserin aut Hard plasma chemical coatings based on silicon carbon nitride 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer Science+Business Media, Inc. 2007 Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear Ivashchenko, V. I. aut Porada, O. K. aut Dub, S. M. aut Skrinskii, P. L. aut Ushakov, M. V. aut Karpets, M. V. aut Stegnii, A. I. aut Grishnova, L. A. aut Enthalten in Powder metallurgy and metal ceramics Springer US, 1993 46(2007), 11-12 vom: Nov., Seite 543-549 (DE-627)171221524 (DE-600)1167195-6 (DE-576)038719614 1068-1302 nnns volume:46 year:2007 number:11-12 month:11 pages:543-549 https://doi.org/10.1007/s11106-007-0084-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_70 GBV_ILN_2014 AR 46 2007 11-12 11 543-549 |
| allfieldsSound |
10.1007/s11106-007-0084-7 doi (DE-627)OLC2061150659 (DE-He213)s11106-007-0084-7-p DE-627 ger DE-627 rakwb eng 670 VZ Ivashchenko, L. A. verfasserin aut Hard plasma chemical coatings based on silicon carbon nitride 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer Science+Business Media, Inc. 2007 Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear Ivashchenko, V. I. aut Porada, O. K. aut Dub, S. M. aut Skrinskii, P. L. aut Ushakov, M. V. aut Karpets, M. V. aut Stegnii, A. I. aut Grishnova, L. A. aut Enthalten in Powder metallurgy and metal ceramics Springer US, 1993 46(2007), 11-12 vom: Nov., Seite 543-549 (DE-627)171221524 (DE-600)1167195-6 (DE-576)038719614 1068-1302 nnns volume:46 year:2007 number:11-12 month:11 pages:543-549 https://doi.org/10.1007/s11106-007-0084-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_70 GBV_ILN_2014 AR 46 2007 11-12 11 543-549 |
| language |
English |
| source |
Enthalten in Powder metallurgy and metal ceramics 46(2007), 11-12 vom: Nov., Seite 543-549 volume:46 year:2007 number:11-12 month:11 pages:543-549 |
| sourceStr |
Enthalten in Powder metallurgy and metal ceramics 46(2007), 11-12 vom: Nov., Seite 543-549 volume:46 year:2007 number:11-12 month:11 pages:543-549 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear |
| dewey-raw |
670 |
| isfreeaccess_bool |
false |
| container_title |
Powder metallurgy and metal ceramics |
| authorswithroles_txt_mv |
Ivashchenko, L. A. @@aut@@ Ivashchenko, V. I. @@aut@@ Porada, O. K. @@aut@@ Dub, S. M. @@aut@@ Skrinskii, P. L. @@aut@@ Ushakov, M. V. @@aut@@ Karpets, M. V. @@aut@@ Stegnii, A. I. @@aut@@ Grishnova, L. A. @@aut@@ |
| publishDateDaySort_date |
2007-11-01T00:00:00Z |
| hierarchy_top_id |
171221524 |
| dewey-sort |
3670 |
| id |
OLC2061150659 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2061150659</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230513032928.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200819s2007 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s11106-007-0084-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2061150659</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s11106-007-0084-7-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ivashchenko, L. A.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Hard plasma chemical coatings based on silicon carbon nitride</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer Science+Business Media, Inc. 2007</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">nanocrystalline coating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">silicon carbon nitride</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">plasma-enhanced chemical vapor deposition (PECVD)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">methyltrichlorosilane (MTCS)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">nanoindentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">adhesion</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">friction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microabrasive wear</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ivashchenko, V. I.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Porada, O. K.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dub, S. M.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Skrinskii, P. L.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ushakov, M. V.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Karpets, M. V.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Stegnii, A. I.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Grishnova, L. A.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Powder metallurgy and metal ceramics</subfield><subfield code="d">Springer US, 1993</subfield><subfield code="g">46(2007), 11-12 vom: Nov., Seite 543-549</subfield><subfield code="w">(DE-627)171221524</subfield><subfield code="w">(DE-600)1167195-6</subfield><subfield code="w">(DE-576)038719614</subfield><subfield code="x">1068-1302</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:46</subfield><subfield code="g">year:2007</subfield><subfield code="g">number:11-12</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:543-549</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s11106-007-0084-7</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-DE-84</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">46</subfield><subfield code="j">2007</subfield><subfield code="e">11-12</subfield><subfield code="c">11</subfield><subfield code="h">543-549</subfield></datafield></record></collection>
|
| author |
Ivashchenko, L. A. |
| spellingShingle |
Ivashchenko, L. A. ddc 670 misc nanocrystalline coating misc silicon carbon nitride misc plasma-enhanced chemical vapor deposition (PECVD) misc methyltrichlorosilane (MTCS) misc nanoindentation misc adhesion misc friction misc microabrasive wear Hard plasma chemical coatings based on silicon carbon nitride |
| authorStr |
Ivashchenko, L. A. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)171221524 |
| format |
Article |
| dewey-ones |
670 - Manufacturing |
| delete_txt_mv |
keep |
| author_role |
aut aut aut aut aut aut aut aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
1068-1302 |
| topic_title |
670 VZ Hard plasma chemical coatings based on silicon carbon nitride nanocrystalline coating silicon carbon nitride plasma-enhanced chemical vapor deposition (PECVD) methyltrichlorosilane (MTCS) nanoindentation adhesion friction microabrasive wear |
| topic |
ddc 670 misc nanocrystalline coating misc silicon carbon nitride misc plasma-enhanced chemical vapor deposition (PECVD) misc methyltrichlorosilane (MTCS) misc nanoindentation misc adhesion misc friction misc microabrasive wear |
| topic_unstemmed |
ddc 670 misc nanocrystalline coating misc silicon carbon nitride misc plasma-enhanced chemical vapor deposition (PECVD) misc methyltrichlorosilane (MTCS) misc nanoindentation misc adhesion misc friction misc microabrasive wear |
| topic_browse |
ddc 670 misc nanocrystalline coating misc silicon carbon nitride misc plasma-enhanced chemical vapor deposition (PECVD) misc methyltrichlorosilane (MTCS) misc nanoindentation misc adhesion misc friction misc microabrasive wear |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
Powder metallurgy and metal ceramics |
| hierarchy_parent_id |
171221524 |
| dewey-tens |
670 - Manufacturing |
| hierarchy_top_title |
Powder metallurgy and metal ceramics |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)171221524 (DE-600)1167195-6 (DE-576)038719614 |
| title |
Hard plasma chemical coatings based on silicon carbon nitride |
| ctrlnum |
(DE-627)OLC2061150659 (DE-He213)s11106-007-0084-7-p |
| title_full |
Hard plasma chemical coatings based on silicon carbon nitride |
| author_sort |
Ivashchenko, L. A. |
| journal |
Powder metallurgy and metal ceramics |
| journalStr |
Powder metallurgy and metal ceramics |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
600 - Technology |
| recordtype |
marc |
| publishDateSort |
2007 |
| contenttype_str_mv |
txt |
| container_start_page |
543 |
| author_browse |
Ivashchenko, L. A. Ivashchenko, V. I. Porada, O. K. Dub, S. M. Skrinskii, P. L. Ushakov, M. V. Karpets, M. V. Stegnii, A. I. Grishnova, L. A. |
| container_volume |
46 |
| class |
670 VZ |
| format_se |
Aufsätze |
| author-letter |
Ivashchenko, L. A. |
| doi_str_mv |
10.1007/s11106-007-0084-7 |
| dewey-full |
670 |
| title_sort |
hard plasma chemical coatings based on silicon carbon nitride |
| title_auth |
Hard plasma chemical coatings based on silicon carbon nitride |
| abstract |
Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. © Springer Science+Business Media, Inc. 2007 |
| abstractGer |
Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. © Springer Science+Business Media, Inc. 2007 |
| abstract_unstemmed |
Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings. © Springer Science+Business Media, Inc. 2007 |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_32 GBV_ILN_70 GBV_ILN_2014 |
| container_issue |
11-12 |
| title_short |
Hard plasma chemical coatings based on silicon carbon nitride |
| url |
https://doi.org/10.1007/s11106-007-0084-7 |
| remote_bool |
false |
| author2 |
Ivashchenko, V. I. Porada, O. K. Dub, S. M. Skrinskii, P. L. Ushakov, M. V. Karpets, M. V. Stegnii, A. I. Grishnova, L. A. |
| author2Str |
Ivashchenko, V. I. Porada, O. K. Dub, S. M. Skrinskii, P. L. Ushakov, M. V. Karpets, M. V. Stegnii, A. I. Grishnova, L. A. |
| ppnlink |
171221524 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/s11106-007-0084-7 |
| up_date |
2024-07-04T02:53:54.292Z |
| _version_ |
1803615348248805376 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2061150659</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230513032928.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200819s2007 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s11106-007-0084-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2061150659</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s11106-007-0084-7-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">670</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ivashchenko, L. A.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Hard plasma chemical coatings based on silicon carbon nitride</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer Science+Business Media, Inc. 2007</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized with AFM, XRD, and FTIR. Their mechanical properties are determined with nanoindentation. The abrasion wear resistance is examined using a ball-on-plane (calowear) test and adhesion to the base using a scratch test. The x-ray diffraction indicates that the coatings produced at moderate $ F_{N} $ are nanostructured and represent β-$ C_{3} $$ N_{4} $ crystallites embedded into the amorphous a-SiCN matrix. The coatings deposited at a higher nitrogen flow rate are amorphous. The nanostructure is supposed to result from an increase in hardness (25 GPa) and Young’s modulus (above 200 GPa). The tribological tests have revealed that the friction coefficients of the coatings containing nitrogen are two to three times smaller than those based on SiC and deposited on a silicon substrate. The ball-on-plane tests show that the nanostructured coatings also exhibit the highest abrasive wear resistance. These findings demonstrate that the SiCN films deposited using MTCS show good mechanical and tribological properties and can be used as wear-resistant coatings.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">nanocrystalline coating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">silicon carbon nitride</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">plasma-enhanced chemical vapor deposition (PECVD)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">methyltrichlorosilane (MTCS)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">nanoindentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">adhesion</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">friction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microabrasive wear</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ivashchenko, V. I.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Porada, O. K.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dub, S. M.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Skrinskii, P. L.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ushakov, M. V.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Karpets, M. V.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Stegnii, A. I.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Grishnova, L. A.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Powder metallurgy and metal ceramics</subfield><subfield code="d">Springer US, 1993</subfield><subfield code="g">46(2007), 11-12 vom: Nov., Seite 543-549</subfield><subfield code="w">(DE-627)171221524</subfield><subfield code="w">(DE-600)1167195-6</subfield><subfield code="w">(DE-576)038719614</subfield><subfield code="x">1068-1302</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:46</subfield><subfield code="g">year:2007</subfield><subfield code="g">number:11-12</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:543-549</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s11106-007-0084-7</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-DE-84</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">46</subfield><subfield code="j">2007</subfield><subfield code="e">11-12</subfield><subfield code="c">11</subfield><subfield code="h">543-549</subfield></datafield></record></collection>
|
| score |
7.4002647 |